ES2049998T3 - Bomba de vacio para vacio molecular limpio. - Google Patents

Bomba de vacio para vacio molecular limpio.

Info

Publication number
ES2049998T3
ES2049998T3 ES91103205T ES91103205T ES2049998T3 ES 2049998 T3 ES2049998 T3 ES 2049998T3 ES 91103205 T ES91103205 T ES 91103205T ES 91103205 T ES91103205 T ES 91103205T ES 2049998 T3 ES2049998 T3 ES 2049998T3
Authority
ES
Spain
Prior art keywords
rotor
vacuum
bearings
magnetic
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91103205T
Other languages
English (en)
Inventor
Guy Lemarquand
Denis Perrillat-Amede
Didier Pierrejean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of ES2049998T3 publication Critical patent/ES2049998T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/041—Passive magnetic bearings with permanent magnets on one part attracting the other part
    • F16C32/0417—Passive magnetic bearings with permanent magnets on one part attracting the other part for axial load mainly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0487—Active magnetic bearings for rotary movement with active support of four degrees of freedom
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

BOMBAS DE VACIO PARA VACIO MOLECULAR PROPIO QUE COMPRENDE UN ESTATOR (1A, 1B) Y UN ROTOR (2), SIENDO ACCIONADO EL ROTOR EN ROTACION POR UN MOTOR IMPULSOR (6, 7, 8) INTEGRADO EN LA BOMBA Y QUE ESTA SOPORTADO POR COJINETES MAGNETICOS, TENIENDO EL ROTOR FORMA DE CAMPANA QUE VIENE A CUBRIR UNA PROTUBERANCIA (3) INTERNA DEL ESTATOR, ESTANDO SITUADOS LOS ELEMENTOS ESTATORICOS (7, 8) DEL MOTOR IMPULSOR Y DICHOS COJINETES (11B, 12B, 13B, 15, 16) EN LA PERIFERIA DE DICHA PROTUBERANCIA (3) INTERNA, ESTANDO SITUADOS LOS ELEMENTOS ROTORICOS (11A, 12A, 13A, 14) DE ESTOS MISMOS ELEMENTOS EN LA PERIFERIA DE DICHO ROTOR (2) EN FORMA DE CAMPANA, CARACTERIZADA POR EL HECHO DE QUE UNA PRIMERA ENVOLTURA (29) DE MATERIAL NO MAGNETICO Y ESTANCO RECUBRE DICHA PROTUBERANCIA (3) POR ENCIMA DE DICHOS ELEMENTOS ESTATORICOS DEL MOTOR Y DE LOS COJINETES, Y POR EL HECHO DE QUE UNA SEGUNDA ENVOLTURA (30) DE MATERIAL NO MAGNETICO Y ESTANCO RECUBRE TAMBIEN EN EL ROTOR, DICHAS PARTES ROTORICAS DEL MOTOR IMPULSOR Y DE DICHOSCOJINETES.
ES91103205T 1990-03-07 1991-03-04 Bomba de vacio para vacio molecular limpio. Expired - Lifetime ES2049998T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9002866A FR2659396B1 (fr) 1990-03-07 1990-03-07 Pompe a vide pour vide moleculaire propre.

Publications (1)

Publication Number Publication Date
ES2049998T3 true ES2049998T3 (es) 1994-05-01

Family

ID=9394465

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91103205T Expired - Lifetime ES2049998T3 (es) 1990-03-07 1991-03-04 Bomba de vacio para vacio molecular limpio.

Country Status (8)

Country Link
US (1) US5106273A (es)
EP (1) EP0445690B1 (es)
JP (1) JP2813488B2 (es)
AT (1) ATE101693T1 (es)
DE (1) DE69101162T2 (es)
ES (1) ES2049998T3 (es)
FR (1) FR2659396B1 (es)
RU (1) RU1831589C (es)

