EP4241995B1 - Tête d'impression à injection et son procédé de fabrication - Google Patents

Tête d'impression à injection et son procédé de fabrication

Info

Publication number
EP4241995B1
EP4241995B1 EP23151377.1A EP23151377A EP4241995B1 EP 4241995 B1 EP4241995 B1 EP 4241995B1 EP 23151377 A EP23151377 A EP 23151377A EP 4241995 B1 EP4241995 B1 EP 4241995B1
Authority
EP
European Patent Office
Prior art keywords
electrode
voltage
nozzle
layer
inkjet printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23151377.1A
Other languages
German (de)
English (en)
Other versions
EP4241995A1 (fr
EP4241995C0 (fr
Inventor
Do Young Byun
Vu Dat Nguyen
Chihyun Park
Byungjik Lim
Hyungdong Lee
Hyunwoong Yoo
Jaewoo Joung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Enjet Co Ltd
Original Assignee
Enjet Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020220169557A external-priority patent/KR102826101B1/ko
Application filed by Enjet Co Ltd filed Critical Enjet Co Ltd
Publication of EP4241995A1 publication Critical patent/EP4241995A1/fr
Application granted granted Critical
Publication of EP4241995B1 publication Critical patent/EP4241995B1/fr
Publication of EP4241995C0 publication Critical patent/EP4241995C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/06—Ink jet characterised by the jet generation process generating single droplets or particles on demand by electric or magnetic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm

Definitions

  • Drop-on-demand (DOD) inkjet printhead is classified according to discharging methods into a piezoelectric inkjet printhead that discharges ink by pressure waves based on transformation of a piezoelectric body, and an electrohydrodynamic inkjet printhead that discharges ink by electrostatic force.
  • the piezoelectric inkjet printhead is advantageous in that it is easy to control a printing job, and there are no restrictions on the types of ink because the discharging energy is based on mechanical transformation.
  • the piezoelectric inkjet printhead has difficulty in discharging ultrafine droplets of several picoliters or less, and has a limitation in that the discharge of only ink having a viscosity of about 10 cPs is possible but the discharge of ink having a high viscosity is not possible. Further, it is difficult to discharge big droplets of 80 picoliters or more due to the limitations on the discharging energy.
  • the piezoelectric inkjet printhead has a limitation even though volume uniformity of discharged droplets between a plurality of nozzles is very important for applications to the processes of the printed electronics such as a display, etc. unlike the existing graphic printing.
  • the electrohydrodynamic inkjet printhead provides the discharging energy by applying electrostatic force to a liquid surface of ink formed at the end of a nozzle, and is therefore advantageous in that the discharge of ultrafine droplets of not more than several picoliters or femtoliters is possible and the discharge of ink droplets having a high viscosity of about 1,000 cPs is possible. Besides, it is also possible to discharge big droplets of 80 picoliters or more.
  • the electrohydrodynamic inkjet printhead is advantageous for precise printing because a driving method is simple and the directionality of discharged ink droplets is excellent due to control based on distribution of an electric field formed on the nozzle.
  • the electrohydrodynamic inkjet printhead has difficulty in cleaning the nozzle, which needs to be performed during a process, because the nozzle has a protruding structure for the concentration of the electric field.
  • An inkjet head generally secures the stability of droplet jetting by cleaning the nozzle, which is contaminated with the ink, through wiping or the like process.
  • a voltage of several hundred V to several KV is applied.
  • a voltage controller having a very high slew rate is required to discharge the droplets by a DOD method.
  • the electrohydrodynamic inkjet method has the maximum jetting frequency of about 1 kHz. However, this jetting frequency is very low as compared to the high jetting frequency of 100 kHz the foregoing piezoelectric inkjet method has.
  • an electrohydrodynamic high-voltage electrode is disposed inside a nozzle, an ink chamber or an ink inlet.
