EP3623632A3 - Modulares rahmensystem für vakuumpumpen - Google Patents

Modulares rahmensystem für vakuumpumpen Download PDF

Info

Publication number
EP3623632A3
EP3623632A3 EP19199579.4A EP19199579A EP3623632A3 EP 3623632 A3 EP3623632 A3 EP 3623632A3 EP 19199579 A EP19199579 A EP 19199579A EP 3623632 A3 EP3623632 A3 EP 3623632A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
frame
vacuum pumps
frame system
modular frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19199579.4A
Other languages
English (en)
French (fr)
Other versions
EP3623632A2 (de
EP3623632B1 (de
Inventor
Christian Ehresmann
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19199579.4A priority Critical patent/EP3623632B1/de
Publication of EP3623632A2 publication Critical patent/EP3623632A2/de
Publication of EP3623632A3 publication Critical patent/EP3623632A3/de
Application granted granted Critical
Publication of EP3623632B1 publication Critical patent/EP3623632B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M1/00—Frames or casings of engines, machines or apparatus; Frames serving as machinery beds
    • F16M1/04—Frames or casings of engines, machines or apparatus; Frames serving as machinery beds for rotary engines or similar machines

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft ein modulares Rahmensystem für Vakuumpumpen, mit einem Basisrahmen für eine erste Vakuumpumpe, und mit einem separaten, zusätzlich zu dem Basisrahmen vorgesehenen Zusatzrahmen für eine zweite Vakuumpumpe, wobei der Basisrahmen sowohl für einen Pumpbetrieb der ersten Vakuumpumpe ohne den Zusatzrahmen und ohne die zweite Vakuumpumpe als auch für einen gemeinsamen Pumpbetrieb beider Vakuumpumpen ausgebildet ist, bei dem die beiden Vakuumpumpen einen Pumpstand bilden und vakuumtechnisch miteinander verbunden sind, und wobei der Basisrahmen und der Zusatzrahmen derart ausgebildet sind, dass zur Bildung des Pumpstands der Zusatzrahmen am Basisrahmen und die zweite Vakuumpumpe am Zusatzrahmen abstützbar ist. Die Erfindung betrifft außerdem ein Vakuumsystem mit wenigstens zwei Vakuumpumpen und einem erfindungsgemäßen modularen Rahmensystem.
EP19199579.4A 2019-09-25 2019-09-25 Modulares rahmensystem für vakuumpumpen Active EP3623632B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19199579.4A EP3623632B1 (de) 2019-09-25 2019-09-25 Modulares rahmensystem für vakuumpumpen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19199579.4A EP3623632B1 (de) 2019-09-25 2019-09-25 Modulares rahmensystem für vakuumpumpen

Publications (3)

Publication Number Publication Date
EP3623632A2 EP3623632A2 (de) 2020-03-18
EP3623632A3 true EP3623632A3 (de) 2020-04-08
EP3623632B1 EP3623632B1 (de) 2021-09-15

Family

ID=68069557

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19199579.4A Active EP3623632B1 (de) 2019-09-25 2019-09-25 Modulares rahmensystem für vakuumpumpen

Country Status (1)

Country Link
EP (1) EP3623632B1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
US20100326599A1 (en) * 2007-05-17 2010-12-30 Tae-Kyong Hwang Integrated apparatus for vacuum producing
DE202015005199U1 (de) * 2015-07-18 2015-08-18 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit mindestens zwei Membranpumpen
DE102017120655A1 (de) * 2017-09-07 2019-03-07 Khs Corpoplast Gmbh Tragrahmen für einen Pumpenstand zur Aufnahme von Vakuumpumpen und Haupttragrahmen für eine Beschichtungsvorrichtung von Behältern und Beschichtungsvorrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
US20100326599A1 (en) * 2007-05-17 2010-12-30 Tae-Kyong Hwang Integrated apparatus for vacuum producing
DE202015005199U1 (de) * 2015-07-18 2015-08-18 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit mindestens zwei Membranpumpen
DE102017120655A1 (de) * 2017-09-07 2019-03-07 Khs Corpoplast Gmbh Tragrahmen für einen Pumpenstand zur Aufnahme von Vakuumpumpen und Haupttragrahmen für eine Beschichtungsvorrichtung von Behältern und Beschichtungsvorrichtung

Also Published As

Publication number Publication date
EP3623632A2 (de) 2020-03-18
EP3623632B1 (de) 2021-09-15

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