EP3845764A3 - Pompe à vide et système de pompe à vide - Google Patents
Pompe à vide et système de pompe à vide Download PDFInfo
- Publication number
- EP3845764A3 EP3845764A3 EP21166257.2A EP21166257A EP3845764A3 EP 3845764 A3 EP3845764 A3 EP 3845764A3 EP 21166257 A EP21166257 A EP 21166257A EP 3845764 A3 EP3845764 A3 EP 3845764A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- holweck
- vacuum pump
- inlet
- pump
- axial end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/08—Units comprising pumps and their driving means the working fluid being air, e.g. for ventilation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21166257.2A EP3845764B1 (fr) | 2021-03-31 | 2021-03-31 | Pompe à vide et système de pompe à vide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21166257.2A EP3845764B1 (fr) | 2021-03-31 | 2021-03-31 | Pompe à vide et système de pompe à vide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP3845764A2 EP3845764A2 (fr) | 2021-07-07 |
| EP3845764A3 true EP3845764A3 (fr) | 2021-10-27 |
| EP3845764B1 EP3845764B1 (fr) | 2023-05-03 |
Family
ID=75339520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP21166257.2A Active EP3845764B1 (fr) | 2021-03-31 | 2021-03-31 | Pompe à vide et système de pompe à vide |
Country Status (1)
| Country | Link |
|---|---|
| EP (1) | EP3845764B1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4474654B1 (fr) * | 2024-03-11 | 2026-02-11 | Pfeiffer Vacuum Technology AG | Pompe à vide turbomoléculaire |
| EP4589152A1 (fr) * | 2025-05-28 | 2025-07-23 | Pfeiffer Vacuum Technology AG | Pompe à vide et procédé de fonctionnement d'une pompe à vide |
| EP4707607A1 (fr) * | 2025-12-11 | 2026-03-11 | Pfeiffer Vacuum Technology AG | Pompe à vide |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| EP2933497A2 (fr) * | 2014-04-17 | 2015-10-21 | Pfeiffer Vacuum GmbH | Pompe à vide |
| EP3657021A1 (fr) * | 2018-11-21 | 2020-05-27 | Pfeiffer Vacuum Gmbh | Pompe à vide |
-
2021
- 2021-03-31 EP EP21166257.2A patent/EP3845764B1/fr active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| EP2933497A2 (fr) * | 2014-04-17 | 2015-10-21 | Pfeiffer Vacuum GmbH | Pompe à vide |
| EP3657021A1 (fr) * | 2018-11-21 | 2020-05-27 | Pfeiffer Vacuum Gmbh | Pompe à vide |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3845764A2 (fr) | 2021-07-07 |
| EP3845764B1 (fr) | 2023-05-03 |
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