EP4459131A3 - Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée - Google Patents

Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée Download PDF

Info

Publication number
EP4459131A3
EP4459131A3 EP24200029.7A EP24200029A EP4459131A3 EP 4459131 A3 EP4459131 A3 EP 4459131A3 EP 24200029 A EP24200029 A EP 24200029A EP 4459131 A3 EP4459131 A3 EP 4459131A3
Authority
EP
European Patent Office
Prior art keywords
pumping mechanism
housing
pumping
partition wall
electric motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24200029.7A
Other languages
German (de)
English (en)
Other versions
EP4459131A2 (fr
Inventor
Maximilian Birkenfeld
Martin Lohse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24200029.7A priority Critical patent/EP4459131A3/fr
Publication of EP4459131A2 publication Critical patent/EP4459131A2/fr
Publication of EP4459131A3 publication Critical patent/EP4459131A3/fr
Priority to JP2025084685A priority patent/JP2026053254A/ja
Priority to CN202510847262.XA priority patent/CN121654605A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP24200029.7A 2024-09-12 2024-09-12 Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée Pending EP4459131A3 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP24200029.7A EP4459131A3 (fr) 2024-09-12 2024-09-12 Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée
JP2025084685A JP2026053254A (ja) 2024-09-12 2025-05-21 シールガス供給が最適化されたターボ分子真空ポンプ
CN202510847262.XA CN121654605A (zh) 2024-09-12 2025-06-24 具有优化的屏蔽气导入结构的涡轮分子真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24200029.7A EP4459131A3 (fr) 2024-09-12 2024-09-12 Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée

Publications (2)

Publication Number Publication Date
EP4459131A2 EP4459131A2 (fr) 2024-11-06
EP4459131A3 true EP4459131A3 (fr) 2025-04-09

Family

ID=92792044

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24200029.7A Pending EP4459131A3 (fr) 2024-09-12 2024-09-12 Pompe à vide turbomoléculaire à alimentation en gaz de barrage optimisée

Country Status (3)

Country Link
EP (1) EP4459131A3 (fr)
JP (1) JP2026053254A (fr)
CN (1) CN121654605A (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
EP4108931A1 (fr) * 2022-09-01 2022-12-28 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire à puissance d'aspiration améliorée, ainsi que procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
EP4108931A1 (fr) * 2022-09-01 2022-12-28 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire à puissance d'aspiration améliorée, ainsi que procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée

Also Published As

Publication number Publication date
EP4459131A2 (fr) 2024-11-06
JP2026053254A (ja) 2026-03-25
CN121654605A (zh) 2026-03-13

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