EP3739904A1 - Système de transducteur acoustique et dispositif acoustique - Google Patents

Système de transducteur acoustique et dispositif acoustique Download PDF

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Publication number
EP3739904A1
EP3739904A1 EP19174497.8A EP19174497A EP3739904A1 EP 3739904 A1 EP3739904 A1 EP 3739904A1 EP 19174497 A EP19174497 A EP 19174497A EP 3739904 A1 EP3739904 A1 EP 3739904A1
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EP
European Patent Office
Prior art keywords
bending
bending transducer
sub
acoustic
transducer system
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19174497.8A
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German (de)
English (en)
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EP3739904B1 (fr
Inventor
Bert Kaiser
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to EP19174497.8A priority Critical patent/EP3739904B1/fr
Priority to CN202080036103.7A priority patent/CN114073103B/zh
Priority to PCT/EP2020/063187 priority patent/WO2020229466A1/fr
Priority to TW109115901A priority patent/TW202102008A/zh
Publication of EP3739904A1 publication Critical patent/EP3739904A1/fr
Priority to US17/524,577 priority patent/US12108212B2/en
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Publication of EP3739904B1 publication Critical patent/EP3739904B1/fr
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • H04R17/025—Microphones using a piezoelectric polymer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Definitions

  • Embodiments according to the invention relate to a micromechanical sound transducer.
  • these documents reveal the construction of bending transducers and their specific possibilities and mechanisms to interact with the environment.
  • the aforementioned documents relate to a novel MEMS (micro-electromechanical system) actuator principle based on the fact that a silicon beam moves laterally in a plane, for example a substrate plane, which is defined by a silicon wafer or a wafer.
  • the silicon bar which is connected to the substrate in a cavity, interacts with a volume flow.
  • the novel MEMS described therein are defined as NED (Nanoscopic Electrostatic Drive), a nanoscopic electrostatic drive.
  • these NEDs are particularly suitable for the miniaturization - downsizing of components while retaining the full range of functions - of everyday objects that are subject to increased integration requirements.
  • ultra-mobile end devices such as smartwatches or hearables are subject to very narrow limits in terms of installation space.
  • sound transducers can be implemented that can meet these increased demands, with both sound quantity and Sound quality can be significantly improved compared to conventional sound transducers.
  • the integration requirements relate both to the adaptation to the existing installation space in general and to the system design together with several components.
  • a hearing aid or headphones which is designed such that its external dimensions of the housing correspond to the internal dimensions of the auditory canal.
  • a MEMS-based sound transducer is arranged in the housing so that a front volume is formed in the direction of the eardrum and a back volume in the direction of the earpiece, which are separated from one another by the MEMS-based sound transducer.
  • the geometric dimensions of this sound transducer are designed in such a way that it does not restrict the geometric dimensions of the resonance volume, but it is difficult to keep a frequency profile constant over a large frequency range.
  • the sound transducer consists of flexural transducers that are elastically suspended on one side and that extend over a cavity and the edge area of which is spaced apart on a front side by a gap.
  • the gap increases due to the curvature of the transducers.
  • a sound shielding device is disclosed which is formed by the side walls, the so-called sound blocking walls of the cavity. These walls are arranged in such a way that they at least partially prevent the lateral passage of sound along the gap.
  • the sound transducers are piezoelectric and are therefore subject to a pre-curvature, so that the measures disclosed serve to minimize the inaccuracies that result from this pre-curvature.
  • the loudspeaker unit for a portable device for generating sound waves in the audible range, which is characterized by a small size and high performance.
  • the loudspeaker unit also includes a MEMS-based tweeter, with the frequency ranges of both loudspeakers overlapping.
  • the electrodynamic loudspeaker is compact and optimized for low frequencies.
  • the high space requirement and the high power consumption continue to be disadvantageous, since two different system technologies have to be operated.
  • the sound-generating membrane is a conductive film that is arranged between two flat electrodes and whose vibrations generate sound in the audible wavelength spectrum. This film is not arranged parallel to the eardrum, which minimizes unwanted resonances in the ear canal.