  • contact between the ink and the electrode causes an electro-chemical reaction that generates heat, and therefore problems arise in that the ink is denaturalized, bubbles are generated, the nozzle is clogged, etc.
  • there have been many technical difficulties such as difficulties in processing a membrane structure of the piezoelectric body, an electrode for electrohydrodynamic inkjet driving, etc.
  • Korean Patent No. 10-0917279 relates to an inkjet printhead.
  • an aspect of the disclosure is to provide an inkjet printhead and a method of manufacturing the same, in which, as an inkjet apparatus having a layered multi-nozzle, a pressure wave based on oscillation of a piezoelectric body controls a liquid surface at the end of the nozzle, and a droplet is discharged by applying electrostatic force based on an induced electric field to the liquid surface, thereby overcoming viscosity and surface tension to discharge ultrafine droplets or large droplets based on combination between mechanical driving force of the piezoelectric body and the electrostatic force, and improving size uniformity of droplets between the nozzles based control of the electrostatic force for each nozzle.
  • the invention is directed to an inkjet printhead according to claim 1.
  • the chamber may include a first side communicating with the manifold, and a second side communicating with the nozzle channel.
  • the hydrophobic coating layer may be coated from an end of the nozzle to an inside of the nozzle.
  • voltage applied by the first voltage controller may be synchronized with voltage applied by the second voltage controller.
  • the second voltage controller may apply voltage to the third electrode to discharge a droplet when a meniscus is formed at an end of the nozzle as the first voltage controller applies a pulse voltage between the first electrode and the second to make the piezoelectric actuator oscillate the membrane, and the second voltage controller may apply a voltage having an opposite polarity to a discharging voltage or applies a voltage of 0V after the discharged droplet passes the third electrode.
  • the inkjet printhead may further include a fourth electrode disposed beneath the third electrode, surrounded with an insulating layer, and disposed encompassing an outlet having a larger diameter than an opening of the nozzle; and a third voltage controller configured to apply voltage to the fourth electrode.
  • voltage applied by the second voltage controller may be synchronized with voltage applied by the third voltage controller.
  • a horizontal distance between the fourth electrode and the nozzle may be longer than a horizontal distance between the third electrode and the nozzle.
  • the plurality of nozzles may be arranged in a matrix, and the third electrodes arranged in one of a row direction and a column direction may be electrically connected to simultaneously receive voltage from the second voltage controller, and the fourth electrodes arranged in the other one of the row direction and the column direction may be electrically connected to simultaneously receive voltage from the third voltage controller.
  • the first voltage controller may apply the same pulse voltage to the piezoelectric actuators respectively corresponding to the membranes, and the second voltage controller may apply different voltages to the third electrodes according to the nozzles to make droplets discharged from the nozzles be uniform in size.
  • the fourth voltage controller may apply voltage, which has an opposite polarity to the voltage of the second voltage controller, to the fifth electrode, or may serve as the ground.
  • the pulse voltage applied by the first voltage controller may be synchronized with the pulse voltage applied by the fourth voltage controller, so that electrostatic force based on potential difference between the first electrode and the fifth electrode can reinforce the oscillation of the membrane.
  • the third electrodes may be formed as a single body for a plurality of nozzles.
  • FIG. 1 is a cross-sectional view of an inkjet printhead not according to the claims
  • FIG. 2 is a view showing an operation of a membrane based on a piezoelectric body of FIG. 1 .
  • An inkjet printhead may include a first layer 110, a second layer 120, a third layer 130, a piezoelectric actuator 140, a first voltage controller 145, an electrode (i.e., a third electrode 152) for electrohydrodynamic jetting, and a second voltage controller 155.
  • the first layer (hereinafter, referred to as a chamber layer) 110 may be formed with an inlet 111 into which ink is introduced from the outside, and a plurality of membranes 115 which oscillates by the piezoelectric actuator 140.
