EP3296571A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3296571A1
EP3296571A1 EP17182496.4A EP17182496A EP3296571A1 EP 3296571 A1 EP3296571 A1 EP 3296571A1 EP 17182496 A EP17182496 A EP 17182496A EP 3296571 A1 EP3296571 A1 EP 3296571A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
rotor
pumping stage
recipient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17182496.4A
Other languages
German (de)
English (en)
Other versions
EP3296571B1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Martin Lohse
Jan Hofmann
Florian Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17182496.4A priority Critical patent/EP3296571B1/fr
Publication of EP3296571A1 publication Critical patent/EP3296571A1/fr
Priority to JP2018133907A priority patent/JP6722724B2/ja
Application granted granted Critical
Publication of EP3296571B1 publication Critical patent/EP3296571B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/10—Two-dimensional
    • F05D2250/12—Two-dimensional rectangular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump, with at least one first pumping stage having at least one first rotor and having at least one second pumping stage having at least one second rotor.
  • a vacuum pump in particular turbomolecular pump
  • the axis of rotation of the second rotor is arranged coaxially with that of the first rotor.
  • two or more taps may be provided, which are assigned to different pressure levels.
  • the two taps are arranged side by side. Due to the conventionally circular geometry of these taps, which are also referred to as ports, a not inconsiderable amount of space is required.
  • the ports can not be arranged close to each other at required minimum cross-sectional areas.
  • the pump comprises an inlet opening assigned to the first pumping stage, which as a rule has a substantially circular configuration, a second inlet opening assigned to the second pumping stage, the latter having a substantially rectangular or square basic shape.
  • the first and second inlet openings are arranged on an axial end face of the vacuum pump.
  • the second inlet opening is also via a tap channel with a Connected to the nozzle opening, which - seen in the axial direction of the pump - is arranged between the first and the second pumping stage.
  • the second inlet opening As a result of the rectangular or square basic shape of the second inlet opening, it can be arranged closer to the first inlet opening, with the same size of the cross-sectional area, than would be the case with a circularly shaped second inlet opening.
  • the two centers of the two inlet openings can thus move close to each other, so that the space requirement of the vacuum pump is reduced in a direction transverse, in particular perpendicular to the axis of rotation of the rotor or rotors.
  • first and the second rotor have a common pump shaft.
  • the first and second rotors may also have a substantially equal diameter, for a pump having a pump power of about 300 l / second, e.g. 100 to 140 mm.
  • the first inlet opening has a substantially identical or slightly larger diameter than the first rotor. This allows a large spatial proximity between the first rotor and the first inlet opening.
  • the first and the second inlet openings lie substantially in one plane, in particular in a plane perpendicular to the axis of rotation mentioned at the beginning. This measure simplifies the connection of the geometry of the pump to a system to be evacuated.
  • a cross-sectional geometry of the second inlet opening may substantially correspond to a cross-sectional geometry of the dispensing channel and / or the dispensing opening.
  • a distance of a center point of the first inlet opening from a center point of the second inlet opening is less than 1.2 times a diameter of the first and / or the second rotor.
  • a further simplification of the connection of the pump to a recipient is achieved when a flange for fastening the pump to the recipient comprises the first and the second inlet opening.
  • a flange in particular the flange described above, may be formed integrally with a housing of the vacuum pump for fastening the pump to a recipient. It is also possible that a flange for fastening the pump to a recipient has an odd number of attachment points, in particular three attachment points. During assembly, the pump is then hung, for example, first in two attachment points. The third attachment point then serves to fix ("tighten") the pump. This measure simplifies the assembly in a significant way.
  • a flange for mounting the pump to a recipient may comprise at least one mounting portion, in particular one or more milled grooves, which cooperates with at least one complementary formed mounting portion on the recipient for mounting purposes.
  • the mounting portion of the flange is formed so as to be in the mounting portion of the recipient can be inserted.
  • the pump on the flange milled, with which the pump can be pushed during assembly in a suspension of the recipient.
  • the pump is already held and it can be easily attached / tightened the actual mounting screws.
  • These milled holes for easier installation can also be simple holes.
  • a channel axis of the dispensing channel is arranged substantially parallel to the axis of rotation of the first and / or second rotor.
  • the channel axis obliquely to said axis of rotation, if this leads to an improvement in the flow conditions in the interior of the pump in each case. In many cases, this measure achieves a better flow conductance and fewer stalls occur.
  • the nozzle opening may have a substantially rectangular or square basic shape.
  • a housing section comprising the dispensing channel may be formed integrally with a housing section of the vacuum pump which comprises the pumping stages.
  • Fig. 1 shows a vacuum pump 10 with a first pumping stage 12 and a second pumping stage 14.
  • the two pumping stages 12, 14 are arranged coaxially and each have a plurality of rotors 15 and a common pumping shaft 16.
  • the pump shaft 16 is driven by a motor, not shown, to a rotary motion.
  • the vacuum pump 10 is a so-called split-flow pump which has a first inlet opening 18 and a second inlet opening 20.
  • the first inlet opening 18 is assigned to the first pumping stage 12. That the first pumping stage 12 sucks gas from a recipient connected to the pump 10 and supplies it to the second pumping stage 14.
  • the second inlet opening 20 communicates via a dispensing channel 22 with a dispensing opening 24, which is arranged between the first pumping stage 12 and the second pumping stage 14. That At the two inlet openings 18, 20 are at different pressure levels.
  • connection flange 26 For attachment of the pump 10 to the recipient, a connection flange 26 is provided. In the illustrated example, it forms an end face of the vacuum pump 10, which is connected to the recipient. It may be integrally formed with a housing or housing portion of the pump 10. But it is also possible to design it as a separate component, which is connectable to the housing or with one or more housing portion (s).
  • Fig. 2 shows the front side of the pump 10 in a plan view.
  • the connecting flange 26 has a substantially rectangular basic shape (rounded rectangle Corners). Other geometric basic shapes of the connecting flange 26 are also conceivable.
  • At least the second inlet opening 20 has a substantially rectangular basic shape.
  • a square basic shape can also be chosen.
  • the first inlet port 18 is circular in the present example to avoid a geometry change between the inlet port 18 and the rotor of the first pumping stage 12. On the one hand, this results in that the first pumping stage 12 can be arranged very close to the first inlet opening 18. On the other hand, the occurrence of vortices, which are difficult to avoid in a geometry change of the flow path to be flowed through by the gas, virtually impossible.
  • FIG. 2 Furthermore, three attachment pumps 32, 32 'can be seen.
  • the pump 10 When mounting the pump 10 to the corresponding recipient, the pump 10 is first hung on the arranged on a longitudinal side of the connecting flange 26 mounting pumps 32. The assembly is completed, in which a fixation by means of the attachment point 32 'takes place.
  • the cross-sectional area of the second inlet opening 20 ie, its area A1 substantially exactly as large as a surface area A2 of the tapping opening 24 (cf. Fig. 4 ).
  • a channel axis 28 of the dispensing channel 22 is arranged substantially parallel to the axis of rotation of the pump shaft 16.
  • a distance D between the pump shaft 16 and the channel axis 28 is less than 1.2 times the diameter of the rotors 15 of the first pumping stage 12, which in the present embodiment is exactly the same size as that of the rotors 15 of the second pumping stage 14.
  • a parallel arrangement of the pump shaft 16 and the dispensing channel 22 or its axis 28 is not absolutely necessary.
  • the housing portion 31 and the dispensing channel 22 forming housing portion 32 may be separate components. However, a one-piece design of the housing of the pump 10 is possible and advantageous in many cases.
  • the housing or its components 30, 31, 32 may be, for example, milling and / or castings.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP17182496.4A 2017-07-21 2017-07-21 Pompe à vide Active EP3296571B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17182496.4A EP3296571B1 (fr) 2017-07-21 2017-07-21 Pompe à vide
JP2018133907A JP6722724B2 (ja) 2017-07-21 2018-07-17 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17182496.4A EP3296571B1 (fr) 2017-07-21 2017-07-21 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3296571A1 true EP3296571A1 (fr) 2018-03-21
EP3296571B1 EP3296571B1 (fr) 2021-11-03

