EP3555475A1 - Système de pompe à vide et son procédé de fonctionnement - Google Patents

Système de pompe à vide et son procédé de fonctionnement

Info

Publication number
EP3555475A1
EP3555475A1 EP17803941.8A EP17803941A EP3555475A1 EP 3555475 A1 EP3555475 A1 EP 3555475A1 EP 17803941 A EP17803941 A EP 17803941A EP 3555475 A1 EP3555475 A1 EP 3555475A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
control variable
auxiliary
operating
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17803941.8A
Other languages
German (de)
English (en)
Other versions
EP3555475B1 (fr
Inventor
Max PELIKAN
Daniel Reinhard
Raffaello GHISLOTTI
Dirk Schiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3555475A1 publication Critical patent/EP3555475A1/fr
Application granted granted Critical
Publication of EP3555475B1 publication Critical patent/EP3555475B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a vacuum pumping system and a method for operating a vacuum pumping system.
  • a vacuum pumping system has, for example, at least one main vacuum pump and at least one auxiliary pump.
  • the main vacuum pump is, for example, a dry-compressing vacuum pump such as a screw vacuum pump.
  • An auxiliary pump is connected to an outlet of the main vacuum pump for assistance.
  • Diaphragm pumps or ejector pumps are frequently used as auxiliary pumps.
  • the delivery volume of the auxiliary pump is significantly lower than the delivery volume of the main vacuum pump.
  • the delivery volume of the auxiliary vacuum pump is less than 1/50 of the main vacuum pump.
  • a vacuum pumping system in which also a control device for connecting the auxiliary pump, in particular an ejector is provided, said control device having exclusively mechanical components.
  • sealing gas is often supplied to the pump.
  • Barrier gas is used in particular to protect shaft seals and oil compartments from dust and other particles.
  • the use of sealing gas has the disadvantage that a penetrating into the vacuum pump gas must be additionally funded by the vacuum pump system (ejector). This causes an additional energy requirement.
  • the object of the invention is to provide a vacuum pumping system and a method for operating a vacuum pumping system, in which the energy requirement can be reduced even when using sealing gas.
  • the vacuum pumping system has a main vacuum pump, which can be connected to a chamber to be evacuated.
  • the main vacuum pump is in particular a dry-compressing vacuum pump such as a screw pump.
  • an auxiliary pump Connected to an outlet of the main vacuum pump is an auxiliary pump, which in a preferred embodiment is an ejector.
  • the vacuum pump system has a sealing gas supply device and a control device connected to the sealing gas supply device.
  • the control device With the control device, it is possible to turn off and on the Sperrgaszu211 announced. This switching off and on of the sealing gas supply device takes place as a function of a predetermined control variable.
  • the amount of purge gas may exceed the amount of gas that the ejector can deliver, therefore sealing gas must be shut off to evacuate the outlet.
  • control device may be connected to the auxiliary vacuum pump, so that the auxiliary vacuum pump can be switched off and on. This also takes place as a function of a control variable.
  • control variables used when switching off and on the barrier gas supply device or the auxiliary vacuum pump may be different or even the same control variable.
  • the preferred control variables described below are in a preferred embodiment both for controlling the auxiliary vacuum pump and for controlling the Sperrgaszu- used, wherein any combinations of the individual control variables are possible, so that, for example, the control of the locking gas supply means using a different control variable than the control of the auxiliary vacuum pump.
  • the auxiliary vacuum pump such as the ejector pump
  • the auxiliary vacuum pump is switched on, preferably only when the main pumping mode is completed and the vacuum pumping system goes into standby mode (end pressure mode).
  • a shutdown of the sealing gas supply in standby mode is carried out in a particularly preferred embodiment.
  • the connection of the auxiliary vacuum pump and / or the Sperrgaszulite accordingly preferably takes place in response to a control variable, which is defined that the system is now in standby mode, or is just before or shortly after the standby mode.
  • a pressure value in the chamber to be evacuated and / or at the inlet of the main vacuum pump and / or at the outlet of the main vacuum pump can be determined as the control variable.
  • the auxiliary vacuum pump is switched on.
  • the limit values may differ with respect to the chamber, the pump inlet or the pump outlet. These values can also be combined with one another, so that the auxiliary vacuum pump is switched on, for example, only if two limit values are undershot at the same time.
  • a check valve is provided at the outlet of the main vacuum pump.
  • This check valve is preferably connected to the control device.
  • the position of the check valve can be used as a control variable.
  • the control of the check valve can be determined by a sensor and transmitted to the control device. It is preferred that when the check valve is closed and the sealing gas supply is closed.
  • a connection of the auxiliary vacuum pump It takes place when the check valve is open in zugter embodiment, a connection of the sealing gas and preferably simultaneously switching off the auxiliary vacuum pump.
  • a predetermined control variable is a characteristic of an electric motor driving the main vacuum pump.
  • the current consumption of the electric motor or a signal of a frequency converter is particularly suitable.
  • the auxiliary vacuum pump is switched on and / or the barrier gas supply is switched off.
  • the predetermined control variable is the undershooting of a pressure value at the main vacuum pump.
  • This pressure value can be determined, for example, with a pressure sensor.