  • no further functional elements can be monolithically integrated, which means that additional space is required outside the auditory canal.
  • a compact arrangement of a large number of bending transducers of a bending transducer system which is designed as a sound transducer and which enables the integration of further system components in limited space, ensures a high reproduction quality in an environment around the bending transducer system.
  • the frequency curve reproduced with the sound transducer can be kept constant over a large frequency range, for example via the inclined alignment of the volume flow in a corridor, such as an ear canal.
  • a variation can be less than 6 dB, for example.
  • the application describes a further development with regard to an optimization of the arrangement of bending transducers with regard to space requirements, sound pressure level and Sound quality. That can be produced by the NED in a specific environment - for example in the auditory canal of a human ear.
  • An acoustic bending transducer system with a large number of bending transducers is proposed, which are designed in such a way that deformable elements of the bending transducers oscillate in a coplanar manner in a common flat layer, the bending transducers having different resonance frequencies and different dimensions of the deformable elements along a common longitudinal axis that is transverse to a direction of vibration of the deformable elements.
  • the bending transducers can be, for. B. electrostatic bending actuators (NED actuators), piezoelectric actuators or thermomechanical actuators act.
  • the plurality of bending transducers are designed to be deflected in an oscillation plane.
  • the bending transducers are arranged next to one another along a first axis in the common flat layer or plane of vibration and extend along a second axis that is transverse to the first axis.
  • individual or multiple bending transducers can also be arranged at an angle to the majority of the bending transducers aligned parallel to one another.
  • an acoustic device e.g. a hearing aid with: an acoustic bending transducer system with at least one bending transducer which has at least one deformable element that is arranged in a cavity and an opening through which a fluidic volume flow interacting with a movement of the bending transducer in the cavity passes, and a housing, which is adapted to be inserted in a passage, the bending transducer system being held in the housing such that the fluidic volume flow can be directed obliquely to a longitudinal axis of the passage in a state in which the housing is inserted into the passage.
  • the acoustic device can be miniaturized and is therefore particularly suitable for installation in in-the-ear hearing aids (ITE) and hearables, as well as smartwatches and other ultra-mobile devices.
  • the bending transducer system has one or more cavities in which the bending transducers are arranged and one or more openings in the cavities through which a fluidic volume flow that interacts with a plurality of bending transducers can pass.
  • the openings in the cavities can be common openings of two or more cavities, which communicate with one another via the fluidic volume flow.
  • openings in the cavities of the bending transducer system allow communication between individual bending transducers or the bending transducer system with an enveloping environment.
  • the bending transducers are arranged in a space that is delimited by a first and a second substrate parallel to the common plane of vibration, and walls between the substrates that define the space along a longitudinal direction or in a direction transverse to the longitudinal direction in the common plane of vibration Subdivide cavities that are arranged between adjacent bending transducers. A cavity is thus delimited, for example, by the first substrate, the second substrate and two opposing walls of adjacent bending transducers. Since the plurality of bending transducers is designed to be deflected via their deformable elements in the common plane of oscillation of a layer, the bending transducers can each be at a distance from the first substrate and the second substrate, through which adjacent cavities can be fluidically coupled to one another. Due to the fluidic coupling of adjacent cavities, a common force can be exerted by the plurality of bending transducers on a fluid located in the cavities, as a result of which a high sound level can be achieved with the micromechanical sound transducer.
  • each bending transducer of the acoustic bending transducer system can comprise a deformable element that is electrostatically, piezoelectrically or thermomechanically deformable. This provides a multitude of options for flexibly adapting the bending transducer system to desired requirements.
  • At least a first subset of at least one first bending transducer each has a deformable element clamped on one side
  • at least a second subset of at least one second bending transducer each has a deformable element clamped on both sides.
  • each bending transducer can be clamped on one or both sides, bending transducers with deformable elements of different mechanical properties and dimensions can be implemented, which in turn are responsible for generating different frequencies and sound pressures. Furthermore, an installation space that is present in the same layer of the bending transducer system can be used particularly advantageously.
