EP3774132A1 - Magnetische einschlussheizvorrichtung für gerät zur selektiven generativen fertigung - Google Patents

Magnetische einschlussheizvorrichtung für gerät zur selektiven generativen fertigung

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Publication number
EP3774132A1
EP3774132A1 EP19720981.0A EP19720981A EP3774132A1 EP 3774132 A1 EP3774132 A1 EP 3774132A1 EP 19720981 A EP19720981 A EP 19720981A EP 3774132 A1 EP3774132 A1 EP 3774132A1
Authority
EP
European Patent Office
Prior art keywords
plasma
powder
heating
generating device
plasma generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19720981.0A
Other languages
English (en)
French (fr)
Inventor
Gilles WALRAND
Tiberiu Minea
Charles BALLAGE
Daniel LUNDIN
Thomas Petty
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
AddUp SAS
Universite Paris Saclay
Original Assignee
Centre National de la Recherche Scientifique CNRS
AddUp SAS
Universite Paris Saclay
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, AddUp SAS, Universite Paris Saclay filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP3774132A1 publication Critical patent/EP3774132A1/de
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/48Generating plasma using an arc
    • H05H1/50Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/10Auxiliary heating means
    • B22F12/17Auxiliary heating means to heat the build chamber or platform
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/70Gas flow means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00Welding or cutting by means of a plasma
    • B23K10/02Plasma welding
    • B23K10/027Welding for purposes other than joining, e.g. build-up welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/001Rapid manufacturing of 3D objects by additive depositing, agglomerating or laminating of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/141Processes of additive manufacturing using only solid materials
    • B29C64/153Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/295Heating elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y40/00Auxiliary operations or equipment, e.g. for material handling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/10Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied magnetic fields only, e.g. Q-machines, Yin-Yang, base-ball
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/46Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645Radiofrequency discharges
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic materials other than metals or composite materials
    • B23K2103/52Ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602Making the green bodies or pre-forms by moulding
    • C04B2235/6026Computer aided shaping, e.g. rapid prototyping
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/666Applying a current during sintering, e.g. plasma sintering [SPS], electrical resistance heating or pulse electric current sintering [PECS]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Definitions

