EP4663959A3 - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
EP4663959A3
EP4663959A3 EP25210475.7A EP25210475A EP4663959A3 EP 4663959 A3 EP4663959 A3 EP 4663959A3 EP 25210475 A EP25210475 A EP 25210475A EP 4663959 A3 EP4663959 A3 EP 4663959A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
housing
outwardly projecting
rotor
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25210475.7A
Other languages
German (de)
English (en)
Other versions
EP4663959A2 (fr
Inventor
Heiko BRÜCK
Martin Lohse
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25210475.7A priority Critical patent/EP4663959A3/fr
Publication of EP4663959A2 publication Critical patent/EP4663959A2/fr
Publication of EP4663959A3 publication Critical patent/EP4663959A3/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5826—Cooling at least part of the working fluid in a heat exchanger
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/20—Heat transfer, e.g. cooling
    • F05D2260/221—Improvement of heat transfer
    • F05D2260/2214—Improvement of heat transfer by increasing the heat transfer surface
    • F05D2260/22141—Improvement of heat transfer by increasing the heat transfer surface using fins or ribs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP25210475.7A 2021-12-30 2021-12-30 Pompe à vide Pending EP4663959A3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25210475.7A EP4663959A3 (fr) 2021-12-30 2021-12-30 Pompe à vide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP25210475.7A EP4663959A3 (fr) 2021-12-30 2021-12-30 Pompe à vide
EP21218345.3A EP4206474B1 (fr) 2021-12-30 2021-12-30 Pompe à vide

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP21218345.3A Division EP4206474B1 (fr) 2021-12-30 2021-12-30 Pompe à vide
EP21218345.3A Division-Into EP4206474B1 (fr) 2021-12-30 2021-12-30 Pompe à vide

Publications (2)

Publication Number Publication Date
EP4663959A2 EP4663959A2 (fr) 2025-12-17
EP4663959A3 true EP4663959A3 (fr) 2026-03-11

Family

ID=79185670

Family Applications (2)

Application Number Title Priority Date Filing Date
EP25210475.7A Pending EP4663959A3 (fr) 2021-12-30 2021-12-30 Pompe à vide
EP21218345.3A Active EP4206474B1 (fr) 2021-12-30 2021-12-30 Pompe à vide

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP21218345.3A Active EP4206474B1 (fr) 2021-12-30 2021-12-30 Pompe à vide

Country Status (1)

Country Link
EP (2) EP4663959A3 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042037A1 (fr) * 2024-08-21 2026-02-26 Trillium Pumps Italy S.P.A. Boîtier de palier pour machines d'exploitation de fluide

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888301A (ja) * 1994-09-19 1996-04-02 Mitsubishi Electric Corp 放熱フィン
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US20080145214A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vacuum pump with a multi-sectional housing
JP2010053770A (ja) * 2008-08-28 2010-03-11 Vacuum Products Kk 並列吸気ポンプ及びそれを用いた真空装置
JP2014105695A (ja) * 2012-11-30 2014-06-09 Shimadzu Corp 真空ポンプ
EP3584442A1 (fr) * 2017-02-17 2019-12-25 Edwards Japan Limited Contrôleur et dispositif de pompe à vide
US20210040949A1 (en) * 2018-03-13 2021-02-11 Nidec Gpm Gmbh Modular System of an Axially Integrated Pump Structure

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0888301A (ja) * 1994-09-19 1996-04-02 Mitsubishi Electric Corp 放熱フィン
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US20080145214A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vacuum pump with a multi-sectional housing
JP2010053770A (ja) * 2008-08-28 2010-03-11 Vacuum Products Kk 並列吸気ポンプ及びそれを用いた真空装置
JP2014105695A (ja) * 2012-11-30 2014-06-09 Shimadzu Corp 真空ポンプ
EP3584442A1 (fr) * 2017-02-17 2019-12-25 Edwards Japan Limited Contrôleur et dispositif de pompe à vide
US20210040949A1 (en) * 2018-03-13 2021-02-11 Nidec Gpm Gmbh Modular System of an Axially Integrated Pump Structure

Also Published As

Publication number Publication date
EP4663959A2 (fr) 2025-12-17
EP4206474A1 (fr) 2023-07-05
EP4206474C0 (fr) 2025-12-03
EP4206474B1 (fr) 2025-12-03

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