  • the at least first subset of at least one first bending transducer has on average a higher resonance frequency than the at least second subset of at least one second bending transducer, or vice versa. Due to certain requirements on the installation space and with regard to the various frequencies and their sound pressures, the rigidity, mass, length and cross-sectional geometry of the deformable elements of the respective bending transducers can be adapted.
  • the first subset of at least one first bending transducer has a shorter length on average than the second subset of at least one second bending transducer.
  • each bending transducer delimits two opposing cavities, each cavity being accessible via at least one opening for the fluidic volume flow to pass through. It is thus possible to fluidically couple the individual cavities and thus to control the properties of the volume flow conveyed by the individual bending transducers in a targeted manner in particular with regard to a buildable pressure or sound pressure of the volume flow can be desired.
  • the deformable element of each bending transducer should have a length that is less than 4000 ⁇ m.
  • an outer dimension of the bending transducer system along the common longitudinal axis is a maximum lateral to the common flat layer and greater than an outer dimension of the bending transducer system transversely thereto.
  • the outer dimension of the bending transducer system along the common longitudinal axis is between 750 ⁇ m and 2000 ⁇ m. In a still preferred exemplary embodiment, the outer dimension of the bending transducer system along the common longitudinal axis is between 800 ⁇ m and 1200 ⁇ m. Bending transducer systems with the dimensions mentioned above can be built into in-the-ear hearing aids in a space-saving manner, whereby sufficient hearing quality can be guaranteed for the user.
  • a describes.
  • the outer surface of the bending transducer system is coplanar to the common flat layer, an oval elongated along the common longitudinal axis, a rectangle elongated along the common longitudinal axis, or a polygon elongated along the common longitudinal axis.
  • Such elongated shapes allow the installation space in an elongated envelope with a cylindrical or rectangular cross-section to be used particularly well.
  • an inner cross section of an elongated sleeve can be essentially completely taken up, for example an auditory canal can be sealed.
  • the bending transducers are subdivided into groups of one or more bending transducers, the several bending transducers along the common longitudinal axis in groups with several bending transducers are arranged one behind the other.
  • the individual pressures of the volume flow caused by the respective deformable elements of the bending transducers would add up. Consequently, by staggering or grouping the bending transducers and their selective activation, not only a desired pressure or sound pressure of the volume flow emitted into the environment could be controlled in a targeted manner, but different sound frequencies could also be generated.
  • short bending transducers can be arranged in the area of the openings, since they are characterized by a comparatively high rigidity - relative to long bending transducers - which enables high resonance frequencies. If such bending transducers are arranged in the area of the openings, which connect the cavities with the environment, resonances can be avoided and thus a sound quality or a hearing quality can be improved.
  • the bending transducers are divided into groups of one or more bending transducers, the several bending transducers being arranged next to one another in the common plane transversely to the common longitudinal axis in groups with several bending transducers. Analogous to the arrangement of several bending transducers one behind the other along the common longitudinal axis, a desired sound pressure and a location of the sound can also be controlled with an arrangement transverse to the common longitudinal axis next to one another.
  • the fluidic volume flow advantageously runs - in the bending transducer system - of the acoustic device in the plane of the common flat layer of the bending transducer system. Due to the arbitrary design and orientation of the cavities and deformable elements of the individual bending transducers of the bending transducer system, a targeted course of the fluidic volume flow in the bending transducer system can be provided and thus controlled. In this way, the volume flow can be directed specifically to the point where its effect on its environment is optimal.
  • the bending transducer system is held in the housing in such a way that the fluidic volume flow of the acoustic device is at an angle between 5 ° and 80 °, between 10 ° and 40 °, or between 15 ° and 30 ° inclined to the longitudinal axis of the passage through the openings of the bending transducer system.
  • the deformable elements are related to their orientation, for example in the direction of the The eardrum of a human ear is positioned in an anti-parallel manner so that resonances in the ear canal are minimized.
  • a higher packing density of the bending transducers can be achieved and higher sound pressures - based on a cross-sectional area of the corridor - can be achieved, a larger acoustically active surface of the acoustic device being generated.
  • the acoustic bending transducer system can record and / or emit an acoustic signal via the fluidic volume flow passing through the openings.