  • the present invention relates to the general field of selective additive manufacturing.
  • a general object of the invention is to overcome the disadvantages of the configurations proposed so far.
  • an object of the invention is to propose a solution that allows heating without loading and lifting of powder.
  • Another object is to propose a heating solution (performed before or after a selective melting step) operating at very low pressure, so as to optimize the performance of the powder melting device.
  • Yet another purpose is to provide a solution that can reduce costs and times of preheating or post-treatment by heating in manufacturing cycles.
  • Another object of the invention is to propose a simple construction solution.
  • Another aim is also to provide an effective heating solution, over a wide range of pressures, while remaining at low pressure ( ⁇ 0.1 mbar).
  • a plasma generating device said device being adapted to be arranged and moved above the powder bed, at a distance from the powder bed enabling the plasma to be generated thereon,
  • control unit for controlling the supply and the displacement of the plasma generating device
  • the plasma generating device comprises a magnetic confinement assembly of the plasma.
  • the plasma is confined and located in a restricted area, optimizing the preheating of the powder bed.
  • the energy efficiency of the heating cycle is thus improved, thereby decreasing the duration and cost of a preheating or heating cycle.
  • the magnetron device comprises a magnet arrangement configured to confine electrons in a linear pattern
  • the magnetron type device comprises an ion source slot, the slot being formed through the electrode and opening opposite the powder bed;
  • the plasma generating device is adapted to be displaced with a main displacement component perpendicular to the direction in which it extends;
  • the unit for the power supply of said plasma generating device comprises a continuous high voltage source and / or radiofrequency and / or pulse.
  • the invention proposes an apparatus for manufacturing a three-dimensional object by selective additive manufacturing comprising in an enclosure: a support for the deposition of successive layers of additive manufacturing powder,
  • At least one power source suitable for the selective consolidation of a layer of powder applied by the distribution arrangement
  • This apparatus may include a dispensing arrangement having a squeegee or layering roll, the plasma generating device extending proximate to or movable with said squeegee or roll, or placed on an independent movable device like a robot arm for example.
  • the invention proposes a manufacture of a three-dimensional object by selective additive manufacturing, said method comprising the steps:
  • At least one heating step is carried out before and / or after the consolidation step.
  • FIG. 1 is a schematic representation of an additive manufacturing apparatus comprising a heating device according to a possible embodiment of the invention
  • FIG. 2 is a block diagram of a plasma generating device heating a bed of powder according to the invention
  • FIG. 3 is a schematic sectional view of a magnetron plasma generation device according to the invention.
  • FIG. 4 is a diagram of the structure of a magnet arrangement of a magnetron device according to the invention
  • FIG. 5 is a 3D block diagram, seen from below, showing the operation of a magnetron cathode device in accordance with the invention
  • FIG. 6 is a diagrammatic sectional view showing an embodiment of a magnetron cathode device in accordance with the invention optionally equipped with a rotating electrode (cathode);
  • FIG. 7 is a 3D representation, seen from below, of a second embodiment of a magnetic confinement plasma generation device generating an ion beam according to the invention (also known as inverted magnetron) );
  • FIG. 8 is a schematic representation of a powder bed heated by means of a heating device according to the invention.
  • the selective additive manufacturing apparatus 1 of FIG. 1 comprises:
  • a support such as a horizontal plate 3 on which are deposited successively the various layers of additive manufacturing powder (metal powder, ceramic powder, etc.) making it possible to manufacture a three-dimensional object (object 2 in the shape of a fir tree in FIG. )
  • additive manufacturing powder metal powder, ceramic powder, etc.
  • this arrangement 4 comprising for example a squeegee 5 or a layering roll for spreading the different successive layers of powder (displacement along the double arrow A),
  • control unit 9 which controls the various components of the apparatus 1 according to pre-stored information (memory M), a mechanism 10 for enabling the support of the plate 3 to be lowered as the layers are deposited (displacement along the double arrow B).
  • the set 8 comprises two sources of consolidation:
  • the assembly 8 may comprise only one source, for example a source of energy located under vacuum or at very low pressure ( ⁇ 0.1 mbar): electron gun, laser source, etc.
  • the assembly 8 may also include several sources of the same type, such as for example several electron guns and / or laser sources, or means for obtaining several beams from the same source.
  • At least one galvanometric mirror 14 makes it possible to orient and move the laser beam coming from the source 12 with respect to the object 2 as a function of the information sent by the imaging unit. control 9.
  • the assembly 8 comprises several sources 12 of the laser type and the displacement of the different laser beams is obtained by moving the different sources 12 of the laser type above the layer of powder to be fused.
