EP4396526A1 - Dispositif de mesure, système d'usinage et procédé de réglage d'un dispositif de mesure - Google Patents

Dispositif de mesure, système d'usinage et procédé de réglage d'un dispositif de mesure

Info

Publication number
EP4396526A1
EP4396526A1 EP22769970.9A EP22769970A EP4396526A1 EP 4396526 A1 EP4396526 A1 EP 4396526A1 EP 22769970 A EP22769970 A EP 22769970A EP 4396526 A1 EP4396526 A1 EP 4396526A1
Authority
EP
European Patent Office
Prior art keywords
measuring
arm
optical
section
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22769970.9A
Other languages
German (de)
English (en)
Inventor
Eckhard Lessmüller
Christian Truckenbrodt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lessmueller Lasertechnik GmbH
Original Assignee
Lessmueller Lasertechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lessmueller Lasertechnik GmbH filed Critical Lessmueller Lasertechnik GmbH
Publication of EP4396526A1 publication Critical patent/EP4396526A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/02031—With non-optical systems, e.g. tactile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence

Definitions

  • the invention relates to a measuring device for a processing system for processing a workpiece using a high-energy processing beam, an interchangeable module for such a measuring device, a system with at least two different interchangeable modules, a processing system for processing a workpiece using a high-energy processing beam, and a method for adjusting a measuring device.
  • Measuring devices are known from the prior art, by means of which optical coherence tomography measurements can be carried out during the processing of a workpiece.
  • a common abbreviation for optical coherence tomography is OCT, in which a measuring beam from the measuring device is coupled into a processing beam such as a high-energy laser. The measuring beam thus runs in a measuring arm.
  • a reference beam is used, which is obtained by dividing a source beam into a measuring beam and a reference beam. The reference beam runs in a reference arm, which essentially replicates the optical properties of the measuring arm, especially with regard to its optical path length.
  • the optical path length of the measuring arm can vary. If changes are made to the optical path of the processing beam and thus the measuring beam, the reference arm must be adjusted accordingly. In principle, optical components of the reference arm can be adjusted or changed for this, but this requires work to be carried out directly on the measurement setup. A readjustment or recalibration of the optical components is then regularly required.
  • DE 10 2013 008 269 A1 discloses a device in which several optical fibers of different lengths are installed, which define channels of different lengths, between which it is possible to switch automatically.
  • a reference arm is known from DE 10 2015 015 112 A1, which has a compensating section that simulates the optical path of the measuring beam. This is formed by a fiber that is installed in the measuring device.
  • a similar piece of fiber as part of a reference arm that is built into a measuring device is also known from DE 10 2017 218 494 A1.
  • reference arms with an automatically adjustable length there are reference arms with an automatically adjustable length in the prior art.
  • a corresponding device is known, for example, from DE 10 2019 001858 B3.
  • the reference arm can be adapted to changes in the length of the measuring arm.
  • changes in length that go beyond this also require modifications to be made to the device.
  • a measuring device If a measuring device is put into operation in a specific processing system, for example a customer's production line, manual adjustments to the optical system are required for all known measuring devices, which must be carried out individually.
  • Optical components used for this purpose are often custom-made, and they have to be matched to each other differently depending on the individual case. This can be costly, requires a high level of skill to build, and leaves room for human error that can arise from improper selection of appropriate components.
  • the object of the present invention is to adapt a measuring arm and a reference arm to one another in a reliable and cost-effective manner.
  • a measuring device can be a measuring device, preferably an OCT measuring device, for a processing system for processing a workpiece by means of a high-energy processing beam, in particular by means of a processing laser.
  • the measuring device includes a Beam generation unit that is set up to generate a measurement beam and a reference beam that can be made to interfere in order to carry out optical interference measurements such as optical coherence tomography, ie can be interfered with and/or are made to interfere. In other words, this can include the measuring beam and the reference beam interfering with one another in a controlled manner.
  • the measuring device comprises a measuring arm which is optically connected to the beam generation unit and in which the measuring beam is guided optically, so that it can be and/or is projected onto a measuring object such as the workpiece.
  • the measuring device includes a reference arm which is optically connected to the beam generation unit and in which the reference beam is guided optically.
