EP3605584A4 - Spectroscope de masse et spectrométrie de masse - Google Patents

Spectroscope de masse et spectrométrie de masse Download PDF

Info

Publication number
EP3605584A4
EP3605584A4 EP18772237.6A EP18772237A EP3605584A4 EP 3605584 A4 EP3605584 A4 EP 3605584A4 EP 18772237 A EP18772237 A EP 18772237A EP 3605584 A4 EP3605584 A4 EP 3605584A4
Authority
EP
European Patent Office
Prior art keywords
mass
spectroscope
spectrometry
mass spectrometry
mass spectroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18772237.6A
Other languages
German (de)
English (en)
Other versions
EP3605584A1 (fr
Inventor
Tetsuo Sakamoto
Masato Morita
Hideo Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kogakuin University
Original Assignee
Nagoya University NUC
Kogakuin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagoya University NUC, Kogakuin University filed Critical Nagoya University NUC
Publication of EP3605584A1 publication Critical patent/EP3605584A1/fr
Publication of EP3605584A4 publication Critical patent/EP3605584A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0459—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
    • H01J49/0463—Desorption by laser or particle beam, followed by ionisation as a separate step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP18772237.6A 2017-03-21 2018-03-15 Spectroscope de masse et spectrométrie de masse Withdrawn EP3605584A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017054691A JP6818322B2 (ja) 2017-03-21 2017-03-21 質量分析装置および質量分析方法
PCT/JP2018/010332 WO2018173935A1 (fr) 2017-03-21 2018-03-15 Spectroscope de masse et spectrométrie de masse

Publications (2)

Publication Number Publication Date
EP3605584A1 EP3605584A1 (fr) 2020-02-05
EP3605584A4 true EP3605584A4 (fr) 2020-12-16

Family

ID=63585457

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18772237.6A Withdrawn EP3605584A4 (fr) 2017-03-21 2018-03-15 Spectroscope de masse et spectrométrie de masse

Country Status (3)

Country Link
EP (1) EP3605584A4 (fr)
JP (1) JP6818322B2 (fr)
WO (1) WO2018173935A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020173192A (ja) 2019-04-11 2020-10-22 株式会社島津製作所 質量分析装置、サンプリングプローブおよび分析方法
JP2024134460A (ja) * 2023-03-20 2024-10-03 キオクシア株式会社 質量分析装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0229151U (fr) * 1988-08-12 1990-02-26
JPH10149795A (ja) * 1996-11-21 1998-06-02 Hitachi Ltd 質量分析装置
US20150270113A1 (en) * 2014-03-18 2015-09-24 Kabushiki Kaisha Toshiba Sputter neutral particle mass spectrometry apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10334847A (ja) * 1997-05-29 1998-12-18 Hitachi Ltd 光イオン化質量分析装置
JPH1114571A (ja) * 1997-06-24 1999-01-22 Hitachi Ltd 光イオン化質量分析装置
JP2000162164A (ja) * 1998-11-26 2000-06-16 Hitachi Ltd 共鳴レーザイオン化中性粒子質量分析装置および分析方法
JP2001108657A (ja) * 1999-10-05 2001-04-20 Tokyo Denshi Kk ガス中微量物の分析法及び分解法並びにこれらに使用する多面鏡装置
JP6309381B2 (ja) * 2014-07-22 2018-04-11 学校法人 工学院大学 質量分析装置および質量分析方法
JP6601075B2 (ja) 2015-09-09 2019-11-06 ミツミ電機株式会社 プッシュスイッチ、およびプッシュスイッチの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0229151U (fr) * 1988-08-12 1990-02-26
JPH10149795A (ja) * 1996-11-21 1998-06-02 Hitachi Ltd 質量分析装置
US20150270113A1 (en) * 2014-03-18 2015-09-24 Kabushiki Kaisha Toshiba Sputter neutral particle mass spectrometry apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2018173935A1 *

Also Published As

Publication number Publication date
WO2018173935A1 (fr) 2018-09-27
JP6818322B2 (ja) 2021-01-20
JP2018156904A (ja) 2018-10-04
EP3605584A1 (fr) 2020-02-05

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