Family

ID=59384025

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17182496.4A Active EP3296571B1 (fr) 2017-07-21 2017-07-21 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3296571B1 (fr)
JP (1) JP6722724B2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3564538A1 (fr) * 2019-02-20 2019-11-06 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) * 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
EP1852613A2 (fr) * 2006-05-04 2007-11-07 Pfeiffer Vacuum Gmbh Pompe à vide avec boîtier
US20100098558A1 (en) * 2007-02-28 2010-04-22 Makarov Alexander A Vacuum Pump or Vacuum Apparatus with Vacuum Pump
EP2975268A2 (fr) * 2014-07-17 2016-01-20 Pfeiffer Vacuum Gmbh Système à vide
WO2016193664A1 (fr) * 2015-06-01 2016-12-08 Edwards Limited Pompe à vide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) * 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
EP1852613A2 (fr) * 2006-05-04 2007-11-07 Pfeiffer Vacuum Gmbh Pompe à vide avec boîtier
US20100098558A1 (en) * 2007-02-28 2010-04-22 Makarov Alexander A Vacuum Pump or Vacuum Apparatus with Vacuum Pump
EP2975268A2 (fr) * 2014-07-17 2016-01-20 Pfeiffer Vacuum Gmbh Système à vide
WO2016193664A1 (fr) * 2015-06-01 2016-12-08 Edwards Limited Pompe à vide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3564538A1 (fr) * 2019-02-20 2019-11-06 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe

Also Published As

Publication number Publication date
EP3296571B1 (fr) 2021-11-03
JP6722724B2 (ja) 2020-07-15
JP2019049257A (ja) 2019-03-28

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