EP3578814A1 - Système d'alimentation en liquide - Google Patents

Système d'alimentation en liquide Download PDF

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Publication number
EP3578814A1
EP3578814A1 EP18748289.8A EP18748289A EP3578814A1 EP 3578814 A1 EP3578814 A1 EP 3578814A1 EP 18748289 A EP18748289 A EP 18748289A EP 3578814 A1 EP3578814 A1 EP 3578814A1
Authority
EP
European Patent Office
Prior art keywords
pump chamber
liquid
container
bellows
fluid channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18748289.8A
Other languages
German (de)
English (en)
Inventor
Kiyotaka Furuta
Koichi Mori
Hiroshi Takata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eagle Industry Co Ltd
Original Assignee
Eagle Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eagle Industry Co Ltd filed Critical Eagle Industry Co Ltd
Publication of EP3578814A1 publication Critical patent/EP3578814A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/082—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/0824—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0128—Propulsion of the fluid with pumps or compressors
    • F17C2227/0135—Pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point

Definitions

  • the present invention relates to a liquid supply system used to supply cryogenic liquid.
  • An object of the present invention is to provide a liquid supply system that can supply liquid efficiently with reduced time needed for precooling.
  • the liquid supply system is configured in such a way that the height of a location at which the direction of the first fluid channel changes from the vertically upward direction to the vertically downward direction and the height of a location at which the direction of second fluid channel changes from the vertically upward direction to the vertically downward direction are the same.
  • the level of the liquid flowing in the first flow passage and the level of the liquid flowing in the second fluid channel can be kept equal. This prevents situations in which liquid tends to be discharged from one of the fluid passage and not to flow in the other fluid passage from occurring. Therefore, the time needed for precooling can be shortened.
  • the first pump chamber may be formed by a space between a first valve that allows the cryogenic liquid entering through the inlet to flow into the interior of the container and a third valve that allows the cryogenic liquid to flow from the interior of the container to the outlet
  • the second pump chamber may be formed by a space between a second valve that allows the cryogenic liquid entering through the inlet to flow into the interior of the container and a fourth valve that allows the cryogenic liquid to flow from the interior of the container to the outlet
  • the third valve and the fourth valve may be disposed in upper portions of the respective pump chambers.
  • This arrangement enables the pump chamber to be filled with liquid up to the height of the discharging valve.
  • the most part of the interior of the pump chamber is filled with the liquid. This can make the time needed for precooling shorter.
  • gas which is compressible fluid hardly remains in the pump chamber. Therefore, supply of liquid by pumping can be carried out efficiently without being interfered with by the gas.
  • the present invention enables a reduction in the time needed for precooling and efficient supply of liquid.
  • FIG. 1 a diagram illustrating the general configuration of a liquid supply system according to an embodiment.
  • a liquid supply system in an embodiment will be described with reference to Fig. 1 .
  • the liquid supply system is suitably used for the purpose of, for example, maintaining a superconducting device in a ultra-low temperature state.
  • Superconducting devices require perpetual cooling of components such as superconducting coils.
  • a cooled device including a superconducting coil and other components is perpetually cooled by continuous supply of a cryogenic liquid (such as liquid nitrogen or liquid helium) to the cooled device.
  • a circulating fluid passage passing through the cooled device is provided, and the liquid supply system is connected to the circulating fluid passage to cause the cryogenic liquid to circulate, thereby enabling perpetual cooling of the cooled device.
  • Fig. 1 is a schematic diagram illustrating the overall configuration of the liquid supply system in the embodiment, where the overall configuration of the liquid supply system is illustrated in a cross section.
  • Fig. 1 illustrates the overall configuration in cross sections in planes containing the center axis, where the left side and the right side of the center axis illustrate cross sections of different phases. More specifically, the left side of the center axis illustrates the cross sectional configuration at a location at which a first fluid channel that passes through a first pump chamber is clearly seen, and the right side of the center axis illustrates the cross sectional configuration at a location at which a second fluid channel that passes through a second pump chamber is clearly seen.
