GR3015259T3 - Device for generating an on-off modulated electron beam. - Google Patents

Device for generating an on-off modulated electron beam.

Info

Publication number
GR3015259T3
GR3015259T3 GR950400328T GR950400328T GR3015259T3 GR 3015259 T3 GR3015259 T3 GR 3015259T3 GR 950400328 T GR950400328 T GR 950400328T GR 950400328 T GR950400328 T GR 950400328T GR 3015259 T3 GR3015259 T3 GR 3015259T3
Authority
GR
Greece
Prior art keywords
cathode
accelerating
electron beam
image
generating
Prior art date
Application number
GR950400328T
Other languages
English (en)
Inventor
Gianfranco Cirri
Original Assignee
Proel Tecnologie Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proel Tecnologie Spa filed Critical Proel Tecnologie Spa
Publication of GR3015259T3 publication Critical patent/GR3015259T3/el

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0432—High speed and short duration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Recrystallisation Techniques (AREA)
  • Semiconductor Lasers (AREA)
  • Particle Accelerators (AREA)
  • Surgical Instruments (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Electron Beam Exposure (AREA)
  • Optical Head (AREA)
GR950400328T 1990-11-30 1995-03-02 Device for generating an on-off modulated electron beam. GR3015259T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9535A IT1241837B (it) 1990-11-30 1990-11-30 Dispositivo per la generazione di un fascio elettronico modulato on-off

Publications (1)

Publication Number Publication Date
GR3015259T3 true GR3015259T3 (en) 1995-06-30

Family

ID=11131804

Family Applications (1)

Application Number Title Priority Date Filing Date
GR950400328T GR3015259T3 (en) 1990-11-30 1995-03-02 Device for generating an on-off modulated electron beam.

Country Status (9)

Country Link
US (1) US5175468A (el)
EP (1) EP0488972B1 (el)
JP (1) JPH05211038A (el)
AT (1) ATE119316T1 (el)
DE (1) DE69107804T2 (el)
DK (1) DK0488972T3 (el)
ES (1) ES2069267T3 (el)
GR (1) GR3015259T3 (el)
IT (1) IT1241837B (el)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052220A (el) * 1962-12-31
GB1199571A (en) * 1966-08-08 1970-07-22 Atomic Energy Authority Uk Improvements in or relating to Irradiation Machines.
EP0301256B1 (de) * 1987-07-29 1995-01-25 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Vorrichtung zur Modulation der Intensität eines Korpuskularstrahls

Also Published As

Publication number Publication date
JPH05211038A (ja) 1993-08-20
ES2069267T3 (es) 1995-05-01
EP0488972A2 (en) 1992-06-03
IT1241837B (it) 1994-02-01
IT9009535A1 (it) 1992-06-01
DE69107804T2 (de) 1995-11-09
EP0488972B1 (en) 1995-03-01
ATE119316T1 (de) 1995-03-15
DE69107804D1 (de) 1995-04-06
EP0488972A3 (en) 1992-07-01
IT9009535A0 (it) 1990-11-30
US5175468A (en) 1992-12-29
DK0488972T3 (da) 1995-05-22

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