ES2108387T3 - Recubrimiento en vacio de una banda continua. - Google Patents

Recubrimiento en vacio de una banda continua.

Info

Publication number
ES2108387T3
ES2108387T3 ES94308157T ES94308157T ES2108387T3 ES 2108387 T3 ES2108387 T3 ES 2108387T3 ES 94308157 T ES94308157 T ES 94308157T ES 94308157 T ES94308157 T ES 94308157T ES 2108387 T3 ES2108387 T3 ES 2108387T3
Authority
ES
Spain
Prior art keywords
substrate
coil
holes
outlets
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94308157T
Other languages
English (en)
Inventor
Ian Kenneth Baxter
Keith Watkins
Charles Arthur Bishop
David Charles Mcgee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imperial Chemical Industries Ltd
Original Assignee
Imperial Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imperial Chemical Industries Ltd filed Critical Imperial Chemical Industries Ltd
Application granted granted Critical
Publication of ES2108387T3 publication Critical patent/ES2108387T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

EN UN APARATO PARA UN REVESTIMIENTO DE BOBINA EN VACIO, UNOS ELEMENTOS DE EVAPORACION TIENEN VARIOS ORIFICIOS DE SALIDA SEPARADOS (29) A TRAVES DE LOS CUALES, SE TRANSPORTA EL VAPOR A UNA ZONA DE DEPOSICION (30) EN LA SUPERFICIE DE UN TAMBOR GIRATORIO ENDURECIDO (20,31) EN UNA CAMARA DE VACIO (12) Y SOBRE EL CUAL, SE AVANZA LA BOBINA DE SUSTRATO MEDIANTE UN SISTEMA DE TRANSPORTE DE BOBINAS. EL DISPOSITIVO DE ORIFICIOS DE SALIDA COMPRENDE DE FORMA VENTAJOSA, VARIAS RANURAS LINEALES DISPUESTAS TRANSVERSALMENTE A LA TRAYECTORIA DEL SUSTRATO DE BOBINA PARA DISTRIBUIR EL VAPOR EN POSICIONES COLOCADAS SECUENCIALMENTE EN LA DIRECCION DE AVANCE DEL SUSTRATO DE BOBINA; LAS SALIDAS DE LOS ORIFICIOS ESTAN COLOCADAS ALREDEDOR DE UNA SUPERFICIE ARQUEADA PERO SEPARADA DE LA SUPERFICIE CURVA DEL TAMBOR GIRATORIO. VARIANDO EL PERFIL DEL ORIFICIO, POR EJEMPLO LA ANCHURA Y/O SEPARACION DE LAS SALIDAS DE LOS ORIFICIOS LA APLICACION DEL REVESTIMIENTO PUEDE SER CONTROLADA FUERTEMENTE PARA OBTENER UNA UNIFORMIDAD MEJORADA DEL MISMO, UNA MAYOR EFICIENCIA EN LA RECOGIDA DE MATERIAL Y CONTROL DE LA CARGA CALORIFICA DEL SUSTRATO. EL APARATO ES PARTICULARMENTE UTIL PARA LA APLICACION DE REVESTIMIENTOS GRUESOS DE MATERIAL TAL COMO METAL SOBRE PAPEL O CAPAS PLASTICAS.
ES94308157T 1993-11-09 1994-11-04 Recubrimiento en vacio de una banda continua. Expired - Lifetime ES2108387T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939323034A GB9323034D0 (en) 1993-11-09 1993-11-09 Vacuum web coating

Publications (1)

Publication Number Publication Date
ES2108387T3 true ES2108387T3 (es) 1997-12-16

Family

ID=10744843

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94308157T Expired - Lifetime ES2108387T3 (es) 1993-11-09 1994-11-04 Recubrimiento en vacio de una banda continua.