  • the inlet 111 is formed to vertically penetrate a substrate, which forming the chamber layer 110, at a predetermined position, and the substrate is formed with the thin membrane 115 having a predetermined thickness.
  • the inlet 111 refers to an opening through which ink stored in an ink storage tank (not shown) flows into the inside of the printhead.
  • a chamber 112 may be formed as recessed inward on the bottom of the substrate, and filled with the ink supplied through the inlet 111, and the membrane 115 may be formed above the chamber 112.
  • a plurality of chambers 112 are spaced apart from each other in a direction perpendicular to FIG. 1 , and thus the chamber 112 and the membrane 115 are formed corresponding to each of a plurality of nozzles 131.
  • a first electrode 141, a piezoelectric body 142 on the first electrode 141, and a second electrode 143 on the piezoelectric body 142, which form the piezoelectric actuator 140, may be stacked in sequence. Further, a pulse voltage may be applied between the first electrode 141 and the second electrode 143 through the first voltage controller 145.
  • the first electrode 141 serves as a common electrode
  • the second electrode 143 serves as a driving electrode for applying the pulse voltage to the piezoelectric body 142. Therefore, a plurality of second electrodes 143 may be individually disposed with regard to the plurality of nozzles 131.
  • the piezoelectric body 142 may contain a predetermined piezoelectric material, for example, a piezoelectric transducer (PZT).
  • the second electrode 143 on the piezoelectric body 142 is formed as the common electrode, and a plurality of first electrodes 141 beneath the piezoelectric body 142 are disposed corresponding to the plurality of nozzles 131, thereby applying the pulse voltage.
  • the membrane 115 may be transformed up and down by the operation of the piezoelectric body 142.
  • the membrane 115 serves as a vibrating plate that generates pressure waves in the chamber 112 based on the transformation of the membrane 115.
  • the voltage applied by the first voltage controller 145 may be a pulse voltage in which a positive voltage or a negative voltage is periodically generated having a predetermined amplitude. Further, the voltage applied by the first voltage controller 145 may be a pulse voltage in which a positive voltage and a negative voltage are periodically generated having a predetermined amplitude. In addition, the voltage applied by the first voltage controller 145 may be an alternative current (AC) voltage having a predetermined waveform such as a sine wave, a triangular wave, and so on.
  • AC alternative current
  • the second layer (hereinafter, referred to as a channel layer) 120 is disposed beneath the chamber layer 110, and may include a manifold 121 formed penetrating a substrate having a predetermined thickness and communicating with the inlet 111, and a plurality of nozzle channels 122 formed penetrating the substrate and allowing the ink to flow from a first side of the manifold 121.
  • a restrictor 113 is formed below a first side of the chamber 112 to communicate with the manifold 121 and communicates with the nozzle channel 122 below a second side of the chamber 112.
  • the ink flowing from the outside into the chamber layer 110 through the inlet 111 is stored in the space of the manifold 121 formed together with the top of the nozzle layer 130, and the ink stored in the manifold 121 is transferred to each chamber 112 via the restrictor 113 and then transferred to the nozzle channel 122.
  • the nozzle channel 122 is disposed between the chamber 112 of the chamber layer 110 and the nozzle 131 of the nozzle layer 130.
  • the restrictor 113 serves to restrict the pressure waves traveling toward the nozzle and traveling toward the manifold 121 due to the transformation of the piezoelectric body 142.
  • the cross-sectional area of the restrictor 113 may be equal to or smaller than the cross-sectional area of the nozzle channel 122.
  • the manifold 121 penetrates the substrate and forms a space, in which the ink is stored, together with the top of the third layer 130.
  • the manifold may be recessed on the top of the substrate at a predetermined depth without penetrating the substrate.
  • the third layer (hereinafter, referred to as the nozzle layer 130) is disposed beneath the channel layer 120, and includes the plurality of nozzles 131 formed on a substrate having a predetermined thickness and communicating with the nozzle channel 122. Through the nozzle 131, the ink may be discharged forming a droplet toward a printing medium (not shown) put under the nozzle 131.