  • the liquid supply system 10 includes a main unit of the liquid supply system 100 (which will be referred to as the "main system unit 100" hereinafter), a vacuum container 200 in which the main system unit 100 is housed, and pipes (including an inlet pipe 310 and an outlet pipe 320).
  • the inlet pipe 310 and the outlet pipe 320 both extend into the interior of the vacuum container 200 from outside the vacuum container 200 and are connected to the main system unit 100.
  • the interior of the vacuum container 200 is a hermetically sealed space.
  • the interior space of the vacuum container 200 outside the main system unit 100, the inlet pipe 310, and the outlet pipe 320 is kept in a vacuum state. Thus, this space provides heat insulation.
  • the liquid supply system 10 is normally installed on a horizontal surface. In the installed state, the upward direction of the liquid supply system 10 in Fig. 1 is the vertically upward direction, and the downward direction in Fig. 1 is the vertically downward direction.
  • the main system unit 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that is moved in vertically upward and downward directions by the linear actuator 110, and a container 130.
  • the linear actuator 110 is fixed on something suitable, which may be the container 130 or something that is not shown in the drawings.
  • the shaft member 120 extends from outside the container 130 into the inside through an opening 130a provided in the ceiling portion of the container 130.
  • the container 130 has an inlet 130b and an outlet 130c for liquid (cryogenic liquid) in its bottom portion (vertically lower portion).
  • the aforementioned inlet pipe 310 is connected to the inlet 130b, and the outlet pipe 320 is connected to the outlet 130c.
  • a plurality of structural components that compart the interior space into plurality of spaces, which constitute a plurality of pump chambers, passages for liquid, and vacuum chambers providing heat insulation.
  • the structure inside the container 130 will be described in further detail.
  • the shaft member 120 has a main shaft portion 121 having a cavity in it, a cylindrical portion 122 surrounding the outer circumference of the main shaft portion 121, and a connecting portion 123 that connects the main shaft portion 121 and the cylindrical portion 122.
  • the cylindrical portion 122 is provided with an upper outward flange 122a at its upper end and a lower outward flange 122b at its lower end.
  • the container 130 has a substantially cylindrical body portion 130X and a bottom plate 130Y.
  • the body portion 130X has a first inward flange 130Xa provided near its vertical center and a second inward flange 130Xb provided on its upper portion.
  • first fluid passages 130Xc that extend in the axial direction below the first inward flange 130Xa and are spaced apart from one another along the circumferential direction.
  • second fluid passages 130Xd that extend in the axial direction above the first inward flange 130Xa and are spaced apart from one another along the circumferential direction.
  • third fluid passage 130Xe which is an axially extending cylindrical space provided radially outside the region in which the first fluid passages 130Xc are provided.
  • the bottom portion of the container 130 is provided with a fluid passage 130d that extends circumferentially and radially outwardly to join to the first fluid passages 130Xc. Furthermore, the bottom plate 130Y of the container 130 is provided with a fluid passage 130e that extends circumferentially and radially outwardly. These fluid passages 130d and 130e extend uniformly along the circumferential direction to allow liquid to flow radially outwardly in all directions, namely 360 degrees about the center axis.
  • first bellows 141 and a second bellows 142 which expand and contract with the up and down motion of the shaft member 120.
  • the first bellows 141 and the second bellows 142 are arranged one above the other along the vertical direction.
  • the upper end of the first bellows 141 is fixedly attached to the upper outward flange 122a of the cylindrical portion 122 of the shaft member 120, and the lower end of the first bellows 141 is fixedly attached to the first inward flange 130Xa of the container 130.
  • the upper end of the second bellows 142 is fixedly attached to the first inward flange 130Xa of the container 130, and the lower end of the second bellows 142 is fixedly attached to the lower outward flange 122b of the cylindrical portion 122 of the shaft member 120.
  • the space surrounding the outer circumference of the first bellows 141 forms a first pump chamber P1
  • the space surrounding the outer circumference of the second bellows 142 forms a second pump chamber P2.
  • a third bellows 151 and a fourth bellows 152 which expand and contract with the up and down motion of the shaft member 120.
  • the upper end of the third bellows 151 is fixedly attached to the ceiling portion of the container 130, and the lower end of the third bellows 151 is fixedly attached to the shaft member 120.
  • the opening 130a of the container 130 is closed.
  • the upper end of the fourth bellows 152 is fixedly attached to the second inward flange 130Xb provided on the container 130, and the lower end of the fourth bellows 152 is fixedly attached to the connecting portion 123 of the shaft member 120.