Country Status (7)

Country Link
EP (1) EP0652302B1 (es)
JP (1) JPH07286272A (es)
KR (1) KR950014355A (es)
CA (1) CA2135424A1 (es)
DE (1) DE69406084T2 (es)
ES (1) ES2108387T3 (es)
GB (2) GB9323034D0 (es)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5803976A (en) * 1993-11-09 1998-09-08 Imperial Chemical Industries Plc Vacuum web coating
DE19527604A1 (de) * 1995-07-28 1997-01-30 Leybold Ag Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung
DE19537779A1 (de) * 1995-10-11 1997-04-17 Leybold Ag Beschichtungsanlage für Folien
DE19537781A1 (de) * 1995-10-11 1997-04-17 Leybold Ag Beschichtungsanlage für Folien
US6202591B1 (en) 1998-11-12 2001-03-20 Flex Products, Inc. Linear aperture deposition apparatus and coating process
DK1004369T4 (da) 1998-11-26 2009-03-09 Cockerill Rech & Dev Forseglingssluse til et vakuumkammer
DE19906676A1 (de) 1999-02-18 2000-08-24 Leybold Systems Gmbh Bedampfungsvorrichtung
KR100389377B1 (ko) * 2000-07-20 2003-06-25 한국전력공사 고전압 분압 및 전류 공급용 전왜 세라믹스 조성물 및 제조방법
TWI264473B (en) * 2001-10-26 2006-10-21 Matsushita Electric Works Ltd Vacuum deposition device and vacuum deposition method
KR100729097B1 (ko) * 2005-12-28 2007-06-14 삼성에스디아이 주식회사 증발원 및 이를 이용한 박막 증착방법
US8865258B2 (en) 2010-06-16 2014-10-21 Panasonic Corporation Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
CN102482763B (zh) * 2010-06-16 2015-04-08 松下电器产业株式会社 薄膜的制造方法
KR101730498B1 (ko) * 2010-10-22 2017-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
JP5883230B2 (ja) * 2011-03-14 2016-03-09 キヤノントッキ株式会社 蒸着装置並びに蒸着方法
JP2012201895A (ja) * 2011-03-23 2012-10-22 Canon Tokki Corp 蒸着装置並びに蒸着方法
KR20140027452A (ko) * 2011-07-07 2014-03-06 파나소닉 주식회사 진공 증착 장치
CN103898450B (zh) * 2012-12-25 2017-06-13 北京创昱科技有限公司 一种铜铟镓硒共蒸发线性源装置及其使用方法
JP6110664B2 (ja) * 2013-01-07 2017-04-05 三菱重工業株式会社 蒸着用基板保持トレイを備える真空蒸着装置
CN112553579B (zh) * 2019-09-26 2023-05-09 宝山钢铁股份有限公司 一种具有过滤及均匀化喷嘴的真空镀膜装置
EP4162094A4 (en) * 2020-06-04 2024-10-02 Applied Materials, Inc. Vapor deposition apparatus and method for coating a substrate in a vacuum chamber
US20230011303A1 (en) * 2021-07-09 2023-01-12 Applied Materials, Inc. Close couple diffuser for physical vapor deposition web coating

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB304192A (en) * 1928-01-16 1930-06-10 Siemens Ag Process for producing thin insulating layers on wires
US3081201A (en) * 1957-05-15 1963-03-12 Gen Electric Method of forming an electric capacitor
CH430073A (de) * 1961-09-29 1967-02-15 Philips Nv Verfahren zur Herstellung lichtabsorbierender, farbiger, durchsichtiger Schichten auf Gegenständen
US3748090A (en) * 1971-12-20 1973-07-24 Xerox Corp Evaporation crucible
DE2436431B2 (de) * 1974-07-29 1978-07-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verdampfer und Verfahren zum Herstellen von Aufdampfschichten, insbesondere aus Selen
JPS5210869A (en) * 1975-07-15 1977-01-27 Toshinori Takagi Thin film forming method
JPS63297549A (ja) * 1987-05-29 1988-12-05 Komatsu Ltd 真空蒸着装置
JPH02118072A (ja) * 1988-10-28 1990-05-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置
DE4104415C1 (es) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De

Also Published As

Publication number Publication date
EP0652302A1 (en) 1995-05-10
JPH07286272A (ja) 1995-10-31
GB9323034D0 (en) 1994-01-05
DE69406084T2 (de) 1998-03-12
EP0652302B1 (en) 1997-10-08
DE69406084D1 (de) 1997-11-13
CA2135424A1 (en) 1995-05-10
KR950014355A (ko) 1995-06-16
GB2283760A (en) 1995-05-17
GB9422076D0 (en) 1994-12-21

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