  • the nozzle 131 is formed penetrating the nozzle layer 130.
  • the nozzle 131 having a relatively small diameter may be formed in an upper portion, and an outlet 154 having a relatively large diameter may be formed in a lower portion. Therefore, openings are formed with stepped increase in diameter downward while penetrating the nozzle layer 130.
  • a meniscus may be formed at not the end of the outlet 154 but the end of the nozzle 131 due to the operation of the piezoelectric actuator 140.
  • a plurality of third electrodes 152 may be formed being surrounded with an insulating layer 151.
  • the third electrode 152 may be formed in every nozzle 131.
  • the third electrode 152 may have various shapes such as a circular shape, a horseshoe shape, a quadrangular shape, a diamond shape, etc.
  • the third electrode 152 may be shaped to surround all or some of the nozzles 131.
  • the third electrodes 152 formed in the nozzles 131 may be formed not separately but integrally.
  • the third electrodes 152 are formed for the nozzles 131, and a connecting structure is formed for connection between adjacent third electrodes 152, thereby forming the third electrodes 152 as a single body.
  • the third electrodes 152 may be individually formed being respectively separated from the nozzles 131.
  • the third electrode 152 surrounded with the insulating layer 151 may be disposed beneath the bottom of the nozzle layer 130 in such a way that a first insulating layer is formed beneath the bottom of the nozzle layer 130, the third electrode 152 is formed beneath the first insulating layer, and a second insulating layer is formed beneath the third electrode 152.
  • the third electrode 152 may be disposed directly under the nozzle layer 130 because the glass wafer is an insulating material, and the insulating layer 151 may be formed beneath the third electrode 152.
  • the insulating layer may be formed not only beneath the bottom of the nozzle layer 130 but also on the inner surfaces of the outlet 154 and the nozzle 131.
  • the piezoelectric body 142 operates to oscillate the membrane 115 up and down.
  • the oscillation of the membrane 115 transfers a pressure wave to the nozzle channel 122, so that a concave or convex meniscus can be formed at the end of the nozzle 131 by negative pressure or positive pressure of the pressure wave.
  • the vertical distance between the third electrode 152 and the end of the nozzle 131 is much shorter than the distance between the printhead and the printing medium. Therefore, a strong electric field is locally formed around the nozzle 131 by not the distance between the printhead and the printing medium but the third electrode 152.
  • the fifth electrode 171 according to the third embodiment may be additionally provided.
  • the fifth electrode 171 coated with the insulating layer 170 may be additionally disposed on the channel layer 120. Therefore, the insulating layer 170 may be disposed between the chamber layer 110 and the channel layer 120.
  • the fourth voltage controller 175 applies voltage to the fifth electrode 171.
  • the force of the pressure wave based on the oscillation of the piezoelectric body 142 by the first voltage controller 145 and the piezoelectric actuator 140, the force of induced electrostatic force by the second voltage controller 155 and the third electrode 152, the auxiliary force of the induced electrostatic force by the third voltage controller 157 and the fourth electrode 153, and the force of the pressure wave based on the induced electrostatic force or the electrostatic force by the fourth voltage controller 175 and the fifth electrode 171 are combined to produce the droplet at the end of the nozzle 131 and discharge the droplet while precisely controlling the discharging speed and direction of the droplet.
  • FIG. 12 is a flowchart showing a method of manufacturing an inkjet printhead according to an embodiment of the disclosure
  • FIG. 13 is a view showing a method of manufacturing a chamber layer
  • FIG. 14 is a view showing a method of manufacturing a channel layer
  • FIG. 15 is a view showing a method of manufacturing a nozzle layer.
