ES2079478T3 - Baño quimico filtrado de alta pureza, con recirculacion por una cuba/colector integrado de cuarzo. - Google Patents

Baño quimico filtrado de alta pureza, con recirculacion por una cuba/colector integrado de cuarzo.

Info

Publication number
ES2079478T3
ES2079478T3 ES90910229T ES90910229T ES2079478T3 ES 2079478 T3 ES2079478 T3 ES 2079478T3 ES 90910229 T ES90910229 T ES 90910229T ES 90910229 T ES90910229 T ES 90910229T ES 2079478 T3 ES2079478 T3 ES 2079478T3
Authority
ES
Spain
Prior art keywords
process tank
liquid
tank
chamber
barreño
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90910229T
Other languages
English (en)
Inventor
Allan Berman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of ES2079478T3 publication Critical patent/ES2079478T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0404—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053—Details of the reactor
    • B01J19/0073—Sealings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0254—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0295—Synthetic organic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85954—Closed circulating system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86035—Combined with fluid receiver
    • Y10T137/86067—Fluid sump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86187—Plural tanks or compartments connected for serial flow
    • Y10T137/86212—Plural compartments formed by baffles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Filtration Of Liquid (AREA)

Abstract

UN MONTAJE QUIMICO DE RECIRCULACION QUE CONSTA DE UN TANQUE DE PROCESO DE CUARZO (11) Y UNA CAMARA DE SUMIDERO COLOCADA DIRECTAMENTE ADYACENTE AL TANQUE DE PROCESO. UN BARREÑO (54) SE EXTIENDE A LO LARGO DE LA PARTE SUPERIOR DE LAS PAREDES LATERALES DEL TANQUE DE PROCESO, ESTANDO DICHO BARREÑO (54) INCLINADA PARA OCASIONAR EL FLUJO DE GRAVITACION HACIA LA CAMARA DE SUMIDERO (21). LA CAMARA DE SUMIDERO (21) TIENE UN CONECTOR (27) EN LA PARTE INFERIOR (21) DE LA MISMA QUE LLEVA EL LIQUIDO DEL SUMIDERO A UN CIRCUITO DE BOMBA/FILTRO, CUYA SALIDA ES ALIMENTADA EN EL FONDO DEL TANQUE DE PROCESO (11). DE ESTA MANERA SE CONSIGUE QUE EL LIQUIDO SE DESBORDE DEL TANQUE DE PROCESO (11) Y ENTRE EN EL BARREÑO (54) Y FLUYA HASTA ENTRAR EN LA CAMARA DE SUMIDERO ADYACENTE (21). HAY VARIAS UNIDADES TERMICAS (19) COLOCADAS EN LA SUPERFICIE EXTERIOR DEL TANQUE DE PROCESO (11) PARA CALENTAR EL LIQUIDO QUE SE ENCUENTRA DENTRO A UNA TEMPERATURA DE PROCESO ADECUADA. LA CAMARA DE SUMIDERO (21) SE ENFRIA DE MODO QUEEL LIQUIDO QUE ENTRA EN LA BOMBA/FILTRO ESTE A LA TEMPERATURA MAS FRIA DEL CICLO DE FLUJO DEL LIQUIDO. EL TANQUE DE PROCESO (11) Y LA CAMARA DE SUMIDERO (21) PUEDEN ESTAR HECHAS EN SU TOTALIDAD DE PLANCHAS DE CUARZO SOLDADAS Y MOLDEADAS Y COLOCADAS DENTRO DE LA CAJA EXTERIOR QUE CONTIENE EL AISLAMIENTO TERMICO.
ES90910229T 1989-11-13 1990-06-21 Baño quimico filtrado de alta pureza, con recirculacion por una cuba/colector integrado de cuarzo. Expired - Lifetime ES2079478T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/434,709 US5014737A (en) 1989-11-13 1989-11-13 Quartz integrated trough/sump recirculating filtered high-purity chemical bath

Publications (1)

Publication Number Publication Date
ES2079478T3 true ES2079478T3 (es) 1996-01-16

Family

ID=23725337

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90910229T Expired - Lifetime ES2079478T3 (es) 1989-11-13 1990-06-21 Baño quimico filtrado de alta pureza, con recirculacion por una cuba/colector integrado de cuarzo.