  • Deflection and focusing coils 15 and 16 locally deflect and focus the electron beam on the layer areas to be sintered or fused.
  • a heat shield T can be interposed between the source or sources of the assembly 8.
  • the components of the apparatus 1 are arranged within a sealed enclosure 17 connected to at least a vacuum pump 18 which maintains a high vacuum inside said chamber 17 (typically about 10 2/10 -3 mbar or even 10 4/10 -6 mbar).
  • the apparatus further comprises a heating device 19 disposed above the bed of powder and able to move linearly with respect thereto.
  • This heating device 19 can be placed behind the squeegee 5 or the layering roller on the same sliding carriage. It can also be mounted on an independent trolley or on a robot arm. In the latter case (not shown) the pattern described by the magnetic trap of the magnetron cathode can be of any other shape than linear, allowing for example a localized heating.
  • the displacement of said heating device 19, its power supply and its residence time in front of the powder bed that is to be heated or preheated are also controlled by the unit 9.
  • the heating device 19 comprises a plasma generation device 20 that is moved above the metal powder bed (solid or granular surface 21, made up of micro- or nanoparticles). powder).
  • the source 22 allows the application of a high voltage (> 0.2 kV) between the plasma generating device 20 and the surface 21 of the powder bed.
  • the supply thus made by the source 22 can be direct current, low frequency, radio frequency (RF), or pulse.
  • RF radio frequency
  • the plasma generating device 20 generates, under the effect of said source 22, electric discharges between the plasma generating device 20 and the surface 21 and creates a plasma, which provides the heating of the surface 21.
  • the plasma generating device 20 extends substantially parallel to the surface 21. It is moved parallel to said surface 21, perpendicular to the direction in which it extends. Such a configuration allows homogeneous heating on a surface of the powder bed corresponding to the length of the plasma generating device 20 and its displacement distance.
  • the surface 21 of the powder bed is for example connected to ground.
  • the heating can be performed before the consolidation step, thus constituting a preheating step, so as to avoid powder splashes.
  • a heating step can be performed after the consolidation step, thus constituting a post-heating step, so as to anneal the material or limit the quenching effect by the working atmosphere, or to control the evolution of the cooling temperature so as to obtain a particular crystalline structure.
  • this device comprises a magnetic plasma confinement system.
  • FIG. 3 shows a plasma confinement assembly comprising a linear plasma generation magnetron device 23.
  • It comprises an electrode 24, preferably polarized negatively (and playing, in this case, the role of cathode).
  • Magnets can be permanent or electromagnets, or a combination of both.
  • the electrode 24 can be powered (source 22) in direct current (DC), in Radio Frequency (RF) or in high power pulse mode (HiPIMS - High Power Impulse). Magnetron Sputtering, but usually receiving a negative voltage.
  • DC direct current
  • RF Radio Frequency
  • HiPIMS High Power Pule
  • the constituent material of the electrode 24 may be an electrical conductor, an insulator or a semiconductor.
  • a circulation 26 of a cooling fluid (for example water, glycol, etc.) is provided in the electrode 24, powered by an external system.
  • the refrigerant may for example be injected through orifices in one of the walls of the carriage 27, and may for example be circulated between the rows of magnets of the magnet arrangement 25, the fluid thus also being contact with the electrode 24 and cooling thereof.
  • the refrigerant can then be extracted through a second orifice in the carriage 27.
  • Such a magnetron device 23 is mounted inside the enclosure 17 on a carriage 27 disposed above the bed of powder and able to move linearly relative thereto (double arrow in the figure).
  • This carriage 27 is for example that of the layering roller, the magnetron device 23 being disposed behind said roller (with respect to the direction of advance thereof).
  • an example of a magnet arrangement 25 comprises two rows of magnets arranged to form a linear track 28.
  • the magnets of opposite polarities are thus arranged on either side of the track 28.
  • the magnetic field generated by the magnets traps the electrons around the magnetic field lines, on the side of the electrode 24 facing the powder bed, and thus increases the ionization of the gas along a linear pattern 29 along the magnetic field. runway 28, as shown in FIG.
  • This magnetic configuration concentrates the electrons and along the pattern 29, forming a plasma along said pattern 29.
  • an alternating arrangement (north and south to center, or vice versa) is generally made to provide a closed magnetic track 28 as illustrated in FIG.
  • the arrangement of magnets 25 is therefore configured to generate a magnetic field that will concentrate the electrons in a determined area.
  • it is a linear pattern, but the magnets could be arranged to form any other geometric model, such as a circle or a curve.
  • the concentration of electrons in a given zone makes it possible to promote local ionization of the gas in the zone, and the presence of a magnetic trap makes it possible to confine the plasma in a precise zone, even at very low pressure.