  • the corresponding pressure limit is preferably 1 mbar.
  • the undershooting of a pressure value at the outlet of the main vacuum pump can be used.
  • This pressure value can also be determined by a pressure sensor, wherein the pressure limit is preferably 1020 mbar.
  • Another optionally additional control variable may be a characteristic of an electric motor which drives the main vacuum pump.
  • it may be the current consumption.
  • an increase in power consumption at final pressure by preferably 10% serve as a predetermined control variable.
  • the control device has an electrically switchable valve or is connected thereto.
  • This is arranged in the flow direction, preferably in front of the auxiliary vacuum pump. A corresponding switching of the valve thus takes place when switching on or off the auxiliary vacuum pump.
  • this electric valve can be integrated into the vacuum pump.
  • an electrically switchable valve may be provided at a barrier gas inlet. This electrical switchable valve may in turn be part of the control device or be connected to this, so that it is possible in a simple manner, off and on the barrier gas supply.
  • two correspondingly switchable valves can be provided for switching on and off the auxiliary pump and for switching off and on the blocking gas supply.
  • a pressure rocker can be provided.
  • the pressure rocker is connected to corresponding pressure lines, so that the pressure rocker is switched as soon as one or more of the pressures defined above should fall below or exceed a predetermined limit.
  • the additional pressure rocker is released and thus supplying propellant gas to the ejector. Accordingly, the propellant gas supply to the ejector can be switched off.
  • a mechanical pressure rocker also switching off and on of the barrier gas supply possible.
  • the power consumption can be reduced.
  • the limits are chosen such that the auxiliary vacuum pump, which is in particular an ejector, is not operated during the main pumping mode.
  • the energy demand of the auxiliary vacuum pump is in poor proportion to the amount of gas delivered, so that it is advantageous for reducing the energy demand of the entire system when the auxiliary vacuum pump remains switched off during the main pumping mode.
  • the limit values are preferably selected such that no barrier gas is supplied in an auxiliary pump mode. This can also be done energy savings.
  • the combination of shutting off the purge gas supply during the auxiliary pumping mode and shutting off the auxiliary pump during the main pumping mode results in significant energy savings.
  • the invention relates to a method for operating a vacuum pumping system.
  • This is in particular a vacuum pumping system as described above, the method preferably being developed as described above with reference to the vacuum pumping system.
  • the method according to the invention for operating a vacuum pump system has a control device which is connected to the sealing gas supply device and serves for switching off and on the blocking gas supply device as a function of a predetermined control variable. It is further preferred that not only the Sperrgaszutax overlooked off and is switched on, but that in addition also the auxiliary pump in dependence of a control variable off and is switched on. This may be the same or a different control variable, wherein it is preferred that when switching off and on of the sealing gas supply device and when switching off and on the auxiliary vacuum pump is the same control variable.
  • switching off the barrier gas supply is preferably carried out in standby mode.
  • the method according to the invention is preferably further developed as described above with reference to the vacuum pumping system according to the invention, in particular in a preferred embodiment.
  • FIG. 1 shows a schematic schematic diagram of a vacuum pumping system with control device.
  • the vacuum pumping system has a main vacuum pump 10.
  • the outlet of the main vacuum pump 10 is connected to an auxiliary vacuum pump 12, which is in particular an ejector.
  • the inlet of the main vacuum pump 10 is connected to a chamber 14 to be evacuated.
  • a pump 16 is connected to the main vacuum pump 10. This is connected via a controllable valve 18 to a container 24, is provided in the sealing gas. With the help of the pump 16 is thus a supply of sealing gas to the main vacuum pump 10. If the sealing gas is under pressure, the pump 16 can also be omitted.
  • a control device 20 is connected in the illustrated embodiment with a pressure sensor 22 which is disposed between the chamber 14 to be evacuated and the main vacuum pump 10.
  • the pressure measured by the pressure sensor 22 serves as a control variable for the control device 20.
  • the electric valve 18 is controlled by means of which blocking gas is supplied to the main vacuum pump 10. Furthermore, a corresponding regulation of the ejector 12 is carried out. In this case, an electric valve can also be regulated so that the propellant gas supply to the ejector 12 is regulated.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un système de pompe à vide présentant une pompe à vide principale (10) raccordée à une chambre (14) à mettre sous vide. Une pompe auxiliaire (12) est raccordée à une sortie de la pompe à vide principale (10). En outre, un dispositif d'apport de gaz d'arrêt est raccordé à la pompe à vide principale. Un dispositif de régulation (20) permet de mettre en service et hors service le dispositif d'apport de gaz d'arrêt en fonction d'une grandeur de commande prédéfinie. L'invention concerne en outre un procédé de commande du système de pompe à vide.
EP17803941.8A 2016-12-15 2017-11-23 Système de pompe à vide et son procédé de fonctionnement Active EP3555475B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202016007609.5U DE202016007609U1 (de) 2016-12-15 2016-12-15 Vakuumpumpsystem
PCT/EP2017/080191 WO2018108479A1 (fr) 2016-12-15 2017-11-23 Système de pompe à vide et son procédé de fonctionnement

