EP3845764A3 - Vacuum pump and vacuum pump system - Google Patents

Vacuum pump and vacuum pump system Download PDF

Info

Publication number
EP3845764A3
EP3845764A3 EP21166257.2A EP21166257A EP3845764A3 EP 3845764 A3 EP3845764 A3 EP 3845764A3 EP 21166257 A EP21166257 A EP 21166257A EP 3845764 A3 EP3845764 A3 EP 3845764A3
Authority
EP
European Patent Office
Prior art keywords
holweck
vacuum pump
inlet
pump
axial end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP21166257.2A
Other languages
German (de)
French (fr)
Other versions
EP3845764A2 (en
EP3845764B1 (en
Inventor
Jan Hofmann
Michael Schweighöfer
Martin Lohse
Sebastian Südwasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21166257.2A priority Critical patent/EP3845764B1/en
Publication of EP3845764A2 publication Critical patent/EP3845764A2/en
Publication of EP3845764A3 publication Critical patent/EP3845764A3/en
Application granted granted Critical
Publication of EP3845764B1 publication Critical patent/EP3845764B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/08—Units comprising pumps and their driving means the working fluid being air, e.g. for ventilation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularvakuumpumpe, mit einem Einlass, einem Auslass, einem Gehäuse, das einen Pumpenraum für ein vom Einlass zum Auslass in einer Pumprichtung zu pumpendes Gas einschließt, und zumindest einer Holweck-Pumpstufe, die zumindest einen Holweck-Stator und wenigstens einen im Betrieb um eine Rotationsachse rotierenden, zusammen mit dem Holweck-Stator einen Holweck-Pumpbereich begrenzenden Holweck-Rotor umfasst, wobei der Holweck-Pumpbereich bezogen auf die Rotationsachse eine axiale Länge mit einem ersten axialen Ende und einem zweiten axialen Ende aufweist, wobei zumindest ein weiterer Einlass für zu pumpendes Gas vorgesehen ist, der über einen Einlasskanal zu einer im Holweck-Stator ausgebildeten Mündung des weiteren Einlasses in den Holweck-Pumpbereich führt, wobei die Mündung in axialer Richtung zwischen dem ersten axialen Ende und dem zweiten axialen Ende des Holweck-Pumpbereiches gelegen ist, und wobei der Einlasskanal zumindest einen Mündungsabschnitt umfasst, der im Holweck-Stator ausgebildet ist und bis zur Mündung in den Holweck-Pumpbereich führt.The invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with an inlet, an outlet, a housing that encloses a pump space for a gas to be pumped from the inlet to the outlet in one pumping direction, and at least one Holweck pump stage that includes at least one Holweck stator and comprises at least one Holweck rotor which rotates around an axis of rotation during operation and delimits a Holweck pump area together with the Holweck stator, the Holweck pump area having an axial length with a first axial end and a second axial end in relation to the axis of rotation, wherein at least one further inlet for gas to be pumped is provided, which leads via an inlet channel to an opening formed in the Holweck stator of the further inlet in the Holweck pumping area, the opening in the axial direction between the first axial end and the second axial end of the Holweck pumping area is located, and wherein the inlet channel is at comprises at least one mouth section which is formed in the Holweck stator and leads to the mouth in the Holweck pumping area.

EP21166257.2A 2021-03-31 2021-03-31 Vacuum pump and vacuum pump system Active EP3845764B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP21166257.2A EP3845764B1 (en) 2021-03-31 2021-03-31 Vacuum pump and vacuum pump system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21166257.2A EP3845764B1 (en) 2021-03-31 2021-03-31 Vacuum pump and vacuum pump system

Publications (3)

Publication Number Publication Date
EP3845764A2 EP3845764A2 (en) 2021-07-07
EP3845764A3 true EP3845764A3 (en) 2021-10-27
EP3845764B1 EP3845764B1 (en) 2023-05-03

Family

ID=75339520

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21166257.2A Active EP3845764B1 (en) 2021-03-31 2021-03-31 Vacuum pump and vacuum pump system

Country Status (1)

Country Link
EP (1) EP3845764B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4474654B1 (en) * 2024-03-11 2026-02-11 Pfeiffer Vacuum Technology AG Turbomolecular vacuum pump
EP4589152A1 (en) * 2025-05-28 2025-07-23 Pfeiffer Vacuum Technology AG Vacuum pump and method of operating a vacuum pump
EP4707607A1 (en) * 2025-12-11 2026-03-11 Pfeiffer Vacuum Technology AG Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP2933497A2 (en) * 2014-04-17 2015-10-21 Pfeiffer Vacuum GmbH Vacuum pump
EP3657021A1 (en) * 2018-11-21 2020-05-27 Pfeiffer Vacuum Gmbh Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP2933497A2 (en) * 2014-04-17 2015-10-21 Pfeiffer Vacuum GmbH Vacuum pump
EP3657021A1 (en) * 2018-11-21 2020-05-27 Pfeiffer Vacuum Gmbh Vacuum pump

Also Published As

Publication number Publication date
EP3845764A2 (en) 2021-07-07
EP3845764B1 (en) 2023-05-03

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