  • a first space K1 is formed by the cavity in the main shaft portion 121 of the shaft member 120.
  • a second space K2 is formed outside the third bellows 151 and inside the fourth bellows 152.
  • a third space K3 is formed inside the first bellows 141 and the second bellows 142.
  • the first space K1, the second space K2, and the third space K3 are in communication with each other.
  • the space constituted by the first to third spaces K1, K2, and K3 is hermetically sealed. This space constituted by the first to third spaces K1, K2, and K3 is kept in a vacuum condition to provide heat insulation.
  • check valves 160 including a first check valve 160A, a second check valve 160B, a third check valve 160C, and a fourth check valve 160D, which are provided at different locations inside the container 130.
  • Each of these check valves 160 is an annular component provided coaxially with the shaft member 120.
  • Each of the check valves 160 is configured to allow flow of liquid in radial directions from inside to outside and to block flow of liquid in radial directions from outside to inside.
  • the first check valve 160A and the third check valve 160C are provided in the fluid passage passing through the first pump chamber P1.
  • the first check valve 160A and the third check valve 160C function to block backflow of liquid pumped by the pumping effect of the first pump chamber P1.
  • the first check valve 160A is provided on the upstream side of the first pump chamber P1
  • the third check valve 160C is provided on the downstream side of the first pump chamber P1.
  • the first check valve 160A is provided in the fluid passage 130d provided in the bottom portion of the container 130.
  • the third check valve 160C is provided in the fluid passage formed in the vicinity of the second inward flange 130Xb provided on the container 130.
  • the third check valve 160C is provided in the upper portion of the first pump chamber P1.
  • the upper portion of the pump chamber refers to the portion of the region that functions as the pump chamber that is higher than its vertical center.
  • the third check valve 160C is provided at a position at which it allows gas in the first pump chamber P1 to be discharged from it and allows the first pump chamber P1 to be filled with liquid.
  • the second check valve 160B and the fourth check valve 160D are provided in the fluid passage passing through the second pump chamber P2.
  • the second check valve 160B and the fourth check valve 160D function to block backflow of liquid pumped by the pumping effect of the second pump chamber P2.
  • the second check valve 160B is provided on the upstream side of the second pump chamber P2
  • the fourth check valve 160D is provided on the downstream side of the second pump chamber P2.
  • the second check valve 160B is provided in the fluid passage 130e provided in the bottom plate 130Y of the container 130.
  • the fourth check valve 160D is provided in the fluid passage that extends from the vicinity of the first inward flange 130Xa to the second fluid passages 130Xd.
  • the fourth check valve 160D is provided in the upper portion of the second pump chamber P2.
  • the upper portion of the pump chamber refers to the portion of the region that functions as the pump chamber that is higher than its vertical center.
  • the fourth check valve 160D is provided at a position at which it allows gas in the second pump chamber P2 to be discharged from it and allows the second pump chamber P2 to be filled with liquid.
  • the exit from the second fluid passages 130Xd is provided at a location of the same height as the location at which liquid flows out of the third check valve 160C.
  • the fluid pressure in the second pump chamber P2 increases.
  • the second check valve 160B is closed, and the fourth check valve 160D is opened.
  • the liquid in the second pump chamber P2 passes through the fourth check valve 160D (indicated by arrow T12).
  • the liquid having passed through the fourth check valve 160D is pumped into the third fluid passage 130Xe through the second fluid passages 130Xd provided in the body portion 130X (indicated by arrow T13). Then, the liquid passes through the outlet 130c and is brought to the outside of the liquid supply system 10 through the outlet pipe 320.
  • the first bellows 141 expands, and the second bellows 142 contracts. Consequently, the fluid pressure in the first pump chamber P1 increases. Then, the first check valve 160A is closed, and the third check valve 160C is opened. In consequence, the liquid in the first pump chamber P1 is pumped into the third fluid passage 130Xe provided in the body portion 130X through the third check valve 160C (indicated by arrow T11). Then, the liquid passes through the outlet 130c and is brought to the outside of the liquid supply system 10 through the outlet pipe 320. On the other hand, the fluid pressure in the second pump chamber P2 decreases. Then, the second check valve 160B is opened, and the fourth check valve 160D is closed.