  • a low operating pressure implies a lower density of the atmosphere. surrounding and therefore less shock between the electrons emitted by the source 12 and the surrounding gas.
  • the presence of a magnetic field makes it possible to concentrate the electrons in an area and thus to promote the formation of a plasma despite the low density of the surrounding atmosphere.
  • the width of the heated zone is then reduced, which improves the heating accuracy.
  • the decrease in the operating pressure limits the surrounding oxygen level, which limits the formation of oxides and fumes.
  • the molten material is therefore less polluted by fumes and oxides.
  • the denudation phenomenon which consists of a depletion of the metal powders in the zone surrounding the solidified track due to the blowing of these powders by a flow of metal vapor generated by the melting of the powders during the laser heating, is also strongly limited by reducing the surrounding pressure.
  • the metal vapors produced during the melting of the powders are then less dense and the flow of these vapors does not blow the powders.
  • the magnetic field B is configured to trap only the electrons, without altering the behavior of the ions.
  • the mass ratio between the electrons and the ions generates a similar ratio between their respective magnetic gyration radii (Larmor rays).
  • the plasma thus created is confined between the electrode 24 and the free surface 21 of the powder bed.
  • a magnetron device 23 By placing such a magnetron device 23 with the homogeneous part (plasma or ion beam) towards the powder bed, it is possible to effectively transfer energy from the plasma species to the powder and thus to heat it.
  • the energy is transmitted to the powder by several biases simultaneously coexisting in a plasma. These are charged species, electrons and ions, but also neutral energy species, including atomized neutral atoms of the electrode (cathode), non-radiative excited states (metastable), and photons.
  • the surface (powder) receives the two charged species, the charge effects (Coulomb repulsion) are reduced or even eliminated.
  • the denser the plasma the greater the energy transmitted to the surface.
  • the amount of energy in the case of ions but more generally for any type of plasma, can easily be adjusted by the ionic acceleration voltage or the power injected into the plasma. Better control can be achieved by the pulsed operation of the plasma, alternating heating phases (active plasma - ON, in English) and thermal expansion phases (plasma OFF). Changing the ON / OFF period, also known as the duty cycle, makes it easy to adjust the temperature.
  • the magnet arrangement 25 is fixedly mounted relative to the magnetron device 23, the electrode 24 being rotatably mounted along the axis along which it extends.
  • the position and orientation of the magnetic field with respect to the magnetron device 23 does not change during operation, making it possible to control the plasma formation zone.
  • the electrode 24 is rotated. In this way, the part of the electrode 24 which is exposed to the plasma changes regularly, limiting the heating of a particular zone, the plasma being always confined to the magnetic trap generated by the magnet arrangement 25 which has a fixed orientation relative to the magnetron device 23, in particular to the surface 21 of the powder bed, as illustrated in FIG.
  • Variations of magnetron cathodes also make it possible to obtain a linear and homogeneous plasma.
  • the electrode 24 is a plane electrode.
  • the magnetron device may comprise an electrode 24 in which a slot 30 is formed.
  • the slot 30 is arranged opposite the track 28, the track 28 being formed by a cavity extending between the rows of the magnet arrangement 25.
  • An injection port 31 is formed in a wall of the carriage 27, at the bottom of the cavity formed by the track 28 and the slot 30.
  • a gas is injected into the cavity through the injection orifice 31. During the excitation of the cathode 24, the gas is then strongly ionized by the electrons effectively trapped by the magnetic field B generated by the magnet arrangement. 25.
  • the gas injected through the injection orifice 31 is the gas forming the working atmosphere, making it possible to simplify the apparatus.
  • the cavity formed by the track 28 and the slot 30 thus forms an ion source.
  • the magnetic barrier generated by the magnet arrangement increases the electrical resistance of the plasma, thereby generating a potential difference in the Hall effect plasma.
  • a charge movement generated by the magnetic field B and an electric field generated by the excitation of the cathode 24 causes a circulation of electrons along the track 28, facing the slot 30, leading to the homogenization of the plasma.
  • the ions, not magnetized, are projected by the electric field through the slot 30.
  • the slot 30 is ideally located opposite the powder bed, so as to project the plasma jet on the surface 21 to be heated.
  • the plasma generating device 20 is of any other shape than linear and is adapted to be moved with a robot.
  • this plasma generating device 20 By moving this plasma generating device 20 it is possible to scan the surface 21 of the powder bed. Keeping the plasma lit and performing a full scan of the surface 21 of the powder bed, thereby superficially heating the bed of powder.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Powder Metallurgy (AREA)
  • Discharge Heating (AREA)
  • Furnace Details (AREA)
EP19720981.0A 2018-04-06 2019-04-05 Magnetische einschlussheizvorrichtung für gerät zur selektiven generativen fertigung Withdrawn EP3774132A1 (de)

