ES2069267T3 - Aparato para generar un haz de electrones modulado para puesta en servicio. - Google Patents

Aparato para generar un haz de electrones modulado para puesta en servicio.

Info

Publication number
ES2069267T3
ES2069267T3 ES91830524T ES91830524T ES2069267T3 ES 2069267 T3 ES2069267 T3 ES 2069267T3 ES 91830524 T ES91830524 T ES 91830524T ES 91830524 T ES91830524 T ES 91830524T ES 2069267 T3 ES2069267 T3 ES 2069267T3
Authority
ES
Spain
Prior art keywords
acceleration
catode
voltage
electron
commissioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91830524T
Other languages
English (en)
Inventor
Gianfranco Cirri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proel Tecnologie SpA
Original Assignee
Proel Tecnologie SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proel Tecnologie SpA filed Critical Proel Tecnologie SpA
Application granted granted Critical
Publication of ES2069267T3 publication Critical patent/ES2069267T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0432—High speed and short duration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Recrystallisation Techniques (AREA)
  • Semiconductor Lasers (AREA)
  • Particle Accelerators (AREA)
  • Optical Head (AREA)
  • Surgical Instruments (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Electron Beam Exposure (AREA)

Abstract

UN DISPOSITIVO QUE CONSTA DE UNA PISTOLA DE ELECTRONES Y UN INTERRUPTOR DE ALTA TENSION QUE PERMITE LA CONSECUCION DE RAYOS DE ELECTRONES DE ALTA POTENCIA QUE SE MODULAN ENCENDIDO/APAGADO MEDIANTE DC HASTA FRECUENCIAS QUE EXCEDEN KHZ. LA PISTOLA DE ELECTRONES CONSTA DE UN CATODO, AL MENOS DOS ELECTRODOS DE ACELERACION, UN CALENTADOR DE CATODO, Y UN POSIBLE SISTEMA DE ENFOQUE. EL VOLTAJE O CADA VOLTAJE DE ACELERACION, GENERADO POR CUALQUIER FUENTE, QUE EN EL CASO DE APLICACIONES ESPACIALES TAMBIEN PUEDE SER UN TUBO DE SUJECCION, SE APLICA ENTRE LOS ELECTRODOS DE ACELERACION Y EL CATODO, CON LA EXCEPCION DE UN ELECTRODO DE ACELERACION APROPIADO AL QUE SE APLICA, POR MEDIO DEL INTERRUPTOR, ALTERNATIVAMENTE SU VOLTAJE DE ACELERACION O EL MISMO VOLTAJE QUE EL DEL CATODO, OBTENIENDO UNA MODULACION ENCENDIDO/APAGADO DEL RAYO DE ELECTRONES EMITIDO POR LA PISTOLA .
ES91830524T 1990-11-30 1991-11-29 Aparato para generar un haz de electrones modulado para puesta en servicio. Expired - Lifetime ES2069267T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9535A IT1241837B (it) 1990-11-30 1990-11-30 Dispositivo per la generazione di un fascio elettronico modulato on-off

Publications (1)

Publication Number Publication Date
ES2069267T3 true ES2069267T3 (es) 1995-05-01

Family

ID=11131804

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91830524T Expired - Lifetime ES2069267T3 (es) 1990-11-30 1991-11-29 Aparato para generar un haz de electrones modulado para puesta en servicio.

Country Status (9)

Country Link
US (1) US5175468A (es)
EP (1) EP0488972B1 (es)
JP (1) JPH05211038A (es)
AT (1) ATE119316T1 (es)
DE (1) DE69107804T2 (es)
DK (1) DK0488972T3 (es)
ES (1) ES2069267T3 (es)
GR (1) GR3015259T3 (es)
IT (1) IT1241837B (es)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052220A (es) * 1962-12-31
GB1199571A (en) * 1966-08-08 1970-07-22 Atomic Energy Authority Uk Improvements in or relating to Irradiation Machines.
DE3852851D1 (de) * 1987-07-29 1995-03-09 Siemens Ag Vorrichtung zur Modulation der Intensität eines Korpuskularstrahls.

Also Published As

Publication number Publication date
EP0488972A2 (en) 1992-06-03
US5175468A (en) 1992-12-29
EP0488972A3 (en) 1992-07-01
GR3015259T3 (en) 1995-06-30
IT9009535A0 (it) 1990-11-30
EP0488972B1 (en) 1995-03-01
DE69107804D1 (de) 1995-04-06
ATE119316T1 (de) 1995-03-15
DK0488972T3 (da) 1995-05-22
IT1241837B (it) 1994-02-01
JPH05211038A (ja) 1993-08-20
DE69107804T2 (de) 1995-11-09
IT9009535A1 (it) 1992-06-01

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