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US5324177A (en) * 1989-05-08 1994-06-28 The Cleveland Clinic Foundation Sealless rotodynamic pump with radially offset rotor
FR2723767B1 (fr) * 1994-08-19 1997-01-03 Cit Alcatel Pompe a vide turbomoleculaire
SE508445C2 (sv) * 1997-01-28 1998-10-05 Magnetal Ab Vakuumpump av höghastighetstyp
US6078120A (en) * 1998-03-10 2000-06-20 Varian, Inc. Vacuum pump with magnetic bearing system, backup bearings and sensors
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
US6416215B1 (en) 1999-12-14 2002-07-09 University Of Kentucky Research Foundation Pumping or mixing system using a levitating magnetic element
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
US6758593B1 (en) 2000-10-09 2004-07-06 Levtech, Inc. Pumping or mixing system using a levitating magnetic element, related system components, and related methods
DE10022062A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
DE10022061A1 (de) 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetlagerung mit Dämpfung
DE10029649C9 (de) 2000-06-15 2008-02-07 Adc Gmbh Verteileranschlußmodul für die Telekommunikations- und Datentechnik
DE10338222A1 (de) * 2003-08-20 2005-03-10 Leybold Vakuum Gmbh Kombinierter Antrieb mit Lagerung
US7682301B2 (en) 2003-09-18 2010-03-23 Thoratec Corporation Rotary blood pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
US20070231135A1 (en) 2006-03-31 2007-10-04 Orqis Medical Corporation Rotary Blood Pump
DE102007044690A1 (de) * 2007-09-19 2009-04-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2292282B1 (en) 2008-06-23 2017-11-15 Thoratec Corporation Blood pump apparatus
US20100109463A1 (en) * 2008-10-31 2010-05-06 University Of Virginia Patent Foundation Hybrid Five Axis Magnetic Bearing System Using Axial Passive PM Bearing Magnet Paths and Radial Active Magnetic Bearings with Permanent Magnet Bias and Related Method
CN102239334B (zh) 2008-12-08 2015-03-04 胸腔科技有限公司 离心式泵装置
JP5378010B2 (ja) 2009-03-05 2013-12-25 ソラテック コーポレーション 遠心式ポンプ装置
CN102341600B (zh) 2009-03-06 2014-12-10 胸腔科技有限公司 离心式泵装置
EP3490122B1 (en) 2009-07-29 2021-01-27 Thoratec Corporation Rotation drive device and centrifugal pump device
JP5443197B2 (ja) 2010-02-16 2014-03-19 ソラテック コーポレーション 遠心式ポンプ装置
WO2011118325A1 (ja) 2010-03-26 2011-09-29 テルモ株式会社 遠心式血液ポンプ装置
CN101852216A (zh) * 2010-05-08 2010-10-06 白银鸿浩化工机械制造有限公司 一种磁力泵的内磁转子生产工艺
JP5681403B2 (ja) 2010-07-12 2015-03-11 ソーラテック コーポレイション 遠心式ポンプ装置
EP3248628B1 (en) 2010-08-20 2019-01-02 Tc1 Llc Implantable blood pump
JP5577506B2 (ja) 2010-09-14 2014-08-27 ソーラテック コーポレイション 遠心式ポンプ装置
TW201221161A (en) 2010-10-13 2012-06-01 Thoratec Corp Pumping blood
EP2693609B1 (en) 2011-03-28 2017-05-03 Thoratec Corporation Rotation and drive device and centrifugal pump device using same
WO2013056131A1 (en) 2011-10-13 2013-04-18 Reichenbach Steven H Pump and method for mixed flow blood pumping
JP6083929B2 (ja) 2012-01-18 2017-02-22 ソーラテック コーポレイション 遠心式ポンプ装置
EP3159023B1 (en) 2012-03-05 2017-11-29 Tc1 Llc Method of calibrating implantable medical pumps
US9492599B2 (en) 2012-08-31 2016-11-15 Thoratec Corporation Hall sensor mounting in an implantable blood pump
WO2014036410A1 (en) 2012-08-31 2014-03-06 Thoratec Corporation Start-up algorithm for an implantable blood pump
DE102012219982A1 (de) * 2012-10-31 2014-04-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN102996399B (zh) * 2012-12-29 2016-03-02 齐力制冷系统(深圳)有限公司 一种超薄压缩机
US9371826B2 (en) 2013-01-24 2016-06-21 Thoratec Corporation Impeller position compensation using field oriented control
DE102013100853A1 (de) * 2013-01-29 2014-07-31 Pfeiffer Vacuum Gmbh Verfahren zum Beschichten und/oder Lackieren von Magnetringen eines Rotor-Magnetlagers, Rotor-Magnetlager sowie Vakuumpumpe
US9556873B2 (en) 2013-02-27 2017-01-31 Tc1 Llc Startup sequence for centrifugal pump with levitated impeller
US9713663B2 (en) 2013-04-30 2017-07-25 Tc1 Llc Cardiac pump with speed adapted for ventricle unloading
US10052420B2 (en) 2013-04-30 2018-08-21 Tc1 Llc Heart beat identification and pump speed synchronization
DE102014105581A1 (de) * 2014-04-17 2015-11-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
US9623161B2 (en) 2014-08-26 2017-04-18 Tc1 Llc Blood pump and method of suction detection
WO2016086137A1 (en) 2014-11-26 2016-06-02 Thoratec Corporation Pump and method for mixed flow blood pumping
EP4643926A3 (en) 2015-02-11 2025-12-24 Tc1 Llc Heart beat identification and pump speed synchronization
WO2016130944A1 (en) 2015-02-12 2016-08-18 Thoratec Corporation System and method for controlling the position of a levitated rotor
US10371152B2 (en) 2015-02-12 2019-08-06 Tc1 Llc Alternating pump gaps
WO2016130989A1 (en) 2015-02-13 2016-08-18 Thoratec Corporation Impeller suspension mechanism for heart pump
US10117983B2 (en) 2015-11-16 2018-11-06 Tc1 Llc Pressure/flow characteristic modification of a centrifugal pump in a ventricular assist device
WO2017087728A1 (en) 2015-11-20 2017-05-26 Tc1 Llc Improved connectors and cables for use with ventricle assist systems
WO2018017716A1 (en) 2016-07-21 2018-01-25 Tc1 Llc Rotary seal for cantilevered rotor pump and methods for axial flow blood pumping
DE102016214700A1 (de) * 2016-08-08 2018-02-08 Efficient Energy Gmbh Elektrischer Scheibenläufer mit einem Druckreduzierer für den Motorspalt
DE102016214696A1 (de) * 2016-08-08 2018-02-08 Efficient Energy Gmbh Elektrischer Scheibenmotor mit Medientrennung im Motorspalt
WO2018031741A1 (en) 2016-08-12 2018-02-15 Tc1 Llc Devices and methods for monitoring bearing and seal performance
DE102016224070B4 (de) * 2016-12-02 2025-11-13 Vertiv Srl Scheibenläufermotor mit nuten
WO2019026673A1 (ja) * 2017-08-01 2019-02-07 三菱電機株式会社 回転駆動装置、回転駆動装置の組付方法、軸流送風器、軸流送風器の組付方法及びレーザ発振装置
US10973967B2 (en) 2018-01-10 2021-04-13 Tc1 Llc Bearingless implantable blood pump
GB2607339A (en) * 2021-06-04 2022-12-07 Edwards Ltd Holweck drag pump

