ES2152707T3 - Baños para la produccion de microestructuras. - Google Patents

Baños para la produccion de microestructuras.

Info

Publication number
ES2152707T3
ES2152707T3 ES97944783T ES97944783T ES2152707T3 ES 2152707 T3 ES2152707 T3 ES 2152707T3 ES 97944783 T ES97944783 T ES 97944783T ES 97944783 T ES97944783 T ES 97944783T ES 2152707 T3 ES2152707 T3 ES 2152707T3
Authority
ES
Spain
Prior art keywords
microstructures
bath
bathrooms
production
manner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97944783T
Other languages
English (en)
Inventor
Eugen Ermantraut
Klaus Wohlfart
Johann Michael Kohler
Torsten Schulz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Clondiag Chip Technologies GmbH
Original Assignee
Clondiag Chip Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clondiag Chip Technologies GmbH filed Critical Clondiag Chip Technologies GmbH
Application granted granted Critical
Publication of ES2152707T3 publication Critical patent/ES2152707T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Weting (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Catalysts (AREA)

Abstract

LA INVENCION SE REFIERE A NUEVOS TIPOS DE BAÑOS PARA ELABORACION DE MICROESTRUCTURAS, QUE SON NECESARIA EN LOS CAMPOS MAS VARIADO DE APLICACION DE TECNICAS DE MICROSISTEMAS Y MICROESTRUCTURACION. LA INVENCION TIENE COMO OBJETIVO EL SUMINISTRAR NUEVOS TIPOS DE BAÑOS PARA LA ELABORACION DE MICROESTRUCTURAS QUE SUMINISTRAN UNA SOLUCION MAS ECONOMICA Y, SOBRE TODO, UNA SOLUCION MAS LIMPIA A LOS PROBLEMAS DE ELIMINACION QUE TIENEN TODOS LOS PROCEDIMIENTOS CONOCIDOS PREVIAMENTE PARA LA ELABORACION DE MICROESTRUCTURAS. ESTE OBJETIVO SE CONSIGUE DE TAL MODO QUE AL MENOS UN CATALIZADOR BIOGENICO (EN PARTICULAR, UNA ENZIMA) SE AÑADE AL BAÑO PARTICULAR QUE ACTUA SOBRE UNA PELICULA DELGADA PREVIAMENTE DETERMINADA.
ES97944783T 1996-08-23 1997-08-22 Baños para la produccion de microestructuras. Expired - Lifetime ES2152707T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19634122A DE19634122A1 (de) 1996-08-23 1996-08-23 Neuartige Bäder zur Erzeugung von Mikrostrukturen

Publications (1)

Publication Number Publication Date
ES2152707T3 true ES2152707T3 (es) 2001-02-01

Family

ID=7803521

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97944783T Expired - Lifetime ES2152707T3 (es) 1996-08-23 1997-08-22 Baños para la produccion de microestructuras.

Country Status (8)

Country Link
US (2) US6645744B2 (es)
EP (1) EP0920655B1 (es)
JP (1) JP3762794B2 (es)
AT (1) ATE196553T1 (es)
DE (2) DE19634122A1 (es)
DK (1) DK0920655T3 (es)
ES (1) ES2152707T3 (es)
WO (1) WO1998008145A1 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19845041C2 (de) * 1998-09-30 2002-01-17 Siemens Ag Verfahren zur Erzeugung photostrukturierbarer Schichten mit Strukturgrößen im Mikrobereich
US7713053B2 (en) * 2005-06-10 2010-05-11 Protochips, Inc. Reusable template for creation of thin films; method of making and using template; and thin films produced from template
US9828597B2 (en) 2006-11-22 2017-11-28 Toyota Motor Engineering & Manufacturing North America, Inc. Biofunctional materials
US10988714B2 (en) 2010-06-21 2021-04-27 Regents Of The University Of Minnesota Methods of facilitating removal of a fingerprint from a substrate or a coating
US8796009B2 (en) 2010-06-21 2014-08-05 Toyota Motor Engineering & Manufacturing North America, Inc. Clearcoat containing thermolysin-like protease from Bacillus stearothermophilus for cleaning of insect body stains
US11015149B2 (en) 2010-06-21 2021-05-25 Toyota Motor Corporation Methods of facilitating removal of a fingerprint
US9121016B2 (en) 2011-09-09 2015-09-01 Toyota Motor Engineering & Manufacturing North America, Inc. Coatings containing polymer modified enzyme for stable self-cleaning of organic stains
US9388370B2 (en) 2010-06-21 2016-07-12 Toyota Motor Engineering & Manufacturing North America, Inc. Thermolysin-like protease for cleaning insect body stains

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1202592A (en) 1967-05-10 1970-08-19 Ewart Gordon Harrold Etching proteinaceous sheets
US3620737A (en) * 1968-08-09 1971-11-16 Eastman Kodak Co Etching of differentially hardened plates by enzymes
DE2253944C2 (de) 1972-11-03 1983-02-24 Agfa-Gevaert Ag, 5090 Leverkusen Verfahren zur Herstellung eines Reliefbildes
JPS6052422B2 (ja) 1979-04-18 1985-11-19 キヤノン株式会社 レリ−フパタ−ン作成法
US5362413A (en) * 1984-03-23 1994-11-08 The Clorox Company Low-temperature-effective detergent compositions and delivery systems therefor
JPS60235132A (ja) 1984-05-07 1985-11-21 Mitsubishi Electric Corp パタ−ン形成法
US4983393A (en) * 1987-07-21 1991-01-08 Maximed Corporation Intra-vaginal device and method for sustained drug release
US5212050A (en) * 1988-11-14 1993-05-18 Mier Randall M Method of forming a permselective layer
DE4024748C1 (en) * 1990-08-03 1992-03-12 Carlo Dr. 8031 Eichenau De Schmelzer Hologram die prodn. for interference pattern - by exposing holographic recording material to laser beam, developing enzyme treating forming plastic impression and electroplating
US5527487A (en) * 1991-11-27 1996-06-18 Novo Nordisk A/S Enzymatic detergent composition and method for enzyme stabilization
ATE161287T1 (de) * 1992-03-23 1998-01-15 Siemens Ag Immobilisierung biochemischer substanzen
JPH11513381A (ja) * 1995-09-28 1999-11-16 カリフォルニア・インスティテュート・オヴ・テクノロジー システインプロテアーゼ阻害剤としての金属錯体

Also Published As

Publication number Publication date
DK0920655T3 (da) 2001-01-29
ATE196553T1 (de) 2000-10-15
JP2000517177A (ja) 2000-12-26
WO1998008145A1 (de) 1998-02-26
DE19634122A1 (de) 1998-02-26
DE59702385D1 (de) 2000-10-26
US20030161789A1 (en) 2003-08-28
JP3762794B2 (ja) 2006-04-05
US20010049131A1 (en) 2001-12-06
US6645744B2 (en) 2003-11-11
EP0920655A1 (de) 1999-06-09
EP0920655B1 (de) 2000-09-20

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