Country Status (8)

Country Link
US (1) US5014737A (es)
EP (1) EP0453520B1 (es)
JP (1) JP2901343B2 (es)
KR (1) KR0147303B1 (es)
AT (1) ATE127958T1 (es)
DE (1) DE69022399T2 (es)
ES (1) ES2079478T3 (es)
WO (1) WO1991007550A1 (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9224739D0 (en) * 1992-11-26 1993-01-13 Wellcome Found Medicaments
US5383488A (en) * 1994-01-31 1995-01-24 Imtec Products, Inc. Apparatus and method for protecting chemical bath seals
US5722447A (en) * 1994-04-29 1998-03-03 Texas Instruments Incorporated Continuous recirculation fluid delivery system and method
GB9414415D0 (en) * 1994-07-16 1994-09-07 Oxford Appl Res Ltd Cracking feedstocks
US5545440A (en) * 1994-12-05 1996-08-13 At&T Global Information Solutions Company (Aka Ncr Corporation) Method and apparatus for polymer coating of substrates
US5643794A (en) * 1995-06-07 1997-07-01 W.R. Grace & Co.-Conn. Apparatus for bioprocessing a circulating fluid
US6039835A (en) * 1997-09-15 2000-03-21 Motorola, Inc. Etching apparatus and method of etching a substrate
DE19853486A1 (de) * 1998-11-19 2000-05-31 Wacker Siltronic Halbleitermat Verfahren zur naßchemischen Behandlung von Halbleiterscheiben
US6238913B1 (en) * 1999-11-23 2001-05-29 Glaxo Wellcome Inc. Apparatus for heating and cooling deep well pharmaceutical microplates
US7124766B1 (en) 2002-09-20 2006-10-24 Hedgpeth Rick L Apparatus and use thereof in cleaning a respiratory device
US6984583B2 (en) * 2003-09-16 2006-01-10 Micron Technology, Inc. Stereolithographic method for forming insulative coatings for via holes in semiconductor devices
US9759451B2 (en) * 2013-11-22 2017-09-12 Thermo Fisher Scientific (Asheville) Llc Recirculating bath
US20160346807A1 (en) * 2015-05-27 2016-12-01 Nike, Inc. Apparatus for Maintaining a Quiescent Surface of a Fluid in a Container and Method of Operating
CN111508875B (zh) * 2020-04-29 2023-04-14 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 一种石英槽及其制造方法
EP4194100A1 (en) * 2021-12-08 2023-06-14 Carl Zeiss Vision International GmbH Coating device and method for supplying a lacquer and a solvent to a lacquer mixture
CN115156167B (zh) * 2022-07-31 2023-12-08 江苏风日石英科技有限公司 一种石英砂酸洗除铁除杂装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1750245A (en) * 1927-09-01 1930-03-11 Gustave H Schwedler Sterilizer
US3033712A (en) * 1959-03-10 1962-05-08 Elmer L Brevik Equipment and process for agitated tank cleaning
US3851662A (en) * 1973-07-18 1974-12-03 Eastman Kodak Co Photographic processing solution filling and circulating apparatus
FR2263832A1 (en) * 1974-03-15 1975-10-10 Fossati Charles Dip treatment appts. for decorative spray painting - includes two part tank and recirculation system
US4135530A (en) * 1975-09-15 1979-01-23 Litton Industrial Products, Inc. Rinsing tank
US3987816A (en) * 1975-12-30 1976-10-26 Hooker Chemicals & Plastics Corporation Entrance duct with weir
US4753258A (en) * 1985-08-06 1988-06-28 Aigo Seiichiro Treatment basin for semiconductor material
US4804990A (en) * 1988-02-08 1989-02-14 Eastman Kodak Company Automatic liquid feed and circulation system for a photographic film processor

Also Published As

Publication number Publication date
JPH04505076A (ja) 1992-09-03
DE69022399D1 (de) 1995-10-19
KR920700763A (ko) 1992-08-10
EP0453520A1 (en) 1991-10-30
EP0453520B1 (en) 1995-09-13
WO1991007550A1 (en) 1991-05-30
DE69022399T2 (de) 1996-04-04
JP2901343B2 (ja) 1999-06-07
KR0147303B1 (ko) 1999-10-01
ATE127958T1 (de) 1995-09-15
EP0453520A4 (en) 1993-02-24
US5014737A (en) 1991-05-14

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