  • liquid supplied from outside the liquid supply system 10 through the inlet pipe 310 (indicated by arrow S10) is taken into the interior of the container 130 through the inlet 130b and passes through the second check valve 160B (indicated by arrow S12). Then, the liquid having passed through the second check valve 160B is pumped into the second pump chamber P2.
  • the liquid supply system 10 can cause liquid to flow from the inlet pipe 310 to the outlet pipe 320 both when the shaft member 120 moves downward and when the shaft member 120 moves upward. Hence, the phenomenon called pulsation can be reduced.
  • the fluid passage through which the cryogenic liquid flows from the inlet 130b to the outlet 130c via the first pump chamber P1 will be hereinafter referred to as a first fluid channel.
  • the fluid passage through which the cryogenic liquid flows from the inlet 130b to the outlet 130c via the second pump chamber P2 will be hereinafter referred to as a second fluid channel.
  • the first fluid channel is the passage of the cryogenic liquid that enters from the inlet 130b, then flows in the direction indicated by arrow S11, then flows in the direction indicated by arrow T11, and then flows to the outlet 130c.
  • the second fluid channel is the passage of the cryogenic liquid that enters from the inlet 130b, then flows in the direction indicated by arrow S12, then flows in the directions indicated by arrows T12 and T13, and then flows to the outlet 130c.
  • the height of the location at which the direction of the liquid flow in the first fluid channel changes from the vertically upward direction to the downward direction (see arrow T11) and the height of the location at which the direction of the liquid flow in the second fluid channel changes from the vertically upward direction to the downward direction (see arrow T13) are the same.
  • the flow of liquid in the liquid supply system 10 during its operation is summarized as below.
  • the shaft member 120 moves downward, the liquid flows in the first fluid channel upstream of the first pump chamber P1 but does not flow in the first fluid channel downstream of the first pump chamber P1.
  • the liquid flows in the second fluid channel downstream of the second pump chamber P2 but does not flow in the second fluid channel upstream of the second pump chamber P2.
  • the shaft member 120 moves upward, the liquid flows in the first fluid channel downstream of the first pump chamber P1 but does not flow in the first fluid channel upstream of the first pump chamber P1.
  • the liquid flows in the second fluid channel upstream of the second pump chamber P2 but does not flow in the second fluid channel downstream of the second pump chamber P2.
  • cryogenic liquid is caused to flow in the aforementioned first and second flow passages using an external drive source. Then, the first check valve 160A, the second check valve 160B, the third check valve 160C, and the fourth check valve 16D are all opened. In consequence, the cryogenic liquid flows in the entirety of the first and second fluid channels including their upstream and downstream portions at the same time.
  • the height of the location at which the direction of the liquid flow in the first fluid channel changes from the vertically upward direction to the downward direction (see arrow T11) and the height of the location at which the direction of the liquid flow in the second fluid channel changes from the vertically upward direction to the downward direction (see arrow T13) are the same.
  • the cryogenic liquid is caused to flow from the inlet 130b to the outlet 130c for the purpose of precooling
  • the level of the liquid flowing in the first fluid channel and the level of the liquid flowing in the second fluid channel can be kept equal. This prevents situations in which liquid tends to be discharged from one of the fluid passages and not to flow in the other fluid passage from occurring. Therefore, the time needed for precooling can be shortened.
  • first and second fluid channels are not limited to the above-described configuration.
  • the first and second fluid channels in the above-described system may be provided with a detour passage of liquid (i.e. cryogenic liquid) provided in the second inward flange 130Xb of the container 130 (indicated by broken arrows T14 in Fig. 1 ) so that the second inward flange 130Xb can also be precooled in the precooling process. This can expedite cooling of the interior of the system.
  • liquid i.e. cryogenic liquid
  • the flow of liquid i.e. cryogenic liquid
  • the outlet 130c may be used as an inlet
  • the outlet pipe 320 may be used as an inlet pipe
  • the inlet 130b may be used as an outlet
  • the inlet pipe 310 maybe used as an outlet pipe
  • the flow of liquid in the first fluid channel and the second fluid channel may be reversed.
  • all of the fourth check valves 160 are adapted to allow flow of liquid in radial directions from inside to outside and to block flow of liquid in radial directions from outside to inside.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
EP18748289.8A 2017-02-03 2018-02-02 Système d'alimentation en liquide Withdrawn EP3578814A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017019038 2017-02-03
PCT/JP2018/003635 WO2018143421A1 (fr) 2017-02-03 2018-02-02 Système d'alimentation en liquide

