EP3940234A2 - Pompe et procédé de fabrication d'une couche antifriction - Google Patents

Pompe et procédé de fabrication d'une couche antifriction Download PDF

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Publication number
EP3940234A2
EP3940234A2 EP21199962.8A EP21199962A EP3940234A2 EP 3940234 A2 EP3940234 A2 EP 3940234A2 EP 21199962 A EP21199962 A EP 21199962A EP 3940234 A2 EP3940234 A2 EP 3940234A2
Authority
EP
European Patent Office
Prior art keywords
seal
pump
oxide layer
spiral
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP21199962.8A
Other languages
German (de)
English (en)
Other versions
EP3940234A3 (fr
EP3940234B1 (fr
Inventor
Bernd Koci
Jonas Becker
Sebastian Latta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21199962.8A priority Critical patent/EP3940234B1/fr
Publication of EP3940234A2 publication Critical patent/EP3940234A2/fr
Publication of EP3940234A3 publication Critical patent/EP3940234A3/fr
Priority to JP2022139319A priority patent/JP7592670B2/ja
Priority to CN202211178055.2A priority patent/CN116085259A/zh
Application granted granted Critical
Publication of EP3940234B1 publication Critical patent/EP3940234B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
    • F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/02—Packing the free space between cylinders and pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F04B53/143—Sealing provided on the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F04B53/162—Adaptations of cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/92—Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for
    • F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/14—Self lubricating materials; Solid lubricants

Definitions

  • the first spiral section 120 extends from the in 12 indicated location to the outer end of the spiral wall 28, as is also the case, for example, in figure 5 is indicated.
  • the first spiral section 120 extends here by way of example over approximately 163°.
  • the preferably fluoropolymer-containing sealing not only promotes the dry lubricating properties of the sliding layer 152 and also reduces its wear, but also improves the gas-tightness of the sliding layer 152, resulting in an improvement in the ultimate pressures that can be achieved and a reduction in the run-in time.
  • the supports 154, in the form of the base plate 66, and the spiral walls 26, 28 are each formed in one piece and consist of an aluminum alloy of the AlMgSi type.
  • the oxide layer of sliding layer 152 is an aluminum oxide layer produced by anodic oxidation in a sulfuric acid electrolyte.
  • the sliding layer 152 is applied in particular to all surfaces of the spiral components 24, 30 that face the conveying chambers.
  • the seal 150 shown (tip seals) is, for example, polytetrafluoroethylene containing polyimide particles and was produced by hot compression molding and subsequent sintering.
  • the mean particle size of the polyimide particles is 25 ⁇ m.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
EP21199962.8A 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction Active EP3940234B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP21199962.8A EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction
JP2022139319A JP7592670B2 (ja) 2021-09-29 2022-09-01 ポンプ及びスライド層を製造する方法
CN202211178055.2A CN116085259A (zh) 2021-09-29 2022-09-26 泵和用于产生滑动层的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21199962.8A EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction

Publications (3)

Publication Number Publication Date
EP3940234A2 true EP3940234A2 (fr) 2022-01-19
EP3940234A3 EP3940234A3 (fr) 2022-07-13
EP3940234B1 EP3940234B1 (fr) 2023-08-23

Family

ID=78073829

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21199962.8A Active EP3940234B1 (fr) 2021-09-29 2021-09-29 Pompe et procédé de fabrication d'une couche antifriction

Country Status (3)

Country Link
EP (1) EP3940234B1 (fr)
JP (1) JP7592670B2 (fr)
CN (1) CN116085259A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A3 (fr) * 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
EP4390130A1 (fr) 2022-12-21 2024-06-26 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'un joint

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3153706A1 (fr) 2015-10-06 2017-04-12 Pfeiffer Vacuum Gmbh Pompe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB433367A (en) * 1934-04-25 1935-08-13 Peintal S A Process for the production of anti-corrosive films on aluminium and its alloys
US4453898A (en) * 1977-08-01 1984-06-12 The Perkin-Elmer Corporation Dual-piston reciprocating pump assembly
JP3137507B2 (ja) * 1993-08-30 2001-02-26 三菱重工業株式会社 スクロ−ル型流体機械
JPH0988851A (ja) * 1995-09-29 1997-03-31 Ntn Corp 容積形圧縮機のスクロール部材の製造方法
JP3210611B2 (ja) * 1997-10-03 2001-09-17 スカイアルミニウム株式会社 樹脂塗装アルミニウム合金部材およびその製造方法
JP2009120917A (ja) * 2007-11-16 2009-06-04 Panasonic Corp 摺動部材及び流体機械
CN201428601Y (zh) * 2009-04-10 2010-03-24 川北科技（北京）有限公司 铝制真空泵腔体改进结构
BR112015001500A2 (pt) 2012-07-23 2017-07-04 Emerson Climate Technologies revestimentos antidesgaste para superfícies de desgaste do compressor
EP3617512B1 (fr) * 2018-08-28 2022-11-30 Pfeiffer Vacuum Gmbh Pompe à vide du distributeur rotatif
CN110630492A (zh) * 2019-09-29 2019-12-31 合肥墨研涡旋科技有限公司 一种自润滑式涡旋盘及其制造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3153706A1 (fr) 2015-10-06 2017-04-12 Pfeiffer Vacuum Gmbh Pompe

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4390130A1 (fr) 2022-12-21 2024-06-26 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'un joint
JP2024089625A (ja) * 2022-12-21 2024-07-03 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト ポンプ及び封止部を製造する方法
EP4390130B1 (fr) 2022-12-21 2025-03-19 Pfeiffer Vacuum Technology AG Pompe et procédé de fabrication d'un revêtement
JP7803910B2 (ja) 2022-12-21 2026-01-21 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト ポンプ及び封止部を製造する方法
EP4253720A3 (fr) * 2023-08-08 2024-06-19 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales
WO2025032188A1 (fr) * 2023-08-08 2025-02-13 Pfeiffer Vacuum Technology AG Pompe à vide à spirale et système de pompe à vide à spirale
EP4530471A3 (fr) * 2023-08-08 2025-07-02 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et système de pompe à vide à spirales

Also Published As

Publication number Publication date
EP3940234A3 (fr) 2022-07-13
JP7592670B2 (ja) 2024-12-02
EP3940234B1 (fr) 2023-08-23
JP2023050117A (ja) 2023-04-10
CN116085259A (zh) 2023-05-09

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