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DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2437667B2 (de) * 1974-08-05 1977-12-29 Maschinenfabrik Augsburg-Nürnberg AG, ' 8000 München Antrieb und lagerung eines scheibenfoermigen rotors
DE2444099C3 (de) * 1974-09-14 1979-04-12 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Berührungsloses Lagerelement für mindestens teilweise magnetisierbare Körper
CH583856A5 (es) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
JPS5819844A (ja) * 1981-07-30 1983-02-05 Toshiba Corp 回転陽極ｘ線管用磁気軸受装置
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
FR2528923A1 (fr) * 1982-06-17 1983-12-23 Europ Propulsion Dispositif de suspension magnetique d'un rotor place dans une enceinte etanche
JPS6011746A (ja) * 1983-06-30 1985-01-22 Toshiba Corp フライホイ−ル装置
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JP2556320B2 (ja) * 1987-03-18 1996-11-20 セイコ−精機株式会社 真空ポンプ

Also Published As

Publication number Publication date
EP0445690A1 (fr) 1991-09-11
EP0445690B1 (fr) 1994-02-16
FR2659396B1 (fr) 1992-05-15
DE69101162D1 (de) 1994-03-24
ATE101693T1 (de) 1994-03-15
JP2813488B2 (ja) 1998-10-22
JPH04219496A (ja) 1992-08-10
US5106273A (en) 1992-04-21
DE69101162T2 (de) 1994-06-01
RU1831589C (ru) 1993-07-30
FR2659396A1 (fr) 1991-09-13

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