Publications (1)

Publication Number Publication Date
EP3578814A1 true EP3578814A1 (fr) 2019-12-11

Family

ID=63040169

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18748289.8A Withdrawn EP3578814A1 (fr) 2017-02-03 2018-02-02 Système d'alimentation en liquide

Country Status (7)

Country Link
US (1) US20200003195A1 (fr)
EP (1) EP3578814A1 (fr)
JP (1) JPWO2018143421A1 (fr)
KR (1) KR20190098220A (fr)
CN (1) CN110192031A (fr)
RU (1) RU2019123280A (fr)
WO (1) WO2018143421A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12438031B2 (en) 2021-04-22 2025-10-07 Taiwan Semiconductor Manufacturing Co., Ltd. Bonding system and method for using the same
US12237211B2 (en) 2021-05-12 2025-02-25 Taiwan Semiconductor Manufacturing Co., Ltd. Bonding system with sealing gasket and method for using the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH545916A (fr) * 1971-11-09 1974-02-15
JPS59119075A (ja) * 1982-12-23 1984-07-10 Toyo Sanso Kk 液体ヘリウム等低温流体ポンプ及びその作動方法
JP4982515B2 (ja) * 2009-02-24 2012-07-25 日本ピラー工業株式会社 ベローズポンプ
CN103388577A (zh) * 2012-05-09 2013-11-13 日本皮拉工业株式会社 液体用容积型泵
KR101885017B1 (ko) 2014-07-10 2018-08-02 이글 고오교 가부시키가이샤 액체 공급 시스템
CN106795876B (zh) * 2014-08-08 2019-06-11 日本皮拉工业株式会社 波纹管泵装置
EP3199812B1 (fr) * 2014-09-22 2019-06-19 Eagle Industry Co., Ltd. Système d'alimentation en liquide

Also Published As

Publication number Publication date
US20200003195A1 (en) 2020-01-02
KR20190098220A (ko) 2019-08-21
JPWO2018143421A1 (ja) 2019-11-21
RU2019123280A3 (fr) 2021-03-03
RU2019123280A (ru) 2021-03-03
CN110192031A (zh) 2019-08-30
WO2018143421A1 (fr) 2018-08-09

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