ES2139044T3 - Procedimiento de fabricacion de un cabezal magnetico de pelicula delgada y cabezal fabricado por dicho procedimiento. - Google Patents
Procedimiento de fabricacion de un cabezal magnetico de pelicula delgada y cabezal fabricado por dicho procedimiento.Info
- Publication number
- ES2139044T3 ES2139044T3 ES94200677T ES94200677T ES2139044T3 ES 2139044 T3 ES2139044 T3 ES 2139044T3 ES 94200677 T ES94200677 T ES 94200677T ES 94200677 T ES94200677 T ES 94200677T ES 2139044 T3 ES2139044 T3 ES 2139044T3
- Authority
- ES
- Spain
- Prior art keywords
- layer
- insulation
- procedure
- magnetic
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title 1
- 238000009413 insulation Methods 0.000 abstract 5
- 239000000696 magnetic material Substances 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
- G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
- G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
- G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
- G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
SE PRESENTA UN METODO PARA MANUFACTURAR UNA CABEZA MAGNETICA MAGNETORRESISTIVA EN LA CUAL UNA PRIMERA CAPA DE AISLAMIENTO (5) DE UN MATERIAL NO MAGNETICO SE FORMA SOBRE UNA CARA DE SOPORTE (3A) SOBRE DICHA CAPA DE AISLAMIENTO SE FORMA UNA CAPA SUAVEMENTE MAGNETICA QUE TIENE UNA CARA SUPERIOR DISTANCIADA DE LA PRIMERA CAPA MAGNETICA, MEDIANTE LA DEPOSICION DE UN MATERIAL SUAVEMENTE MAGNETICO. SUBSECUENTEMENTE, SE QUITA UNA PARTE DE LA CAPA PARA FORMAR LOS ELEMENTOS DE GUIA DE FLUJO (17A, 17B) Y UNA ABERTURA QUE SE EXTIENDE ENTRE DICHOS ELEMENTOS, Y UN MATERIAL NO MAGNETICO PARA FORMAR UNA SEGUNDA CAPA DE AISLAMIENTO (18) QUE TENGA UNA CARA SUPERIOR SEPARADA DE LA CAPA SUAVEMENTE MAGNETICA SE DEPOSITA SOBRE DICHA CAPA Y EN LA ABERTURA FORMADA EN LA MISMA, DICHA SEGUNDA CAPA DE AISLAMIENTO TIENE UN GROSOR TAL QUE, VISTO EN UNA DIRECCION TRANSVERSAL A LA CARA DE SOPORTE, LA DISTANCIA MENOR ENTRE LA CARA DE SOPORTE Y LA CARA SUPERIOR DE LA SEGUNDA CAPA DE AISLAMIENTO ES MAYOR QUE LA DISTANCIA MAYOR ENTRE LA CARA DE SOPORTE Y LA CARA SUPERIOR DE LA CAPA SUAVEMENTE MAGNETICA. SUBSECUENTEMENTE, SE REALIZA UN TRATAMIENTO DE PULIDO MECANOQUIMICO PARA FORMAR UNA SUPERFICIE PRINCIPAL (19) EN LA CUAL SE DEPOSITA SUBSECUENTEMENTE EL MATERIAL MAGNETORRESISTIVO PARA FORMAR UN ELEMENTO MAGNETORRESISTIVO (23).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BE9300274A BE1006925A3 (nl) | 1993-03-22 | 1993-03-22 | Werkwijze voor het vervaardigen van een dunnefilm magneetkop en magneetkop vervaardigd volgens de werkwijze. |
| EP93200993 | 1993-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2139044T3 true ES2139044T3 (es) | 2000-02-01 |
Family
ID=25662714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES94200677T Expired - Lifetime ES2139044T3 (es) | 1993-03-22 | 1994-03-16 | Procedimiento de fabricacion de un cabezal magnetico de pelicula delgada y cabezal fabricado por dicho procedimiento. |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5483735A (es) |
| JP (1) | JP3284156B2 (es) |
| KR (1) | KR100297877B1 (es) |
| DE (1) | DE69420766T2 (es) |
| ES (1) | ES2139044T3 (es) |
| MY (1) | MY111205A (es) |
| SG (1) | SG48089A1 (es) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5796560A (en) * | 1995-03-13 | 1998-08-18 | Kabushiki Kaisha Toshiba | Magnetoresistive head |
| KR970703576A (ko) * | 1995-03-24 | 1997-07-03 | 요트.게.아 롤페즈 | 자기헤드와 측정디바이스와 전류 디바이스를 구비한 시스템(System comprising a magnetic head, a measuring device and a current device) |
| US5905000A (en) * | 1996-09-03 | 1999-05-18 | Nanomaterials Research Corporation | Nanostructured ion conducting solid electrolytes |
| FR2754905B1 (fr) * | 1996-10-22 | 1998-11-20 | Commissariat Energie Atomique | Procede de realisation d'un capteur magnetique magnetoresistif et capteur obtenu par ce procede |
