EP4245631A4 - Überkopftransportfahrzeug - Google Patents

Überkopftransportfahrzeug Download PDF

Info

Publication number
EP4245631A4
EP4245631A4 EP21891527.0A EP21891527A EP4245631A4 EP 4245631 A4 EP4245631 A4 EP 4245631A4 EP 21891527 A EP21891527 A EP 21891527A EP 4245631 A4 EP4245631 A4 EP 4245631A4
Authority
EP
European Patent Office
Prior art keywords
transport vehicle
air transport
air
vehicle
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21891527.0A
Other languages
English (en)
French (fr)
Other versions
EP4245631A1 (de
Inventor
Makoto Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of EP4245631A1 publication Critical patent/EP4245631A1/de
Publication of EP4245631A4 publication Critical patent/EP4245631A4/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Vibration Prevention Devices (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Vehicle Step Arrangements And Article Storage (AREA)
  • Harvester Elements (AREA)
EP21891527.0A 2020-11-10 2021-10-04 Überkopftransportfahrzeug Pending EP4245631A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020187426 2020-11-10
PCT/JP2021/036619 WO2022102280A1 (ja) 2020-11-10 2021-10-04 天井搬送車

Publications (2)

Publication Number Publication Date
EP4245631A1 EP4245631A1 (de) 2023-09-20
EP4245631A4 true EP4245631A4 (de) 2024-12-18

Family

ID=81601111

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21891527.0A Pending EP4245631A4 (de) 2020-11-10 2021-10-04 Überkopftransportfahrzeug

Country Status (8)

Country Link
US (1) US12428225B2 (de)
EP (1) EP4245631A4 (de)
JP (1) JP7323080B2 (de)
KR (1) KR102720414B1 (de)
CN (1) CN116368054B (de)
IL (1) IL302545B2 (de)
TW (1) TWI877424B (de)
WO (1) WO2022102280A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023281827A1 (ja) * 2021-07-08 2023-01-12 村田機械株式会社 天井搬送車
JP7480797B2 (ja) * 2022-03-14 2024-05-10 村田機械株式会社 天井搬送車システム
JP2024150068A (ja) * 2023-04-10 2024-10-23 株式会社ダイフク 搬送車

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020174809A1 (ja) * 2019-02-25 2020-09-03 村田機械株式会社 天井搬送車
EP4029809A1 (de) * 2019-09-13 2022-07-20 Murata Machinery, Ltd. Deckentransportfahrzeug

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3601228A (en) * 1968-05-22 1971-08-24 Univ Dayton Resonant-beam/tuned damper
US5178357A (en) * 1989-08-16 1993-01-12 Platus David L Vibration isolation system
US20060179729A1 (en) * 2003-11-21 2006-08-17 Feng Li Shock absorbing support system
JP4075002B2 (ja) * 2004-06-28 2008-04-16 村田機械株式会社 天井走行車
JP4911045B2 (ja) * 2008-01-21 2012-04-04 ムラテックオートメーション株式会社 被搬送物及び防振機構
EP2444690B1 (de) * 2010-10-19 2018-05-02 Jaguar Land Rover Limited Schwingungsdämpfer eines Fahrzeugs und Verfahren zur Schwingungsreduzierung
KR101479941B1 (ko) * 2013-06-24 2015-01-13 주식회사 에스에프에이 반송대차
JP6327124B2 (ja) * 2014-11-12 2018-05-23 株式会社ダイフク 物品搬送車
JP6344410B2 (ja) * 2016-02-19 2018-06-20 村田機械株式会社 天井搬送車
KR102165435B1 (ko) * 2016-10-25 2020-10-14 무라다기카이가부시끼가이샤 천장 반송차
WO2019146276A1 (ja) * 2018-01-24 2019-08-01 村田機械株式会社 搬送車
JP6835039B2 (ja) * 2018-06-19 2021-02-24 株式会社ダイフク 物品搬送体
JP7131696B2 (ja) * 2019-04-24 2022-09-06 村田機械株式会社 緩衝装置、スタッカクレーン、搬送システム及び緩衝装置用治具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020174809A1 (ja) * 2019-02-25 2020-09-03 村田機械株式会社 天井搬送車
US20220157630A1 (en) * 2019-02-25 2022-05-19 Murata Machinery, Ltd. Ceiling transport vehicle
EP4029809A1 (de) * 2019-09-13 2022-07-20 Murata Machinery, Ltd. Deckentransportfahrzeug

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022102280A1 *

Also Published As

Publication number Publication date
US20240002148A1 (en) 2024-01-04
CN116368054B (zh) 2025-08-05
EP4245631A1 (de) 2023-09-20
IL302545B2 (en) 2026-05-01
TWI877424B (zh) 2025-03-21
IL302545A (en) 2023-07-01
US12428225B2 (en) 2025-09-30
IL302545B1 (en) 2026-01-01
CN116368054A (zh) 2023-06-30
JPWO2022102280A1 (de) 2022-05-19
JP7323080B2 (ja) 2023-08-08
TW202225060A (zh) 2022-07-01
WO2022102280A1 (ja) 2022-05-19
KR20230078765A (ko) 2023-06-02
KR102720414B1 (ko) 2024-10-22

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Effective date: 20230517

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DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20241118

RIC1 Information provided on ipc code assigned before grant

Ipc: H01L 21/677 20060101ALI20241112BHEP

Ipc: B65G 1/04 20060101ALI20241112BHEP

Ipc: B61B 3/02 20060101AFI20241112BHEP