  • the acoustic bending transducer system is able to work simultaneously as a receiver and / or transmitter of acoustic signals, which in turn increases the flexibility when using the acoustic device considerably.
  • the transmission or reception of acoustic signals can take place alternately or continuously.
  • the acoustic device further comprises: a control unit for controlling the individual bending transducers of the bending transducer system and an energy supply source for operating the acoustic device. Due to the diverse possibilities of miniaturizing the acoustic bending transducer system, additional components can be accommodated in it in a space-saving manner despite the small dimensions of the acoustic device. This contributes significantly to increasing the wearing comfort and user-friendliness of the acoustic device.
  • two or more acoustic bending transducer systems can be held in the housing, the common flat layer of the same being aligned parallel to one another.
  • acoustic devices can be arranged or manufactured in the form of a substrate stack, as a result of which highly complex structures can be implemented with relatively low manufacturing costs.
  • acoustic devices can easily be individually adapted in this way.
  • the acoustic device can advantageously be built up monolithically consisting of several layers, or from substrates of different materials, which over a common layer are connected to one another or bonded. This can take place, for example, in the form of an arrangement of a cover wafer above or a handling wafer below a common device wafer.
  • control unit and / or the energy supply source are arranged in the common flat layer of a bending transducer system.
  • the control unit is of course set up: for fluid dynamic damping, for signal processing, for wireless communication, for voltage transformation. It can contain sensors, software, for storing data, etc., which are arranged individually or jointly in the same acoustic device, or alternatively are provided separately from the acoustic device.
  • Fig. 1 shows a perspective illustration of a bending transducer system according to an exemplary embodiment of the present invention in the form of a layered component 100 comprising a first bending transducer system 1 and a second bending transducer system 2, which are stacked on top of one another.
  • the component 100 may comprise further bending transducer systems which are arranged in layers, for example, on the bending transducer system 1 and / or on the bending transducer system 2.
  • a bending transducer system 1 or a bending transducer system 2 comprises several bending transducers 3, 4 which have the same or different predefined lengths. On the surface of the bending transducer system 1, an arrangement of the bending transducers 3, 4 of different lengths is shown as an example.
  • both the bending transducer system 1 and the bending transducer system 2 are L-shaped, so that the two bending transducer systems 1 and / or 2 stacked on top of one another to form an L-shaped component 100.
  • the individual legs of the L-shaped component 100 have different lengths.
  • further bending transducers 4 and bending transducers 5 - indicated by means of a dot-dash line - are arranged, which have a third length.
  • the lengths of the individual bending transducers 3, 4 and 5 are, for example: bending transducers 3 from 1000 ⁇ m to 4000 ⁇ m; Bending transducer 4 from 500 ⁇ m to 2000 ⁇ m; Bending transducer 5 from 100 ⁇ m to 1000 ⁇ m.
  • the individual length ratios can be selected, for example: bending transducer 3 to bending transducer 4 between 1: 1.5 to 1: 3; Bending transducer 3 to bending transducer 5 between 1: 1.5 to 1: 3; or the length ratio of the bending transducer 4 to the bending transducer 5 between 1: 1.5 to 1: 3.
  • the individual bending transducers 1 or 2 are composed of bending transducers 3, 4 and 5, which are arranged parallel to one another in a plane of the bending transducer system 1 or the bending transducer system 2, the individual bending transducers 3, 4 and 5 along the longer leg of the L-shaped component 100 are aligned.
  • openings 13 are provided which enable the cavities contained in the bending transducer system 1 or bending transducer system 2 - not shown here - to be connected to the surroundings.
  • the individual bending transducers 3, 4 and 5 are arranged such that short bending transducers 4, 5 are arranged in the shorter leg of the L-shaped component 100, the longer bending transducers 3 in the longer leg of the L-shaped Component are arranged
  • the bending transducers 3, 4 and 5 are aligned along the longest side of the component.
  • exemplary embodiments can also contain a bending transducer alignment along the shortest side of the bending transducer system 1 and / or 2 or component 100.
