ES2109948T3 - Recipiente de nitruro de silicio para sinterizar el nitruro de silicio. - Google Patents

Recipiente de nitruro de silicio para sinterizar el nitruro de silicio.

Info

Publication number
ES2109948T3
ES2109948T3 ES91915359T ES91915359T ES2109948T3 ES 2109948 T3 ES2109948 T3 ES 2109948T3 ES 91915359 T ES91915359 T ES 91915359T ES 91915359 T ES91915359 T ES 91915359T ES 2109948 T3 ES2109948 T3 ES 2109948T3
Authority
ES
Spain
Prior art keywords
silicon nitride
container
article
sintering
during sintering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91915359T
Other languages
English (en)
Inventor
James P Edler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eaton Corp
Original Assignee
Eaton Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eaton Corp filed Critical Eaton Corp
Application granted granted Critical
Publication of ES2109948T3 publication Critical patent/ES2109948T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B21/00—Open or uncovered sintering apparatus; Other heat-treatment apparatus of like construction
    • F27B21/04—Sintering pots or sintering pans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F27D5/0068—Containers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

UN RECIPIENTE CERCABLE PARA CONTENER UN ARTICULO DE NITRURO DE SILICIO (36) DURANTE LA SINTERIZACION EN UN HORNO CON EL FIN DE PROTEGER EL ARTICULO DE NITRURO DE SILICIO (36) CONTRA LAS REACCIONES DE DESCOMPOSICION TERMICA Y DE CONTAMINACION CON LOS MATERIALES DEL HORNO COMPRENDE UN CONTENEDOR CON PAREDES CERRABLES (10) FORMADO POR UN MATERIAL DE NITRURO DE SILICIO ENLAZADO DE REACCION QUE TIENE UNA ABERTURA (22) QUE PERMITE LA COLOCACION INTERIOR DEL ARTICULO DE NITRURO DE SILICIO EN EL CONTENEDOR CONFINADO (10). ESTA CAJA (10) SE HA UTILIZADO HASTA AHORA PARA CUBRIR ARTICULOS DE NITRURO DE SILICIO (36) DURANTE LA SINTERIZACION.
ES91915359T 1990-07-24 1991-07-23 Recipiente de nitruro de silicio para sinterizar el nitruro de silicio. Expired - Lifetime ES2109948T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/557,520 US5085582A (en) 1990-07-24 1990-07-24 Silicon nitride containers for the sintering of silicon nitride ceramics

Publications (1)

Publication Number Publication Date
ES2109948T3 true ES2109948T3 (es) 1998-02-01

Family

ID=24225748

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91915359T Expired - Lifetime ES2109948T3 (es) 1990-07-24 1991-07-23 Recipiente de nitruro de silicio para sinterizar el nitruro de silicio.

Country Status (6)

Country Link
US (1) US5085582A (es)
EP (1) EP0540677B1 (es)
JP (1) JP3176366B2 (es)
DE (1) DE69127626T2 (es)
ES (1) ES2109948T3 (es)
WO (1) WO1992001898A1 (es)

Families Citing this family (12)

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US5364608A (en) * 1993-07-30 1994-11-15 Eaton Corporation Method of converting a silicon nitride from alpha-phase to beta-phase, apparatus used therefor, and silicon nitride material made therefrom
US6270727B1 (en) 1998-07-31 2001-08-07 Leco Corporation Analytical crucible
US6899137B2 (en) 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
US20040211496A1 (en) * 2003-04-25 2004-10-28 Crystal Systems, Inc. Reusable crucible for silicon ingot growth
US7588745B2 (en) * 2004-04-13 2009-09-15 Si Options, Llc Silicon-containing products
US8470279B2 (en) * 2004-04-13 2013-06-25 Si Options, Llc High purity silicon-containing products and method of manufacture
US7638108B2 (en) * 2004-04-13 2009-12-29 Si Options, Llc High purity silicon-containing products
JP2006310129A (ja) * 2005-04-28 2006-11-09 Denso Corp スパークプラグ製造装置およびスパークプラグの製造方法
EP2038454A1 (en) * 2006-06-23 2009-03-25 Rec Scanwafer AS Method and crucible for direct solidification of semiconductor grade multi-crystalline silicon ingots
RU181401U1 (ru) * 2017-03-17 2018-07-12 Акционерное общество "Ордена Трудового Красного Знамени и ордена труда ЧССР опытное конструкторское бюро "ГИДРОПРЕСС" Устройство для термической обработки деталей в среде инертных газов
RU179406U1 (ru) * 2017-04-10 2018-05-14 ФЕДЕРАЛЬНОЕ ГОСУДАРСТВЕННОЕ БЮДЖЕТНОЕ ОБРАЗОВАТЕЛЬНОЕ УЧРЕЖДЕНИЕ ВЫСШЕГО ОБРАЗОВАНИЯ "Брянский государственный технический университет" Контейнер для отжига и активации ионно-легированных слоёв карбидкремниевых пластин

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US1085540A (en) * 1913-09-22 1914-01-27 Willis W Case Jr Metallurgical-furnace part.
US1213082A (en) * 1916-06-17 1917-01-16 Fritz Doerinckel Furnace.
US2268589A (en) * 1934-07-07 1942-01-06 Heany Ind Ceramic Corp Method of producing vitreous silica articles
US2263309A (en) * 1940-05-24 1941-11-18 John F Murphy Furnace hood
US2383353A (en) * 1943-04-05 1945-08-21 Doty M Steele Cupel muffle
US2472456A (en) * 1945-03-20 1949-06-07 Robert J Anicetti Crucible and method of making crucibles
US2543700A (en) * 1948-01-31 1951-02-27 Electro Refractories & Alloys Crucible for metal melting
US2869215A (en) * 1955-06-20 1959-01-20 Robert S Smith Molding method
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US4033400A (en) * 1973-07-05 1977-07-05 Eaton Corporation Method of forming a composite by infiltrating a porous preform
US3887412A (en) * 1973-12-20 1975-06-03 Ford Motor Co Method of making a triple density silicon nitride article
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JPS5830264B2 (ja) * 1975-10-18 1983-06-28 トウホクダイガク キンゾクザイリヨウケンキユウシヨチヨウ キンゾクチツカブツシヨウケツセイケイタイノセイゾウホウホウ
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Also Published As

Publication number Publication date
US5085582A (en) 1992-02-04
DE69127626T2 (de) 1998-04-09
DE69127626D1 (de) 1997-10-16
JP3176366B2 (ja) 2001-06-18
WO1992001898A1 (en) 1992-02-06
JPH05509152A (ja) 1993-12-16
EP0540677A1 (en) 1993-05-12
EP0540677A4 (en) 1993-12-15
EP0540677B1 (en) 1997-09-10

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