EP3620662C0 - Appareil utilisateur pour un dispositif à vide - Google Patents

Appareil utilisateur pour un dispositif à vide

Info

Publication number
EP3620662C0
EP3620662C0 EP18192923.3A EP18192923A EP3620662C0 EP 3620662 C0 EP3620662 C0 EP 3620662C0 EP 18192923 A EP18192923 A EP 18192923A EP 3620662 C0 EP3620662 C0 EP 3620662C0
Authority
EP
European Patent Office
Prior art keywords
vacuum
user
user device
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18192923.3A
Other languages
German (de)
English (en)
Other versions
EP3620662A1 (fr
EP3620662B1 (fr
Inventor
Jochen Böttcher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18192923.3A priority Critical patent/EP3620662B1/fr
Publication of EP3620662A1 publication Critical patent/EP3620662A1/fr
Application granted granted Critical
Publication of EP3620662B1 publication Critical patent/EP3620662B1/fr
Publication of EP3620662C0 publication Critical patent/EP3620662C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Stored Programmes (AREA)
EP18192923.3A 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide Active EP3620662B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP18192923.3A EP3620662B1 (fr) 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18192923.3A EP3620662B1 (fr) 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide

Publications (3)

Publication Number Publication Date
EP3620662A1 EP3620662A1 (fr) 2020-03-11
EP3620662B1 EP3620662B1 (fr) 2025-08-13
EP3620662C0 true EP3620662C0 (fr) 2025-08-13

Family

ID=63524135

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18192923.3A Active EP3620662B1 (fr) 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide

Country Status (1)

Country Link
EP (1) EP3620662B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4174321B1 (fr) * 2021-10-29 2024-01-17 Pfeiffer Vacuum Technology AG Pompe à vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7016751B2 (en) * 2001-07-13 2006-03-21 Helix Technology Corporation Vacuum system central control information server
EP2573403B1 (fr) * 2011-09-20 2017-12-06 Grundfos Holding A/S Pompe
WO2019192739A1 (fr) * 2018-04-04 2019-10-10 Vacuubrand Gmbh + Co Kg Dispositif et procédé de commande et / ou de régulation d'une pression de gaz

Also Published As

Publication number Publication date
EP3620662A1 (fr) 2020-03-11
EP3620662B1 (fr) 2025-08-13

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