ES2060437T3 - Dispositivo para el tratamiento de objetos de forma de placa, en especial de placas para circuitos impresos. - Google Patents

Dispositivo para el tratamiento de objetos de forma de placa, en especial de placas para circuitos impresos.

Info

Publication number
ES2060437T3
ES2060437T3 ES92110315T ES92110315T ES2060437T3 ES 2060437 T3 ES2060437 T3 ES 2060437T3 ES 92110315 T ES92110315 T ES 92110315T ES 92110315 T ES92110315 T ES 92110315T ES 2060437 T3 ES2060437 T3 ES 2060437T3
Authority
ES
Spain
Prior art keywords
treatment
plates
printed circuits
plate shaped
shaped objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92110315T
Other languages
English (en)
Inventor
Christian Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gebrueder Schmid GmbH and Co
Original Assignee
Gebrueder Schmid GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gebrueder Schmid GmbH and Co filed Critical Gebrueder Schmid GmbH and Co
Application granted granted Critical
Publication of ES2060437T3 publication Critical patent/ES2060437T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • C25D7/0621—In horizontal cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B05B14/30—Arrangements for collecting, re-using or eliminating excess spraying material comprising enclosures close to, or in contact with, the object to be sprayed and surrounding or confining the discharged spray or jet but not the object to be sprayed
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/04—Removal of gases or vapours ; Gas or pressure control
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • C25D7/0685—Spraying of electrolyte
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Chemically Coating (AREA)

Abstract

CON EL FIN DE CONSEGUIR EN EL TRATAMIENTO CON LIQUIDOS, ESENCIALMENTE DURANTE LA LIMPIEZA, CAUSTICACION, METALIZACION O ENJUAGUE, UN TRATAMIENTO EFICAZ MEDIDO EN EL TIEMPO CON PRECISION, SE DELIMITA LA ZONA CARGADA, MEDIANTE UN DIFUSOR DE PULVERIZACION O UN DIFUSOR DE CHORRO O UN EJE FIJO, A TRAVES DE DISPOSITIVOS DE SUCCION (24, 25, 41, 42). ESTOS ESTAN DISPUESTOS DELANTE Y DETRAS DEL DISPOSITIVO DE APLICACION (28, 38). LOS DIFUSORES DE PULVERIZACION O DE SUCCION (22, 24, 25) SE HAN DISPUESTO EN UNA CARCASA COMUN, POR CUYA PARTE INFERIOR PERIFERICA CIRCULAN HORIZONTALMENTE LAS PLACAS (12) A TRATAR.
ES92110315T 1991-06-26 1992-06-18 Dispositivo para el tratamiento de objetos de forma de placa, en especial de placas para circuitos impresos. Expired - Lifetime ES2060437T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4121032A DE4121032A1 (de) 1991-06-26 1991-06-26 Vorrichtung zum behandeln von plattenfoermigen gegenstaenden, insbesondere leiterplatten

Publications (1)

Publication Number Publication Date
ES2060437T3 true ES2060437T3 (es) 1994-11-16

Family

ID=6434742

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92110315T Expired - Lifetime ES2060437T3 (es) 1991-06-26 1992-06-18 Dispositivo para el tratamiento de objetos de forma de placa, en especial de placas para circuitos impresos.

Country Status (5)

Country Link
US (1) US5335681A (es)
EP (1) EP0520324B1 (es)
AT (1) ATE111676T1 (es)
DE (2) DE4121032A1 (es)
ES (1) ES2060437T3 (es)

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CN101985752B (zh) * 2009-07-28 2013-01-09 富葵精密组件(深圳)有限公司 喷蚀装置
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Also Published As

Publication number Publication date
DE4121032A1 (de) 1993-01-07
US5335681A (en) 1994-08-09
ATE111676T1 (de) 1994-09-15
EP0520324A1 (de) 1992-12-30
EP0520324B1 (de) 1994-09-14
DE59200493D1 (de) 1994-10-20

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