| US6747854B1 (en) | 1997-02-20 | 2004-06-08 | Koninklijke Philips Electronics N.V. | Multi-channel magnetic head with magnetoresistive elements |
| US5982177A (en) * | 1997-08-08 | 1999-11-09 | Florida State University | Magnetoresistive sensor magnetically biased in a region spaced from a sensing region |
| JP2002531912A (ja) * | 1998-12-03 | 2002-09-24 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 積層組立体の形成方法 |
| JP2000285409A (ja) | 1999-03-29 | 2000-10-13 | Toshiba Corp | 磁気ヘッドの製造方法および磁気ヘッド |
| US6554878B1 (en) | 1999-06-14 | 2003-04-29 | International Business Machines Corporation | Slurry for multi-material chemical mechanical polishing |
| US6131271A (en) * | 1999-06-25 | 2000-10-17 | International Business Machines Corporation | Method of planarizing first pole piece layer of write head by lapping without delamination of first pole piece layer from wafer substrate |
| US6651313B1 (en) * | 2000-10-06 | 2003-11-25 | International Business Machines Corporation | Method for manufacturing a magnetic head |
| DE10107816A1 (de) * | 2001-02-16 | 2002-09-05 | Philips Corp Intellectual Pty | Netzwerk mit mehreren über Brücken-Terminals verbindbaren Sub-Netzwerken |
| US7469465B2 (en) * | 2004-06-30 | 2008-12-30 | Hitachi Global Storage Technologies Netherlands B.V. | Method of providing a low-stress sensor configuration for a lithography-defined read sensor |
| US20060025053A1 (en) * | 2004-07-30 | 2006-02-02 | Marie-Claire Cyrille | Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off |
| US20070185065A1 (en) * | 2006-02-03 | 2007-08-09 | Vikramjit Chhokar | Combination therapy for coronary artery disease |
| US7631416B2 (en) * | 2007-05-14 | 2009-12-15 | Tdk Corporation | Method of making thin film magnetic head using electric lapping guide |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4052748A (en) * | 1974-04-01 | 1977-10-04 | U.S. Philips Corporation | Magnetoresistive magnetic head |
| JPS59104717A (ja) * | 1982-12-08 | 1984-06-16 | Comput Basic Mach Technol Res Assoc | 薄膜磁気ヘツドおよびその製造方法 |
| JPS6292219A (ja) * | 1985-10-18 | 1987-04-27 | Victor Co Of Japan Ltd | 磁気抵抗効果型薄膜磁気ヘツド |
| FR2604021B1 (fr) * | 1986-09-17 | 1988-10-28 | Commissariat Energie Atomique | Procede de realisation de tetes magnetiques en couches minces et a structure planaire et tete obtenue par ce procede |
| JPH01289224A (ja) * | 1988-05-17 | 1989-11-21 | Sumitomo Special Metals Co Ltd | 薄膜磁気ヘッド用基板及びその製造方法 |
| JPH04351706A (ja) * | 1991-05-30 | 1992-12-07 | Matsushita Electric Ind Co Ltd | 複合型薄膜磁気ヘッド |
| EP0579298B1 (en) * | 1992-06-15 | 1997-09-03 | Koninklijke Philips Electronics N.V. | Method of manufacturing a plate having a plane main surface, method of manufacturing a plate having parallel main surfaces, and device suitable for implementing said methods |
-
1994
- 1994-02-24 MY MYPI94000432A patent/MY111205A/en unknown
- 1994-03-16 ES ES94200677T patent/ES2139044T3/es not_active Expired - Lifetime
- 1994-03-16 DE DE69420766T patent/DE69420766T2/de not_active Expired - Fee Related
- 1994-03-16 SG SG1996006941A patent/SG48089A1/en unknown
- 1994-03-18 KR KR1019940005422A patent/KR100297877B1/ko not_active Expired - Fee Related
- 1994-03-22 US US08/216,573 patent/US5483735A/en not_active Expired - Fee Related
- 1994-03-22 JP JP07668094A patent/JP3284156B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3284156B2 (ja) | 2002-05-20 |
| JPH076332A (ja) | 1995-01-10 |
| DE69420766T2 (de) | 2000-06-29 |
| DE69420766D1 (de) | 1999-10-28 |
| MY111205A (en) | 1999-09-30 |
| US5483735A (en) | 1996-01-16 |
| SG48089A1 (en) | 1998-04-17 |
| KR100297877B1 (ko) | 2001-10-24 |
| KR940022387A (ko) | 1994-10-20 |
| HK1013363A1 (en) | 1999-08-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG2A | Definitive protection |
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