Publications (2)

Publication Number Publication Date
EP3555475A1 true EP3555475A1 (fr) 2019-10-23
EP3555475B1 EP3555475B1 (fr) 2020-09-23

Family

ID=60450664

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17803941.8A Active EP3555475B1 (fr) 2016-12-15 2017-11-23 Système de pompe à vide et son procédé de fonctionnement

Country Status (7)

Country Link
US (2) US11286934B2 (fr)
EP (1) EP3555475B1 (fr)
JP (1) JP2020502410A (fr)
KR (1) KR20190097019A (fr)
CN (1) CN110036204A (fr)
DE (1) DE202016007609U1 (fr)
WO (1) WO2018108479A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
CN114857952A (zh) * 2021-01-20 2022-08-05 上海伊莱茨真空技术有限公司 基于冷凝器及罗茨真空泵的真空系统
TWI823675B (zh) 2022-11-14 2023-11-21 財團法人工業技術研究院 壓差產生裝置

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US3116872A (en) * 1959-05-18 1964-01-07 Bendix Balzers Vacuum Inc Gas ballast pumps
CH464625A (de) * 1966-10-12 1968-10-31 Sulzer Ag Wellendichtung für ein Gebläse, insbesondere für das Umwälzgebläse einer gasgekühlten Kernreaktoranlage
JPS494457B1 (fr) 1970-12-21 1974-02-01
JP3494457B2 (ja) * 1993-07-07 2004-02-09 株式会社大阪真空機器製作所 真空ポンプ装置
DE19524609A1 (de) 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
JPH1125727A (ja) 1997-06-30 1999-01-29 Toshiba Lighting & Technol Corp 投光器
JPH11257277A (ja) * 1998-03-05 1999-09-21 Hitachi Ltd ターボ真空ポンプ
JP3038432B2 (ja) 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
DE19929519A1 (de) 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
GB0502149D0 (en) 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
FR2952683B1 (fr) 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
DE202012002684U1 (de) 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
US11215180B2 (en) 2012-06-28 2022-01-04 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
DE102013223556A1 (de) * 2013-11-19 2015-05-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems
DE202014007963U1 (de) * 2014-10-01 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpsystem
US10094381B2 (en) * 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem

Also Published As

Publication number Publication date
EP3555475B1 (fr) 2020-09-23
US20190345938A1 (en) 2019-11-14
DE202016007609U1 (de) 2018-03-26
US12140146B2 (en) 2024-11-12
CN110036204A (zh) 2019-07-19
WO2018108479A1 (fr) 2018-06-21
KR20190097019A (ko) 2019-08-20
JP2020502410A (ja) 2020-01-23
US11286934B2 (en) 2022-03-29
US20230033429A1 (en) 2023-02-02

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