  • the measuring device comprises a measuring interface, for example a camera interface, via which the measuring beam can be and/or is coupled into the processing beam.
  • the measuring device is characterized in particular by the fact that it comprises a base module and an exchangeable module which can be connected or is connected to it.
  • the base module comprises an initial section of the reference arm, which is connected to the beam generation unit and comprises optical components for guiding the reference beam; and an end portion of the reference arm comprising optical components for guiding the reference beam including a reflector at which the reference beam is reflected and returned to the beam generating unit once it has passed through the reference arm.
  • the interchangeable module also includes a beam guidance section, which includes optical components for guiding the reference beam and which is set up to form a middle section of the reference arm by optically connecting the start section of the reference arm to the end section of the reference arm when the interchangeable module is connected to the base module .
  • a beam guidance section which includes optical components for guiding the reference beam and which is set up to form a middle section of the reference arm by optically connecting the start section of the reference arm to the end section of the reference arm when the interchangeable module is connected to the base module .
  • the measuring device is characterized in particular by the fact that the base module includes a first section of the measuring arm, which is connected to the beam generation unit and includes optical components for guiding the measuring beam, and a second section of the measuring arm, which includes optical components for guiding the Measuring beam includes.
  • the interchangeable module includes a beam guidance section, which includes optical components for guiding the measurement beam and the is set up to form a middle section of the measuring arm by optically connecting the first section of the measuring arm to the second section of the measuring arm when the interchangeable module is connected to the base module.
  • the invention also relates to an exchangeable module for a measuring device according to the invention.
  • this measuring device comprises a beam generation unit which is set up to generate a measuring beam and a reference beam which can be brought to interference in order to carry out optical coherence tomography, a measuring arm which is optically connected to the beam generating unit and in which the measuring beam is optically guided so that it is directed onto a
  • the object to be measured such as the workpiece, can be projected, and comprises a reference arm that is optically connected to the beam generation unit and in which the reference beam is optically guided, the reference arm having a starting section and an end section that can be optically connected to one another by an interchangeable module, in particular according to the invention, which defines a middle section of the reference arm.
  • the measuring arm has a first section and a second section, which can be optically connected to one another by an interchangeable module, in particular
  • the method includes setting (manufacturing/setting up/adjusting) an optical property of the reference arm.
  • the method also includes selecting an interchangeable module from a group of interchangeable modules that define central sections with different optical properties.
  • the method also includes adapting an optical property of the measuring arm to the set optical property of the reference arm by connecting the selected interchangeable module to the first section and the second section of the measuring arm.
  • the features according to the invention make it possible to reliably adapt a reference arm to a measurement arm.
  • the reference arm and measuring arm can be reliably and easily adjusted to one another.
  • Large optical path differences can also be compensated for by selecting an interchangeable module with a correspondingly long or short beam guidance section.
  • a high degree of cost efficiency can be achieved. Due to the fact that the reference arm and/or the measuring arm is/are formed by means of a module, individual adjustments are required to a small extent at best. Identical parts can also be used. If measuring devices are set up for different customers, different interchangeable modules can be used to enable customer-specific adaptation. This adjustment can be made easily, quickly and with little error-proneness because work inside the measuring device can be avoided.
  • a reference arm length and/or a measuring arm length can instead be changed from the outside without having to manually adjust the optical components inside.
  • a specific measuring device can also be used quickly and easily for different machining situations. For example, if a processing system with significantly different working distances is used, it is possible to switch easily and quickly between interchangeable modules that define center sections of different lengths for the reference arm and/or for the measuring arm.
