EP3938657C0 - Pompe sèche pour gaz et jeu de plusieurs pompes sèches pour gaz - Google Patents

Pompe sèche pour gaz et jeu de plusieurs pompes sèches pour gaz

Info

Publication number
EP3938657C0
EP3938657C0 EP19712929.9A EP19712929A EP3938657C0 EP 3938657 C0 EP3938657 C0 EP 3938657C0 EP 19712929 A EP19712929 A EP 19712929A EP 3938657 C0 EP3938657 C0 EP 3938657C0
Authority
EP
European Patent Office
Prior art keywords
gas
dry
pumps
several
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19712929.9A
Other languages
German (de)
English (en)
Other versions
EP3938657A1 (fr
EP3938657B1 (fr
Inventor
Théodore Iltchev
Stéphane VARRIN
Didier Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ateliers Busch SA
Original Assignee
Ateliers Busch SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PL19712929.9T priority Critical patent/PL3938657T3/pl
Publication of EP3938657A1 publication Critical patent/EP3938657A1/fr
Application granted granted Critical
Publication of EP3938657B1 publication Critical patent/EP3938657B1/fr
Publication of EP3938657C0 publication Critical patent/EP3938657C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/20—Geometry of the rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Sampling And Sample Adjustment (AREA)
EP19712929.9A 2019-03-14 2019-03-14 Pompe sèche pour gaz et jeu de plusieurs pompes sèches pour gaz Active EP3938657B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL19712929.9T PL3938657T3 (pl) 2019-03-14 2019-03-14 Pompa sucha do gazu oraz zestaw kilku pomp suchych do gazu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2019/056501 WO2020182317A1 (fr) 2019-03-14 2019-03-14 Pompe sèche pour gaz et jeu de plusieurs pompes sèches pour gaz

Publications (3)

Publication Number Publication Date
EP3938657A1 EP3938657A1 (fr) 2022-01-19
EP3938657B1 EP3938657B1 (fr) 2023-06-07
EP3938657C0 true EP3938657C0 (fr) 2023-06-07

Family

ID=65904380

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19712929.9A Active EP3938657B1 (fr) 2019-03-14 2019-03-14 Pompe sèche pour gaz et jeu de plusieurs pompes sèches pour gaz

Country Status (11)

Country Link
US (1) US11920592B2 (fr)
EP (1) EP3938657B1 (fr)
JP (1) JP7315693B2 (fr)
KR (1) KR102583846B1 (fr)
CN (1) CN113544384B (fr)
AU (1) AU2019433234B2 (fr)
CA (1) CA3128596A1 (fr)
ES (1) ES2951988T3 (fr)
PL (1) PL3938657T3 (fr)
TW (1) TWI831938B (fr)
WO (1) WO2020182317A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4407775A4 (fr) 2021-10-12 2026-01-28 Lg Energy Solution Ltd Séparateur pour dispositif électrochimique et dispositif électrochimique le comprenant

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519923A (en) * 1978-07-28 1980-02-13 Hitachi Ltd Screw compressor
JPH0599176A (ja) * 1991-10-01 1993-04-20 Ebara Corp スクリユー式ドライ真空ポンプ
DE4316735C2 (de) * 1993-05-19 1996-01-18 Bornemann J H Gmbh & Co Pumpverfahren zum Betreiben einer Multiphasen-Schraubenspindelpumpe und Pumpe
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
US5924855A (en) * 1995-06-21 1999-07-20 Sihi Industry Consult Gmbh Screw compressor with cooling
US6638042B1 (en) * 2002-05-08 2003-10-28 Carrier Corporation Asymmetric porting for multi-rotor screw compressor
KR100497982B1 (ko) * 2004-10-01 2005-07-01 (주)엘오티베큠 루츠형 로터와 스크루형 로터를 지닌 복합 드라이 진공펌프
KR100591079B1 (ko) * 2004-10-01 2006-06-19 (주)엘오티베큠 루츠로터와 스크류로터 복합건식 진공펌프
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
JP2008196390A (ja) 2007-02-13 2008-08-28 Toyota Industries Corp 容積変動型流体機械
JP4900270B2 (ja) * 2008-02-08 2012-03-21 株式会社豊田自動織機 スクリュポンプ
JP5353521B2 (ja) 2009-07-22 2013-11-27 株式会社豊田自動織機 スクリューロータ
JP2012207660A (ja) * 2011-03-11 2012-10-25 Toyota Industries Corp スクリュポンプ
TW201623800A (zh) * 2014-12-29 2016-07-01 漢鐘精機股份有限公司 螺旋轉子組
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
CN112780563A (zh) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 双级干式真空泵

Also Published As

Publication number Publication date
TWI831938B (zh) 2024-02-11
EP3938657A1 (fr) 2022-01-19
BR112021017117A2 (pt) 2021-11-03
US20220145886A1 (en) 2022-05-12
CA3128596A1 (fr) 2020-09-17
TW202100868A (zh) 2021-01-01
JP7315693B2 (ja) 2023-07-26
KR20210135328A (ko) 2021-11-12
US11920592B2 (en) 2024-03-05
EP3938657B1 (fr) 2023-06-07
WO2020182317A1 (fr) 2020-09-17
JP2022525448A (ja) 2022-05-16
PL3938657T3 (pl) 2023-10-16
AU2019433234B2 (en) 2025-05-01
KR102583846B1 (ko) 2023-09-27
ES2951988T3 (es) 2023-10-26
CN113544384B (zh) 2023-09-08
CN113544384A (zh) 2021-10-22
AU2019433234A1 (en) 2021-09-16

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