  • the method of manufacturing the inkjet printhead includes the steps of manufacturing the chamber layer 110 (or a first layer), the channel layer 120 (or a second layer), and the nozzle layer 130 (or a third layer) (S10); joining the chamber layer 110, the channel layer 120, and the nozzle layer 130 (S20); and forming the piezoelectric body 142 and the second electrode 143 of the piezoelectric actuator 140 on the chamber layer 110 (S30).
  • the step of manufacturing the chamber layer 110 is illustrated in FIG. 13 .
  • the chamber layer 110 may be manufactured with a silicon-on-insulator (SOI) wafer S.
  • SOI wafer S The thickness of the SOI wafer S is adjusted to a designed value by a chemical mechanical planarization (CMP) process, and then Si is etched by a photo process and an etching process to process the plurality of chambers 112, thereby forming the membrane 115 on each chamber 112. Further, the inlet 111 is formed to penetrate the SOI wafer S.
  • a lower electrode of the piezoelectric actuator 140 i.e., the first electrode 141 is formed on the chamber layer 110 by using a shadow mask and a sputter.
  • the step of manufacturing the channel layer 120 is illustrated in FIG. 14 .
  • the channel layer 120 may be manufactured with either an Si wafer S or a glass wafer S.
  • the photo process and the etching process may be used like the method of manufacturing the chamber layer 110 when the manifold 121 and the plurality of nozzle channels 122 are formed.
  • the channel layer 120 is manufactured to have a thickness of 400 ⁇ m to 500 ⁇ m.
  • etching may be performed using a sand blast for chemical or physical etching.
  • the induced electrostatic force may be reinforced by adding the fifth electrode 171 surrounded with the insulating layer 170 onto the channel layer 120, and the oscillation of the membrane 115 may be reinforced by the electrostatic force.
  • the fifth electrode 171 may be insulated by a dielectric material.
  • the shadow mask is aligned and the sputter is used to form a metal layer (i.e., the fifth electrode 171).
  • the metal layer is protected with the insulating layer 170 of SiO 2 , so as not to be in direct contact with the ink.
  • the shadow mask and the sputter are directly used to deposit the metal layer because the glass wafer S itself is an insulating material, and then the metal layer is protected by depositing the insulating layer 170 on the entire surface of the metal layer so as not to be in contact with ink.
  • the insulating layer 170 and the fifth electrode 171 may be omitted.
  • the step of manufacturing the nozzle layer 130 is illustrated in FIG. 15 .
  • the method of manufacturing the nozzle layer 130 is similar to the method of manufacturing the chamber layer 110.
  • the nozzle layer 130 may be manufactured with a Si wafer S. For more precis manufacturing, an SOI wafer S may be used. A glass wafer may also be used.
  • the nozzle layer 130 may be manufactured to have a thickness of 200 ⁇ m to 400 ⁇ m.
  • the photo process and the etching process are used to form a channel for the nozzle 131.
  • the outlet 154 is formed by applying the photo process and the etching process to the bottom of the wafer S.
  • the size of nozzle 131 may be varied depending on the size of droplets to be discharged.
  • the nozzle 131 may have a diameter of 10 ⁇ m or less. To discharge large droplets, the nozzle 131 may have a diameter of 50 ⁇ m or more.
  • the bottom of the nozzle layer 130 may be protected with the insulating layer 151.
  • SiO 2 may be deposited on the bottom of the nozzle layer 130.
  • the insulating layer 151 may be formed encompassing the inside of the outlet 154 and the inside of the nozzle 131.
  • the third electrode 152 for forming the induced electrostatic force may be formed beneath the nozzle layer 130.
  • the third electrode 152 is surrounded with the insulating layer 151 so as not to be in contact with ink.
  • the third electrodes 152 in this case may be integrally formed for the plurality of nozzles 131 or may be individually separated for the nozzles 131.
  • the second voltage controller 155 applies voltage to the third electrode 152, charges are induced in the ink inside the nozzle 131 and thus droplets are discharged through the opening of the nozzle 131 by the electric field around the nozzle 131.