  • the openings 13 are then accordingly not arranged in the area 13, but always in the area of the clamps of the bending transducers 3, 4 clamped on both sides or in the area of the clamp 14 and the freely movable end of a bending transducer 5 clamped on one side.
  • the bending transducers 3, 4 and 5 are arranged in such a way that short bending transducers 5 are arranged in the vicinity of the openings 13.
  • resonances can be avoided, which has a positive effect on the sound quality.
  • a control unit 21 is arranged adjacent to the layered component 100 in such a way that it complements the component 100 to form a rectangular structure, complementary to the L-shape of the component 100.
  • Exemplary embodiments are not limited to the L-shaped configuration of the external dimensions of the component. Further exemplary embodiments are not limited to the illustrated arrangement of the bending transducers 3, 4 and 5; rather, the arrangement can differ for each bending transducer system 1 or 2 (cf. Fig. 9 ).
  • Fig. 2 shows the exemplary embodiment from FIG Fig. 1 .
  • a substrate plane 9 of a substrate layer is shown, which runs parallel to the substrate layer.
  • a common plane of movement 10 is formed from the directions of movement 6, 7 and 8 of the respective bending transducers, the deformable elements of the bending transducers 3, 4 and 5 oscillating in a coplanar manner in a common flat substrate layer or plane of movement 10.
  • the movement plane 10 and the substrate plane 9 are arranged parallel to one another.
  • Fig. 3 shows in a perspective illustration an embodiment of a component 100 with two stacked bending transducer systems 1 and 2, which have an oval outer shape.
  • the openings 13 are preferably arranged in the area of the clamps 14 of the bending transducers 3, 4 clamped on both sides or in the area of the clamp 14 and the freely movable end of a bending transducer 5 clamped on one side.
  • An oval outer geometry or shape of the component 100 has the advantage that it can be arranged tilted in a cylindrical or approximately cylindrical housing of an ultramobile terminal.
  • This exemplary embodiment shows an arrangement of the bending transducers 3, 4 and 5 along the longest alignment of the oval component geometry.
  • embodiments of the bending transducers 3, 4 and 5 may equally contain different orientations.
  • exemplary embodiments can contain different orientations of the bending transducers 3, 4 and 5 for each layer-like bending transducer system 1 or 2, 2 + n.
  • Fig. 4 shows the exemplary embodiment from FIG Figure 3 .
  • a substrate plane 9 is shown, which runs parallel to the substrate layer, the deformable elements of the bending transducers 3, 4 and 5 oscillating in a coplanar manner in a common flat substrate layer or movement plane 10.
  • a movement plane 10 is formed from the movement directions 6, 7 and 8 of the respective bending transducers.
  • the movement plane 10 and the common planar substrate layer or substrate plane 9 are arranged parallel to one another.
  • the Fig. 5 shows in a sectional illustration the auditory canal 31, the eardrum 32 and the auricle 30. It can be seen that the auditory canal has a cylindrical geometry or shape. With 101 the outer dimensions of an ultra-mobile terminal device, for example the outer shell of its housing, are shown, which are adapted to the auditory canal 31 and essentially seal it off from the environment. Such housings 101 can be adapted to the respective user, but must be manufactured individually in complex, mostly additive and slow processes. However, they enable an ultra-mobile terminal to be optimally seated in the auditory canal 31. Embodiments can also have an individually adapted geometry differing, simplified geometry, which are produced in cost-effective processes, for example injection molding processes.
  • the tilted arrangement of the component 100 or the bending transducer system 1 or 2 with respect to the longitudinal axis 11 of the housing 101 makes it possible to enlarge the acoustically active surface of the component 100 or the bending transducer system 1 or 2 by, on the one hand, a higher number of bending transducers 3, 4 and 5 to be arranged in the bending transducer system 1 or 2 and / or, on the other hand, to integrate longer bending transducers 3, 4 and 5 in the bending transducer system 1 or 2.
  • the component 100 or the bending transducer system 1 or 2 is tilted about a transverse axis 105 of the ultramobile terminal in relation to the longitudinal axis 106, the angle of inclination ⁇ between the plane of movement 10 and the longitudinal axis 106 in a range between 90 ° and 180 °, preferably 150 ° and 170 °, particularly preferably 160 °.
