EP4247006A3 - Transducteur acoustique micromécanique - Google Patents

Transducteur acoustique micromécanique Download PDF

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Publication number
EP4247006A3
EP4247006A3 EP23189034.4A EP23189034A EP4247006A3 EP 4247006 A3 EP4247006 A3 EP 4247006A3 EP 23189034 A EP23189034 A EP 23189034A EP 4247006 A3 EP4247006 A3 EP 4247006A3
Authority
EP
European Patent Office
Prior art keywords
bending transducer
free end
transducer
acoustic transducer
bending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP23189034.4A
Other languages
German (de)
English (en)
Other versions
EP4247006A2 (fr
EP4247006B1 (fr
Inventor
Fabian STOPPEL
Bernhard Wagner
Shanshan Gu-Stoppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP4247006A2 publication Critical patent/EP4247006A2/fr
Publication of EP4247006A3 publication Critical patent/EP4247006A3/fr
Application granted granted Critical
Publication of EP4247006B1 publication Critical patent/EP4247006B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/26—Damping by means acting directly on free portion of diaphragm or cone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2440/00—Bending wave transducers covered by H04R, not provided for in its groups
    • H04R2440/01—Acoustic transducers using travelling bending waves to generate or detect sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10—General applications
    • H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Pressure Sensors (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
EP23189034.4A 2017-05-26 2018-05-28 Transducteur acoustique micromécanique Active EP4247006B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017208911.3A DE102017208911A1 (de) 2017-05-26 2017-05-26 Mikromechanischer Schallwandler
EP18729366.7A EP3632135B1 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique
PCT/EP2018/063961 WO2018215669A2 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP18729366.7A Division EP3632135B1 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique

Publications (3)

Publication Number Publication Date
EP4247006A2 EP4247006A2 (fr) 2023-09-20
EP4247006A3 true EP4247006A3 (fr) 2023-12-27
EP4247006B1 EP4247006B1 (fr) 2026-04-01

Family

ID=62530200

Family Applications (3)

Application Number Title Priority Date Filing Date
EP23189032.8A Pending EP4247005A3 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique
EP18729366.7A Active EP3632135B1 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique
EP23189034.4A Active EP4247006B1 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP23189032.8A Pending EP4247005A3 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique
EP18729366.7A Active EP3632135B1 (fr) 2017-05-26 2018-05-28 Transducteur acoustique micromécanique

Country Status (6)

Country Link
US (1) US11350217B2 (fr)
EP (3) EP4247005A3 (fr)
JP (2) JP7303121B2 (fr)
CN (2) CN111034223A (fr)
DE (1) DE102017208911A1 (fr)
WO (1) WO2018215669A2 (fr)

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JP7522541B2 (ja) * 2019-07-12 2024-07-25 日清紡マイクロデバイス株式会社 圧電素子
US11042346B2 (en) * 2019-07-30 2021-06-22 International Business Machines Corporation Artificial cochlea
DE102019218769A1 (de) * 2019-12-03 2020-11-19 Robert Bosch Gmbh Mikromechanisches Bauteil für eine Aktor- und/oder Sensorvorrichtung
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EP3632135B1 (fr) 2023-08-02
EP4247005A2 (fr) 2023-09-20
EP4247006A2 (fr) 2023-09-20
JP2023029908A (ja) 2023-03-07
US20200100033A1 (en) 2020-03-26
EP3632135A2 (fr) 2020-04-08
JP2020522178A (ja) 2020-07-27
US11350217B2 (en) 2022-05-31
WO2018215669A3 (fr) 2019-01-24
CN111034223A (zh) 2020-04-17
DE102017208911A1 (de) 2018-11-29
WO2018215669A2 (fr) 2018-11-29
EP4247006B1 (fr) 2026-04-01
EP4247005A3 (fr) 2023-12-06
JP7303121B2 (ja) 2023-07-04
CN116668926A (zh) 2023-08-29

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