  • the base module preferably also includes an initial section of the measuring arm, which is connected to the beam generation unit at one end and to the measurement interface at its other end, and optical components includes for guiding the measuring beam. If an interchangeable module is integrated into the measuring arm, the first section, the central section and the second section of the measuring arm can together form the named starting section of the measuring arm.
  • the beam generation unit can be set up to generate short-coherent light, for example white light.
  • the beam generation unit can include a beam source and a beam splitter, with the measuring arm and reference arm preferably starting from the beam splitter.
  • the base module and/or the interchangeable module can be designed as a closed, independent assembly. It goes without saying that a single exchangeable module or multiple exchangeable modules can be present. Any changing of the interchangeable module can in this respect also relate to an assembly of the measuring device during manufacture.
  • a specific base module can be combined with a specific interchangeable module for a specific customer, with the customer not having to change the interchangeable module.
  • the term "exchangeable module” then refers exclusively to the perspective of the manufacturer.
  • a change can also be provided which is carried out by the customer and/or by the customer, for example in order to enable adaptations to changing light paths depending on the processing and/or measurement situation by using a different changeable module in each case.
  • the invention also relates to a system comprising a measuring device according to the invention and at least two different interchangeable modules according to the invention, which have beam guidance sections with different optical path lengths and/or different dispersions.
  • Optical path lengths of different interchangeable modules can differ by at least 5%, at least 10%, at least 25%, at least 50%, at least 100% or even by a multiple, in particular in comparison to the next longer or next shorter optical path length, for example by a factor of 2, a factor of 3, a factor of 5 or a factor of 10.
  • this allows the measuring device to be adapted to changes in the length of the measuring arm by choosing an exchange module that defines a middle section of suitable length.
  • dispersion changes in the measuring arm due to changed settings or Arrangement of components of the measuring arm can be compensated for by choosing an exchangeable module with suitable dispersion.
  • the invention also relates to a processing system for processing a workpiece by means of a high-energy processing beam, in particular by means of a processing laser, which includes a measuring device according to the invention and a processing device that includes a processing beam source and processing beam optics, by means of which the processing beam can be projected and/or focused onto the workpiece and/or projected and/or focused.
  • the measuring beam can be coupled and/or coupled into the processing beam optics in such a way that it can be projected and/or focused onto the workpiece and/or is projected and/or focused.
  • the processing beam source preferably includes a processing laser.
  • the processing device can include an industrial robot and/or it can be partially or completely arranged on an industrial robot.
  • the processing device can include a processing head in which, for example, the processing beam optics can be arranged.
  • the processing head can be carried by an industrial robot.
  • the workpiece can be advanced relative to the processing beam optics, which can be generated by moving the workpiece and/or by moving the processing beam optics or the processing head.
  • the measurement interface can be a partially transparent mirror, for example.
  • the measurement interface can be an optical port via which the measurement beam can be coupled out of the measurement device. This can, for example, be connectable and/or connected to an input port of the processing device, which is formed, for example, on the processing head.
  • the measuring arm comprises, in addition to the initial section, a further section which adjoins the initial section and extends to the workpiece. The measuring arm can, for example, extend from the beam generating unit to the workpiece. The measuring beam can be reflected on the workpiece and thus pass through the measuring arm twice.
  • the reference arm preferably simulates the optical properties of the measuring arm at least essentially, at least with regard to its optical path length and/or with regard to its dispersion.
  • the measuring device can include a control unit.
  • the control unit can generally be set up functions of to control the measuring device. For this purpose, it can have at least one computer-readable medium that stores suitable program code, as well as a processing unit such as a processor for executing instructions of the program code.
  • the control unit can be set up to carry out a software-based dispersion compensation between the measuring arm and the reference arm. In this way, it can be compensated for the fact that the measuring arm and reference arm may include free beam sections of different lengths, fiber sections of different lengths, different optical fibers and/or different other optical components.