  • the deformable elements are positioned in an anti-parallel manner in relation to the orientation of the eardrum. This minimizes the resonances in the ear canal.
  • Embodiments are not limited to the illustrated tilting about the transverse axis of the housing 101. It is of course also possible to tilt the component 100 about the longitudinal and vertical axes 106 and 107 of the housing 101.
  • Figure 6a shows, in a perspective illustration, elements of a component 100 ′ according to an exemplary embodiment of the present invention in an excited state.
  • FIG. 6a in a perspective and greatly simplified illustration, a section of a component 100 ′ from a substrate, without showing a cover wafer 18 and handling wafer 19.
  • the acoustic device can advantageously be built up monolithically consisting of a plurality of layers, or from substrates of different materials which are connected or bonded to one another via a common layer. This can take place, for example, in the form of an arrangement of a cover wafer 18 above or a handling wafer 19 below a common device wafer 20.
  • a cavity 11 is formed from a device wafer 20 by partially removing the material, which is formed by an edge 17 and the respective movable elements or electrodes of the bending transducers 3 2 , 3 4 and 4 2 , as well as by the substrate in the area of the clamping 14 is defined.
  • Embodiments include alternative borders 17 of the cavity 11.
  • the border 17 can be firmly connected to the substrate; on the other hand, the border 17 can consist of adjacent electrodes of a further bending transducer system 100 ′, formed from further bending transducers 3, 4 and 5.
  • the illustrated bending transducers 3 2 , 3 4 , 4 2 and 3 1 , 3 2 , 4 1 are clamped on both sides in this exemplary embodiment and connected to the substrate via the respective clamp 14.
  • Embodiments also include a one-sided clamping, which has the advantage of a large deflection of the freely movable end compared to a bilateral clamping.
  • the bending transducers 3, 4 and 5 can be clamped in a bending transducer system 1 and / or 2 both on one side and on both sides. It makes sense to clamp the shorter bending transducers 4, 5, which are arranged in the region of the openings 13, on one side and to clamp longer bending transducers 3, which are arranged towards the middle of the component, on both sides. This advantageously results in a greater oscillation amplitude at higher frequencies of the shorter, cantilevered bending transducers 5, since these are characterized by an advantageous ratio of mass to bending transducer length.
  • the basic functional principle for interaction with a volume flow for example for generating sound or for pumping a fluid, is shown in such a bending transducer system 1 and / or 2.
  • the bending transducers 3 1 , 3 2 , 4 1 and 3 2 , 3 4 and 4 2 move in the direction of the opposite edge 17 of the cavity 11 and thus reduce the volume within this cavity 11.
  • a volume flow resulting from this volume reduction 16 conveys the fluid contained in the cavity 11 out of the cavity 11 through the openings 13.
  • the Figure 6b also shows the basic functional principle for interacting with a volume flow, for example to generate sound or to pump a fluid in such a bending transducer system 1 and / or 2.
  • the bending transducers 3 1 , 3 2 , 4 1 and 3 2 , 3 move 4 and 4 2 away from the opposite edge 17 of the cavity 11 and thus increase the volume of the cavity 11.
  • the volume flow 16 resulting from this increase in volume conveys the fluid through the openings 13 into the cavity 11.
  • Alternative exemplary embodiments do not contain an edge 17 firmly connected to the substrate, but rather further bending transducers, not shown here, which can be clamped in on one and / or both sides. In this case, in the first time interval, the adjacent bending transducer systems 1 and 2 would move away from one another in order to increase the volume of the cavity 11 and move towards one another in order to reduce the volume of the cavity. Further developing exemplary embodiments can include a combination of edges 17 that are firmly connected to the substrate and / or no edges 17 that are firmly connected to the substrate.
  • FIG. 11 shows a cross-sectional view of a detail from a component 100 ′ along the cutting plane A of FIG Figure 6a .
  • the illustration shows the handling wafer 19 and cover wafer 18, which form the vertical delimitation of the cavity 11, which is delimited by the bending transducers 3 1 and 3 2 and the border 17 in the area of the device wafer 20.