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FR1853031A FR3079775B1 (fr) 2018-04-06 2018-04-06 Dispositif de chauffage a confinement magnetique pour appareil de fabrication additive selective
PCT/FR2019/050809 WO2019193299A1 (fr) 2018-04-06 2019-04-05 Dispositif de chauffage a confinement magnétique pour appareil de fabrication additive sélective

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CN (1) CN112823071A (de)
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Families Citing this family (8)

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Publication number Priority date Publication date Assignee Title
CN111014677B (zh) * 2019-10-18 2021-10-22 南京钛陶智能系统有限责任公司 一种基于磁力搅拌的三维打印锻造方法
FR3105037B1 (fr) * 2019-12-19 2025-12-19 Addup Traitement in situ de poudre pour fabrication additive en vue d’améliorer sa conductivité thermique et/OU électrique
FR3105036B1 (fr) * 2019-12-19 2025-04-25 Addup Traitement IN SITU de poudres pour fabrication additive
CN112705729B (zh) * 2020-12-16 2022-05-17 宁波中久东方光电技术有限公司 一种激光增材设备的出粉方法
GB2602458B (en) * 2020-12-22 2023-01-18 Wayland Additive Ltd Additive manufacturing using powder bed fusion
CN115740497B (zh) * 2022-11-21 2025-08-29 中国科学院工程热物理研究所 一种减少激光选区熔化增材制造零件表面粉末黏附的方法
CN117548693A (zh) * 2024-01-11 2024-02-13 西安空天机电智能制造有限公司 一种增材制造装置及其增材制造方法
CN120700455B (zh) * 2025-08-30 2025-11-18 江苏派莱特光电科技有限公司 一种用于磁控溅射镀膜机的工件烘烤加热装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016209094A1 (de) * 2016-05-25 2017-11-30 Robert Bosch Gmbh Schichtweise erzeugter Formkörper
WO2019193298A1 (fr) * 2018-04-06 2019-10-10 Addup Dispositif de chauffage pour appareil de fabrication additive

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4230290A1 (de) * 1992-09-10 1994-03-17 Leybold Ag Vorrichtung zum Erzeugen eines Plasmas mittels Kathodenzerstäubung und Mikrowelleneinstrahlung
SE511139C2 (sv) * 1997-11-20 1999-08-09 Hana Barankova Plasmabearbetningsapparat med vridbara magneter
US6664547B2 (en) * 2002-05-01 2003-12-16 Axcelis Technologies, Inc. Ion source providing ribbon beam with controllable density profile
ES2353102B1 (es) * 2009-08-14 2011-12-30 Consejo Superior De Investigaciones Científicas (Csic) Dispositivo magnetron y procedimiento de erosion uniforme de un blanco empleando dicho dispositivo
JP2017530251A (ja) * 2014-07-09 2017-10-12 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 付加製造における、層別加熱、ライン別加熱、プラズマ加熱、及び複数の供給材料
US20170203364A1 (en) * 2014-07-18 2017-07-20 Applied Materials, Inc. Additive manufacturing with laser and plasma
US20160228991A1 (en) * 2015-02-05 2016-08-11 Siemens Energy, Inc. Acoustic manipulation and laser processing of particles for repair and manufacture of metallic components
KR101674615B1 (ko) * 2015-05-14 2016-11-09 주식회사 아바코 증착장치
KR20180061136A (ko) * 2015-06-19 2018-06-07 어플라이드 머티어리얼스, 인코포레이티드 적층 제조에서의 파우더의 선택적 퇴적
EP3310559A4 (de) * 2015-06-19 2019-03-13 Applied Materials, Inc. Oberflächenbearbeitung in der generativen fertigung mit laser und gasstrom
US20160368056A1 (en) * 2015-06-19 2016-12-22 Bharath Swaminathan Additive manufacturing with electrostatic compaction
WO2017004050A1 (en) * 2015-06-29 2017-01-05 Applied Materials, Inc. Temperature controlled substrate processing
CN109070450B (zh) * 2016-04-10 2022-01-11 惠普发展公司,有限责任合伙企业 分配用于增材制造的粉末状构造材料
CN206794756U (zh) * 2017-06-02 2017-12-26 清华大学天津高端装备研究院 可在线热处理的增材制造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016209094A1 (de) * 2016-05-25 2017-11-30 Robert Bosch Gmbh Schichtweise erzeugter Formkörper
WO2019193298A1 (fr) * 2018-04-06 2019-10-10 Addup Dispositif de chauffage pour appareil de fabrication additive

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2019193299A1 *

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Publication number Publication date
JP2021520310A (ja) 2021-08-19
FR3079775B1 (fr) 2021-11-26
FR3079775A1 (fr) 2019-10-11
CN112823071A (zh) 2021-05-18
KR20210112236A (ko) 2021-09-14
WO2019193299A1 (fr) 2019-10-10
US20210086286A1 (en) 2021-03-25

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