  • a simple, stable and reliable attachment to the base module can be achieved in particular when the interchangeable module includes a housing that can be attached to the base module and / or attached, and / or when the base module includes a housing on which the interchangeable module is optionally attachable and / or attached.
  • the housing of the interchangeable module is designed separately from the housing of the base module.
  • the two modules can each be completely enclosed and separable from one another.
  • the optical fiber of the interchangeable module is preferably fixed directly or indirectly to the housing of the interchangeable module, for example wound around a winding body in a controlled manner, which can prevent the optical fiber from moving or deforming.
  • a fine adjustment of the optical path length of the reference arm can be carried out quickly and precisely as required, in particular if the initial section and/or the end section of the reference arm includes a path length adjustment unit, by means of which an optical path length of the initial section and/or the end section of the reference arm can be changed, in particular in an automated manner.
  • the reference arm and/or the measuring arm can include a path length adjustment unit.
  • the path length adjustment unit can include the reflector of the end section, which can be movable, in particular automatically, for this purpose.
  • the method includes a step S4, in which a fine adjustment of an optical path length of the reference arm 26 takes place.
  • the optical path length of the starting section 38 or the end section 42 of the reference arm 26 is set by means of the path length setting unit 74 . If interchangeable modules 32, 32', 32" are provided, the optical path lengths of which differ in stages by no more than the maximum change in path length that the path length setting unit 74 can deliver, any optical path lengths can be achieved without gaps through the combination of interchangeable modules 32, 32', 32" and path length setting unit 74 to be set.
  • FIG. 4 shows a schematic representation of an alternative processing system 12a with a measuring device 10a with a base module 30a and an exchangeable module 32a.
  • the alternative processing system 12a is basically designed analogously to the processing system 12 described above.
  • the reference numbers in FIG. 4 are provided with an “a” after them. With regard to the description of the corresponding components, reference is always made to the above description.
  • the alternative processing system 12a differs from the processing system
  • the reference arm 26a includes a reference arm fiber 35a. This can have a length that corresponds to the greatest possible length of the measuring arm 24a. If the measuring beam 20a is guided over a large distance to the workpiece 14a, an interchangeable module 32a with a short beam guiding section 48a can be used. If the distance to the workpiece 14a is smaller, an interchangeable module 32a with a longer beam guidance section 48a can be used. The length of the measuring arm 24a can thus be adapted to the length of the reference arm 26a.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure (10 ; 10a) pour un système d'usinage (12 ; 12a) destiné à usiner une pièce (14 ; 14a) au moyen d'un faisceau d'usinage (16 ; 16a) à haute énergie, le dispositif de mesure (10 ; 10a) comprenant : une unité de production de faisceau (18 ; 18a), qui est conçue de manière à générer un faisceau de mesure (20 ; 20a) et un faisceau de référence (22 ; 22a), qui peuvent être mis en interférence afin d'effectuer des mesures d'interférence optiques telles que la tomographie par cohérence optique ; un bras de mesure (24 ; 24a) relié optiquement à l'unité de production de faisceau (18 ; 18a), dans lequel le faisceau de mesure (20 ; 20a) est guidé optiquement, afin que celui-ci puisse être projeté sur la pièce (14 ; 14a) ; un bras de référence (26 ; 26a) relié optiquement à l'unité de production de faisceau (18 ; 18a), dans lequel le faisceau de référence (22 ; 22a) est guidé optiquement ; ainsi qu'une interface de mesure (28 ; 28a), par l'intermédiaire de laquelle le faisceau de mesure (29 ; 20a) peut être injecté dans le faisceau d'usinage (16 ; 16a) ; le dispositif de mesure (10 ; 10a) comprenant un module de base (30 ; 30a) et un module interchangeable (32 ; 32a) pouvant être raccordé ou étant raccordé audit module de base. Le module interchangeable (32 ; 32a) comprend une partie de guidage de faisceau (48a), qui comprend des composants optiques (50a) destinés à guider le faisceau de mesure (20a) et/ou le faisceau de référence (22a) et qui est conçue de sorte à former une partie centrale (52 ; 52a) du bras de mesure (24 ; 24a) et/ou du bras de référence (26 ; 26a). L'invention concerne en outre un système comportant un dispositif de mesure (10 ; 10a) et plusieurs modules interchangeables (32, 32', 32''), un système d'usinage (12 ; 12a) et un procédé de réglage d'un dispositif de mesure (10 ; 10a).
EP22769970.9A 2021-08-31 2022-08-30 Dispositif de mesure, système d'usinage et procédé de réglage d'un dispositif de mesure Pending EP4396526A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021122438.1A DE102021122438B3 (de) 2021-08-31 2021-08-31 Messvorrichtung, Bearbeitungssystem und Verfahren zum Einstellen einer Messvorrichtung
PCT/EP2022/074092 WO2023031203A1 (fr) 2021-08-31 2022-08-30 Dispositif de mesure, système d'usinage et procédé de réglage d'un dispositif de mesure