  • the structure is a stack of layers, the individual layers being mechanically firmly connected to one another, in particular in a materially bonded manner. These layers are not shown in the figure.
  • the layer-by-layer arrangement of electrically conductive layers enables a simple configuration, since the cavity 11 can be obtained by selective extraction from the layer 20 and bending transducer structures can remain through suitable adjustment of the manufacturing processes.
  • the bending transducer structures in whole or in part by other measures or processes in the cavity 11, for example by creating and / or positioning them in the cavity 11.
  • the bending transducer structures can be compared to the parts of the layer remaining in the substrate 20 be formed differently, ie have different materials.
  • the Figure 8 shows in a perspective illustration an alternative embodiment of a layered component 100 with an upper bending transducer system 1 that has vertically arranged openings 13 1 in a cover wafer 18 1 for connecting the cavities 11 to the environment.
  • a second bending transducer system 2 is arranged below the upper, first bending transducer system 1 and has laterally arranged openings 13 in a device wafer 20.
  • Embodiments are not limited to the illustrated system of two bending transducer systems 1 and 2, rather only one bending transducer system 1 or 2 or a plurality of bending transducer systems 1, 2,..., N can be arranged.
  • a control unit 21 is arranged that a Is part of the component 100 and which leads to the restriction of the available installation space of the bending transducer system 1 and which is connected to the bending transducer systems (not shown). Further openings in the handling wafer 19 of the upper bending transducer system 1 can be arranged in such a way that they are connected to openings in the cover wafer 18 of the second bending transducer system 2. Embodiments include that a handling wafer 19 of the first bending transducer system 1 can be dispensed with if - with anticipation of Fig. 9 - The device wafer 20 'of the second bending transducer system 2 can take over this function.
  • the Figure 9 shows in a cross-sectional representation an embodiment of an alternative component 100 ′′ with an upper bending transducer system 1 that has vertically arranged openings 131 in the cover wafer 18.
  • the device wafers 20 and 20 ' are on a common substrate layer 22, which also have a Lid wafers as well as handling wafers represent mechanically connected to one another, in particular materially connected.
  • This exemplary embodiment shows by way of example how openings 13 1 , 13 ′ 1 , 13 ′′ 1 can be arranged in the cover, handling or device wafer in order to be opposite to the Sound direction to be optimally arranged.
  • the direction of sound can accordingly be determined by the volume flow interacting with the environment, which is determined by the movement of the deformable elements or the bending transducer 3 1 , 3 2 , 3 ' 1 and 3' 2 of the component 100 ′′.
  • Short bending transducers of a bending transducer system should advantageously be arranged where there is little space available and / or in the area of the openings that connect the cavities with the environment. These openings are located in the area of the outer limits of the bending transducer system.
  • long bending transducers are mainly arranged centrally in the bending transducer system. This has the advantage of making optimal use of the available space in order to achieve a high packing density of the individual bending transducers in order to increase the sound pressure level.
  • longer bending transducers allow lower resonance frequencies due to their lower rigidity.
  • Short bending transducers are characterized by a comparatively high degree of rigidity, which enables high resonance frequencies. If these bending transducers are arranged in the area of the openings that connect the cavities to the environment, resonances can be avoided and the sound quality can thus be improved.
  • the transversal acoustic resonance of the closed auditory canal ( ⁇ / 2) is accordingly at U T ⁇ 235 kHz, the corresponding longitudinal resonance at U L ⁇ 6.6 kHz.
  • a headphone membrane in "normal, ie radial" orientation is provided by the longitudinal mode U L ⁇ 6.6 kHz is excited and thus generates an undesirable, audible additional resonance.
  • the size of the bending transducer system (analogous to the membrane) should be chosen so that the low natural frequencies of the membrane do not interfere. So it shouldn't be too big.
  • a larger base area of the bending transducer system can be arranged in the available space, on which in turn longer or more bending transducers can be arranged.
  • longer or more bending transducers can be arranged.
  • openings can be optimally arranged in the direction of the sound direction given by the external dimensions.