  • DC voltage, DC pulse voltage, or AC voltage may be applied to the third electrode 152.
  • the droplets may be discharged by a process that charges induced in the ink are continuously dissipated and induced again, and this process may be electrically construed as the flow of the induced current.
  • the piezoelectric body 142 When the piezoelectric body 142 is operated by the continuous DC voltage and the pulse applied to the piezoelectric body 142 to discharge droplets, the droplets hit the printing medium while dissipating the induced charges, and it is therefore possible to discharge the droplets.
  • the DC voltage may be lower than or equal to an onset voltage of when the droplet is discharged by only the electrostatic force.
  • the most preferable voltage is the AC voltage.
  • positive and negative charges are alternately generated, it is easier to continuously generate the induced charges.
  • the DC voltage is applied, continuous ink operation is possible as described above without any problems because the induced charges are dissipated and new charges are induced in the ink as the droplets are discharged.
  • the third electrode 152 is formed to surround the nozzle 131 by depositing the electrode layer on the insulating layer 151 formed beneath the nozzle layer 130, and then applying the photo process and the etching process to the deposited electrode layer.
  • the third electrode 152 may have various shapes such as a circular shape, a horseshoe shape, a quadrangular shape, a diamond shape, etc. as long as it can surround all or some of the nozzles 131.
  • the inner diameter of the third electrode 152 may be larger than or equal to the outer diameter of the nozzle 131.
  • the third electrode 152 may be disposed to be surrounded with the insulating layer 151.
  • SiO 2 , SiN x , etc. may be deposited as the insulating layer, and polyimide or the like polymer layer may be deposited.
  • the third electrode 152 may be directly formed beneath the nozzle layer 130 without the insulating layer, and the insulating layer 151 may be formed beneath the third electrode 152, as shown in FIG. 15 .
  • the insulating layer 151 may be formed even inside the outlet 154 and the nozzle 131.
  • the fourth electrode 153 may be additionally formed below the third electrode 152 surrounded with the insulating layer 151, and the insulating layer 151 may be applied below the fourth electrode 153.
  • the hydrophobic coating layer 160 made of hydrophobic material based on a fluoropolymer may be formed beneath the insulating layer 151.
  • the water repellent layer may be formed by a spray coating method, an e-beam evaporator, a sputter or the like vacuum deposition.
  • the hydrophobic coating layer 160 may be formed inward up to a predetermined depth from the end of the nozzle 131. When the hydrophobic coating layer 160 is formed, the hydrophobic coating layer 160 is coated while air is sprayed through the nozzle 131. In this case, the depth, up to which the hydrophobic coating layer 160 is coated on the inside of the nozzle 131, may be controlled according to the speeds of sprayed air.
  • the chamber layer 110, the channel layer 120, the nozzle layer 130 are individually manufactured, and then the chamber layer 110, the channel layer 120, and the nozzle layer 130 are jointed together.
  • the chamber layer 110 and the channel layer 120 are joined by anodic bonding, and then the nozzle layer 130 is joined beneath the channel layer 120 by anodic bonding.
  • both the two layers to be joined are manufactured with the silicon wafer, they may be joined by direct bonding. Further, when the channel layer 120 is manufactured with the glass wafer, the anodic bonding may be used. When the channel layer 120 is manufactured with the Si wafer, Si direct bonding may be used.
  • the lower electrode (i.e., the first electrode 141) of the piezoelectric actuator 140 is formed on the completed device.
  • the piezoelectric body 142 is formed on the first electrode 141, and the second electrode 143 is deposited on the piezoelectric body 142, thereby completing the piezoelectric actuator 140.
  • the piezoelectric body 142 may be fixed as a bulk piezoelectric body 142 onto the membrane 115 of the chamber layer 110 by bonding.
  • the sputter may be used to deposit the piezoelectric body 142, and then the photo and etching processes may be performed.
