ES2060468T3 - Sensor de presion para el registro de la presion en la camara de combustion de motores de combustion interna. - Google Patents

Sensor de presion para el registro de la presion en la camara de combustion de motores de combustion interna.

Info

Publication number
ES2060468T3
ES2060468T3 ES92903011T ES92903011T ES2060468T3 ES 2060468 T3 ES2060468 T3 ES 2060468T3 ES 92903011 T ES92903011 T ES 92903011T ES 92903011 T ES92903011 T ES 92903011T ES 2060468 T3 ES2060468 T3 ES 2060468T3
Authority
ES
Spain
Prior art keywords
silicon chip
monocristaline
pressure
pressure transmitter
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92903011T
Other languages
English (en)
Inventor
Manfred Vogel
Werner Herden
Jiri Marek
Kurt Weiblen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2060468T3 publication Critical patent/ES2060468T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

EN UN TRANSMISOR DE PRESION (11) LA FUERZA SE APLICA A TRAVES DE UNA MEMBRANA (14) Y UN MACHO (18) SOBRE UN DISPOSITIVO DE MEDIDA PIEZORRESISTIVO (21). EL ELEMENTO DE MEDIDA (21) ES PARTE DE UN CHIP MONOCRISTALINO DE SILICIO (20). ESTE CHIP MONOCRISTALINO DE SILICIO (20) SE COMPONE DE UN CHIP DE SILICIO MONOCRISTALINO, SOBRE EL QUE ESTA CONECTADO EL ELEMENTO DE MEDIDA PIEZORRESISTIVO (21), EN UNA CONEXION DE MEDIO PUENTE O EN UNA CONEXION CORRESPONDIENTE AL PUENTE DE WHEATSTONE. ADEMAS, SOBRE EL CHIP DE SILICIO (20) SE ENCUENTRAN UN CIRCUITO DE ESTABILIZACION (23), UNA CIRCUITO DE AMPLIFICACION (24) PARA LA SEÑAL DISPONIBLE, Y COMPONENTES ELECTRICOS PARA LA COMPENSACION DE LA TEMPERATURA DEL PUNTO CERO Y DE LA SENSIBILIDAD DEL ELEMENTO DE MEDIDA (21). ADEMAS, EXISTEN ELEMENTOS (51) PARA EL AJUSTE FUNCIONAL CON AYUDA DE CONEXIONES ADICIONALES. POR ELLO PUEDE SER AJUSTADA, POR EJEMPLO, LA SENSIBILIDAD Y EL PUNTO CERO DEL TRANSMISOR DE PRESION EN EL CHIP (20) EN ESTADO TERMINADO DE MONTAR, SINAJUSTE POR RAYOS LASER DESDE EL EXTERIOR. POR LO DEMAS EL TRANSMISOR DE PRESION (11) ES PEQUEÑO Y OCUPA POCO ESPACIO.
ES92903011T 1991-02-27 1992-01-17 Sensor de presion para el registro de la presion en la camara de combustion de motores de combustion interna. Expired - Lifetime ES2060468T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4106102A DE4106102A1 (de) 1991-02-27 1991-02-27 Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen

Publications (1)

Publication Number Publication Date
ES2060468T3 true ES2060468T3 (es) 1994-11-16

Family

ID=6425977

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92903011T Expired - Lifetime ES2060468T3 (es) 1991-02-27 1992-01-17 Sensor de presion para el registro de la presion en la camara de combustion de motores de combustion interna.

Country Status (6)

Country Link
EP (1) EP0526600B1 (es)
JP (1) JP3662018B2 (es)
KR (1) KR100210726B1 (es)
DE (2) DE4106102A1 (es)
ES (1) ES2060468T3 (es)
WO (1) WO1992015851A1 (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4137624A1 (de) * 1991-11-15 1993-05-19 Bosch Gmbh Robert Silizium-chip zur verwendung in einem kraftsensor
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ
DE4320594A1 (de) * 1993-06-22 1995-01-05 Bosch Gmbh Robert Drucksensor
FR2717262B1 (fr) * 1994-03-14 1997-09-26 Nippon Denso Co Détecteur de pression.
JP3317084B2 (ja) * 1995-03-31 2002-08-19 株式会社豊田中央研究所 力検知素子およびその製造方法
DE19538854C1 (de) * 1995-10-19 1996-08-08 Bosch Gmbh Robert Druckgeber zur Druckerfassung im Brennraum von Brennkraftmaschinen
JP2001272287A (ja) * 2000-03-27 2001-10-05 Tadahiro Kato 歪み検出センサ
DE10211992C2 (de) * 2001-05-04 2003-11-27 Trafag Ag Maennedorf Drucksensor zur Druckerfassung in einem Motorbrennraum sowie Verfahren zu dessen Herstellung
DE10232721A1 (de) 2002-07-16 2004-02-12 Siemens Ag Druckgeber mit Drucksensor in mikromechanischer Bauweise
JP4206941B2 (ja) * 2003-06-12 2009-01-14 株式会社デンソー 燃焼圧センサ
DE102005043688B4 (de) * 2005-09-14 2016-11-24 Robert Bosch Gmbh Vorrichtung zur Messung eines Drucks innerhalb eines Brennraums einer Brennkraftmaschine
DE102011112935B4 (de) 2011-09-13 2015-02-12 Micronas Gmbh Kraftsensor
JP2017032492A (ja) * 2015-08-05 2017-02-09 トヨタ自動車株式会社 内燃機関の制御装置
JP6374550B1 (ja) * 2017-02-27 2018-08-15 日立オートモティブシステムズ株式会社 圧力センサ
CN108593184B (zh) * 2018-05-08 2023-10-17 西安航天三沃机电设备有限责任公司 一种用于特种爆破压力测量的爆破压力传感器
JP7515528B2 (ja) * 2021-03-22 2024-07-12 キストラー ホールディング アクチエンゲゼルシャフト 圧電トランスデューサ
CN116380330B (zh) * 2023-05-31 2023-10-24 成都凯天电子股份有限公司 一种用于高温的无液体压阻式碳化硅压力传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144857A (en) * 1983-08-12 1985-03-13 Prutec Ltd Piezo resistive transducer
GB8615305D0 (en) * 1986-06-23 1986-07-30 Stc Plc Pressure sensor
FR2626670A1 (fr) * 1987-06-17 1989-08-04 Gazzano Maurice Capteur de pressions et de deformations
GB2207804B (en) * 1987-08-06 1990-08-15 Stc Plc Pressure sensor and manufacturing process therefor
US4993266A (en) * 1988-07-26 1991-02-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure transducer

Also Published As

Publication number Publication date
JP3662018B2 (ja) 2005-06-22
EP0526600A1 (de) 1993-02-10
KR100210726B1 (ko) 1999-07-15
DE4106102A1 (de) 1992-09-03
JPH05507358A (ja) 1993-10-21
WO1992015851A1 (de) 1992-09-17
EP0526600B1 (de) 1994-07-27
KR937000833A (ko) 1993-03-16
DE59200321D1 (de) 1994-09-01

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