  • Figure 8 vertically arranged openings which are then arranged almost in the direction of sound when the component is tilted in the ear canal.
  • the application thus describes a further development with regard to the optimization of the sound quantity (sound pressure level) and sound quality that can be produced by the component in a specific environment.
  • High integration requirements relate to the adaptation to the existing installation space in general as well as to the system design from several components.
  • ultra-mobile end devices e.g. hearables smartwatches
  • the energy storage device and any other HMI components titanium surfaces, displays
  • narrow limits in terms of the installation space design cylindrical / cuboid or flat / plate-shaped.
  • aspects of sound quality should not be neglected when designing the systems (ultra-mobile, such as hearables or wearables in general).
  • a specific design of the sound transducer groups can be used to generate sound that is adapted to the geometric conditions in terms of sound radiation.
  • the main drivers are frequency-dependent effects, and disturbing resonances can occur particularly at high frequencies.
  • both the sound quality and the sound quality can be improved significantly.
  • the principle of the bending transducer according to the invention is based on the NED (nanoscopic electrostatic drive) and is in WO 2012/095185 A1 described.
  • NED is a new kind of MEMS (micro electromechanical system) actuator principle.
  • the basic principle is that a silicon bar moves laterally in a plane, the substrate plane, which is defined by a silicon disk or a wafer.
  • the silicon bar which is connected to the substrate in a cavity, interacts with a volume flow.
  • the component comprises an electronic circuit which is arranged in a layer of the layer stack, the electronic circuit being connected to the electromechanical bending transducer and which is designed to deflect the bending transducer based on an electrical signal.
  • the first bending transducer has a first length 4th
  • the second bending transducer has a second length 5
  • the third bending transducer has a third length 6th Direction of movement of the first bending transducer 7th Direction of movement of the second bending transducer 8th Direction of movement of the third bending transducer 9
  • Substrate level 10 Level of motion 11 cavity 12 Angle between the plane of movement and the longitudinal axis 13 openings 14th Restraint 15th Edge of the cavity 16 Volume flow 17th Edge of the cavity 18th Lid wafer 19th Handling wafer 20th Device wafer 21st ASIC 22nd Common substrate layer 30th auricle 31 Ear canal 32 eardrum 100
  • Component 100 ' Section from a component 101 External geometry of an ultra-mobile device, for example a housing 102 Length of the component 103 Width of the component 104 Thickness of the component 105 A trans

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
EP19174497.8A 2019-05-14 2019-05-14 Système de transducteur acoustique et dispositif acoustique Active EP3739904B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP19174497.8A EP3739904B1 (fr) 2019-05-14 2019-05-14 Système de transducteur acoustique et dispositif acoustique
CN202080036103.7A CN114073103B (zh) 2019-05-14 2020-05-12 声学弯曲转换器系统和声学装置
PCT/EP2020/063187 WO2020229466A1 (fr) 2019-05-14 2020-05-12 Système de transducteurs de flexion acoustique et dispositif acoustique
TW109115901A TW202102008A (zh) 2019-05-14 2020-05-13 聲學彎曲轉換器系統及聲學設備
US17/524,577 US12108212B2 (en) 2019-05-14 2021-11-11 Acoustic bending converter system and acoustic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19174497.8A EP3739904B1 (fr) 2019-05-14 2019-05-14 Système de transducteur acoustique et dispositif acoustique

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EP3739904B1 EP3739904B1 (fr) 2024-10-16

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EP (1) EP3739904B1 (fr)
CN (1) CN114073103B (fr)
TW (1) TW202102008A (fr)
WO (1) WO2020229466A1 (fr)

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EP4156712A1 (fr) * 2021-09-24 2023-03-29 Robert Bosch GmbH Système de transducteur acoustique micro-électromécanique

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US12108212B2 (en) 2024-10-01
US20220070591A1 (en) 2022-03-03
EP3739904B1 (fr) 2024-10-16
CN114073103B (zh) 2025-01-03
CN114073103A (zh) 2022-02-18
WO2020229466A1 (fr) 2020-11-19
TW202102008A (zh) 2021-01-01

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