  • screen printing or the like printing method may be used to apply a material of the piezoelectric body 142, thereby forming the layer of the piezoelectric body 142.

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (14)

  1. Tête d'impression à jet d'encre, caractérisée en ce qu'elle comprend :
    une première couche (110) comprenant une entrée (111) formée pour pénétrer dans un substrat et introduire de l'encre dans celui-ci, une pluralité de membranes (115), et une pluralité de chambres (112) formées en dessous correspondant à chacune de la pluralité de membranes (115) ;
    une deuxième couche (120) disposée sous la première couche (110), et comprenant un collecteur (121) formé pour pénétrer dans un substrat ou pour être en retrait sur un dessus du substrat pour communiquer avec l'entrée (111), et une pluralité de canaux de buses (122) formés pour pénétrer dans le substrat sous la membrane (115) et permettre à l'encre transférée du collecteur (121) de s'écouler dans celui-ci ;
    une troisième couche (130) disposée sous la deuxième couche (120) et comprenant une pluralité de buses (131) formées dans un substrat et communiquant avec la pluralité de canaux de buses (122) ;
    une pluralité d'actionneurs piézoélectriques (140) formés correspondant à chacune de la pluralité de membranes (115) sur la première couche (110) formée avec les membranes (115), et comprenant une première électrode (141) inférieure, un corps piézoélectrique (142) sur la première électrode (141), et une seconde électrode (143) sur le corps piézoélectrique (142) ;
    un premier régulateur de tension (145) configuré pour faire osciller la membrane (115) en appliquant une tension d'impulsion à la première électrode (141) et à la deuxième électrode (143) ;
    une pluralité de troisièmes électrodes (152) disposées sous la troisième couche (130), formées autour de chaque buse (131), et entourées d'un isolant ;
    un deuxième régulateur de tension (155) configuré pour décharger des gouttelettes de l'encre en fonction d'une force électrique induite en appliquant une tension à la troisième électrode (152)
    une cinquième électrode (171) disposée entre la première couche (110) et la deuxième couche (120) et entourée d'une couche isolante (170) ; et
    un quatrième régulateur de tension (175) configuré pour appliquer une tension à la cinquième électrode (171).
  2. Tête d'impression à jet d'encre selon la revendication 1, dans laquelle la chambre (112) est formée en retrait vers l'intérieur à partir d'un fond de celle-ci pour stocker l'encre et formée avec la membrane (115) au-dessus d'un dessus de celle-ci,
    la chambre (112) communique avec le collecteur (120) au niveau d'un premier côté et communique avec le canal de buse (122) au niveau d'un second côté.
  3. Tête d'impression à jet d'encre selon la revendication 1, comprenant en outre une couche de revêtement hydrophobe (160) disposée sous une couche isolante (151) formée par l'isolant et revêtue d'un matériau hydrophobe.
  4. Tête d'impression à jet d'encre selon la revendication 3, dans laquelle la couche de revêtement hydrophobe (160) est revêtue d'une extrémité de la buse (131) jusqu'à un intérieur de la buse (131).
  5. Tête d'impression à jet d'encre selon la revendication 1, dans laquelle une tension appliquée par le premier régulateur de tension (145) est synchronisée avec une tension appliquée par le deuxième régulateur de tension (155).
  6. Tête d'impression à jet d'encre selon la revendication 5, dans lequel
    le deuxième régulateur de tension (155) applique une tension à la troisième électrode (152) pour décharger une gouttelette lorsqu'un ménisque est formé au niveau d'une extrémité de la buse (131) alors que le premier régulateur de tension (145) applique une tension d'impulsion entre la première électrode (141) et la deuxième électrode (143) pour que l'actionneur piézoélectrique (140) fasse osciller la membrane (115), et
    le deuxième régulateur de tension (155) applique une tension ayant une polarité opposée à une tension de décharge à la troisième électrode (152) ou applique une tension de 0 V à la troisième électrode (152) après que la gouttelette déchargée passe la troisième électrode (152).