Publications (1)

Publication Number Publication Date
EP4396526A1 true EP4396526A1 (fr) 2024-07-10

Family

ID=83322458

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22769970.9A Pending EP4396526A1 (fr) 2021-08-31 2022-08-30 Dispositif de mesure, système d'usinage et procédé de réglage d'un dispositif de mesure

Country Status (6)

Country Link
US (1) US20250189297A1 (fr)
EP (1) EP4396526A1 (fr)
CN (1) CN117980689A (fr)
CA (1) CA3229992A1 (fr)
DE (1) DE102021122438B3 (fr)
WO (1) WO2023031203A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023115649A1 (de) * 2023-06-15 2024-12-19 Heidelberg Engineering Gmbh Vorrichtung zur Durchführung einer optischen Kohärenztomografie
US20260104246A1 (en) * 2024-10-10 2026-04-16 Wojciech Jan Walecki Polarization-sensitive probe for low coherence interferometer system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070350A (ja) * 2006-08-15 2008-03-27 Fujifilm Corp 光断層画像化装置
PL2972479T3 (pl) 2013-03-13 2021-04-19 Ipg Photonics (Canada) Inc. Sposoby i układy do charakteryzacji właściwości obróbki laserem poprzez pomiar dynamiki kapilary z zastosowaniem interferometrii
DE102013008269C5 (de) 2013-05-15 2019-01-24 Precitec Optronik Gmbh Bearbeitungskopf für eine Laserbearbeitungsvorrichtung
US9377291B2 (en) 2013-12-05 2016-06-28 Bioptigen, Inc. Image registration, averaging, and compounding for high speed extended depth optical coherence tomography
DE102015015112B4 (de) 2015-11-23 2022-02-10 Lessmüller Lasertechnik GmbH Vorrichtung und Verfahren zum Überwachen eines Bearbeitungsprozesses zur Materialbearbeitung mittels eines optischen Messstrahls
DE102017218494B4 (de) 2017-10-17 2024-02-08 Trumpf Laser- Und Systemtechnik Gmbh Bearbeitungsvorrichtung und Verfahren zur insbesondere schweißenden Bearbeitung eines Werkstücks
DE102018110699A1 (de) 2018-05-04 2019-11-07 Deutsches Elektronen-Synchrotron Desy Vorrichtung zur Kompensation einer chromatischen Dispersion eines polarisierten Laserstrahls
DE102019001858B3 (de) 2019-03-14 2020-07-30 Lessmüller Lasertechnik GmbH Messvorrichtung für ein Bearbeitungssystem, Bearbeitungssystem sowie Verfahren zum Überwachen einer Bearbeitung eines Werkstücks
DE102019002942B4 (de) 2019-04-24 2023-08-03 Lessmüller Lasertechnik GmbH Messvorrichtung und Verfahren zur Durchführung optischer Kohärenztomographie mit einem Kohärenztomographen

Also Published As

Publication number Publication date
US20250189297A1 (en) 2025-06-12
WO2023031203A1 (fr) 2023-03-09
CN117980689A (zh) 2024-05-03
CA3229992A1 (fr) 2023-03-09
DE102021122438B3 (de) 2022-12-29

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