  7. Tête d'impression à jet d'encre selon la revendication 1, comprenant en outre :
    une quatrième électrode (153) disposée sous la troisième électrode (152), entourée d'une couche isolante (151), et disposée englobant une sortie (154) ayant un diamètre supérieur à une ouverture de la buse (131) ; et
    un troisième contrôleur de tension (157) configuré pour appliquer une tension à la quatrième électrode (153).
  8. Tête d'impression à jet d'encre selon la revendication 7, dans laquelle une tension appliquée par le deuxième régulateur de tension (155) est synchronisée avec une tension appliquée par le troisième régulateur de tension (157).
  9. Tête d'impression à jet d'encre selon la revendication 7, dans laquelle une distance horizontale entre la quatrième électrode (153) et la buse (131) est plus longue qu'une distance horizontale entre la troisième électrode (152) et la buse (131).
  10. Tête d'impression à jet d'encre selon la revendication 7, dans lequel
    la pluralité de buses (131) sont agencées dans une matrice, et les troisièmes électrodes (152) agencées dans l'une parmi une direction de lignes et une direction de colonnes sont connectées électriquement pour recevoir simultanément une tension du deuxième régulateur de tension (155), et
    les quatrièmes électrodes (153) agencées dans l'autre parmi la direction de lignes et la direction de colonnes sont connectées électriquement pour recevoir simultanément une tension du troisième régulateur de tension (157).
  11. Tête d'impression à jet d'encre selon la revendication 1, dans lequel
    le premier régulateur de tension (145) est configuré pour appliquer la même tension d'impulsion aux actionneurs piézoélectriques (140) correspondant respectivement aux membranes (115), et
    le deuxième régulateur de tension (155) est configuré pour appliquer des tensions différentes aux troisièmes électrodes (152) selon les buses (131) pour que les gouttelettes déchargées à partir des buses (131) soient de taille uniforme.
  12. Tête d'impression à jet d'encre selon la revendication 1, dans laquelle le quatrième régulateur de tension (175) est configuré pour appliquer une tension, qui a une polarité opposée à la tension du deuxième régulateur de tension (155), à la cinquième électrode (171), ou sert de masse.
  13. Tête d'impression à jet d'encre selon la revendication 1, dans laquelle la tension d'impulsion appliquée par le premier régulateur de tension (145) est configurée pour être synchronisée avec la tension d'impulsion appliquée par le quatrième régulateur de tension (175), de sorte que la force électrostatique fonction d'une différence de potentiel entre la première électrode (141) et la cinquième électrode (171) peut renforcer l'oscillation de la membrane (115).
  14. Tête d'impression à jet d'encre selon la revendication 1, dans laquelle les troisièmes électrodes pour la pluralité de buses sont formées d'un seul tenant.
EP23151377.1A 2022-03-10 2023-01-12 Tête d'impression à injection et son procédé de fabrication Active EP4241995B1 (fr)

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KR20220029786 2022-03-10
EP22164164 2022-03-24
KR1020220169557A KR102826101B1 (ko) 2022-03-10 2022-12-07 잉크젯 프린트헤드 및 상기 프린트헤드의 제작방법

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EP4241995B1 true EP4241995B1 (fr) 2025-07-23
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Publication number Priority date Publication date Assignee Title
US7744199B2 (en) * 2006-09-27 2010-06-29 Samsung Electro-Mechanics Co., Ltd. Ink-jetting apparatus and ink-jetting method
KR100917279B1 (ko) 2009-01-14 2009-09-16 건국대학교 산학협력단 액적분사장치
KR101678670B1 (ko) * 2010-01-22 2016-12-07 삼성전자주식회사 박막트랜지스터 및 어레이 박막트랜지스터의 제조방법
KR101975928B1 (ko) * 2011-09-08 2019-05-09 삼성전자주식회사 프린팅 장치

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