ES2157595T3 - Filtro de energia, microscopio de transmision y procedimiento de filtrado de energia asociado. - Google Patents

Filtro de energia, microscopio de transmision y procedimiento de filtrado de energia asociado.

Info

Publication number
ES2157595T3
ES2157595T3 ES97938977T ES97938977T ES2157595T3 ES 2157595 T3 ES2157595 T3 ES 2157595T3 ES 97938977 T ES97938977 T ES 97938977T ES 97938977 T ES97938977 T ES 97938977T ES 2157595 T3 ES2157595 T3 ES 2157595T3
Authority
ES
Spain
Prior art keywords
energy filter
deflector
procedure
optical axis
deflector system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97938977T
Other languages
English (en)
Inventor
Bernard Jouffrey
Cecile Hebert-Souche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of ES2157595T3 publication Critical patent/ES2157595T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/055—Arrangements for energy or mass analysis magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)

Abstract

LA INVENCION SE REFIERE A UN FILTRO DE ENERGIA QUE RECIBE UN HAZ ELECTRONICO (72) ORIENTADO SEGUN UN EJE OPTICO (5). EL FILTRO COMPRENDE UN SISTEMA DEFLECTOR (30) QUE DESVIA EN UN PLANO DE DISPERSION QUE NO INCLUYE EL EJE OPTICO (5), EL HAZ RECIBIDO (72) Y UN SISTEMA DISPERSIVO (40) QUE GUIA EL HAZ ENVIADO POR EL SISTEMA DEFLECTOR EN UNA TRAYECTORIA OPTICA(80) INSCRITA EN EL PLANO DE DISPERSION Y QUE VUELVE AL SISTEMA DEFLECTOR. EL SISTEMA DEFLECTOR DEVUELVE EN ALINEAMIENTO CON EL EJE OPTICO EL HAZ PROCEDENTE DEL SISTEMA DISPERSIVO. EL SISTEMA DEFLECTOR ESTA FORMADO POR UN SOLO ELEMENTO DEFLECTOR QUE GARANTIZA A LA IDA Y A LA VUELTA DESVIACIONES INVERSAS DEL HAZ. APLICACION EN LA MICROSCOPIA ELECTRONICA CON TRANSMISION.
ES97938977T 1996-09-12 1997-09-03 Filtro de energia, microscopio de transmision y procedimiento de filtrado de energia asociado. Expired - Lifetime ES2157595T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9611146A FR2753303B1 (fr) 1996-09-12 1996-09-12 Filtre d'energie, microscope electronique a transmission et procede de filtrage d'energie associe

Publications (1)

Publication Number Publication Date
ES2157595T3 true ES2157595T3 (es) 2001-08-16

Family

ID=9495689

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97938977T Expired - Lifetime ES2157595T3 (es) 1996-09-12 1997-09-03 Filtro de energia, microscopio de transmision y procedimiento de filtrado de energia asociado.

Country Status (7)

Country Link
US (1) US6392228B1 (es)
EP (1) EP0925599B1 (es)
JP (1) JP3981414B2 (es)
DE (1) DE69705227T2 (es)
ES (1) ES2157595T3 (es)
FR (1) FR2753303B1 (es)
WO (1) WO1998011593A1 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3518271B2 (ja) * 1997-08-28 2004-04-12 株式会社日立製作所 エネルギーフィルタおよびこれを備えた電子顕微鏡
EP1058287B1 (en) * 1999-06-01 2007-11-14 Jeol Ltd. Magnetic energy filter
PL368785A1 (pl) * 2004-06-28 2006-01-09 Krzysztof Grzelakowski Obrazujący filtr energii dla elektronów i innych elektrycznie naładowanych cząstek oraz sposób filtrowania energii elektronów i innych elektrycznie naładowanych cząstek w urządzeniach elektrooptycznych za pomocą obrazującego filtru energii
EP2998979A1 (en) * 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
GB2541905B (en) * 2015-09-02 2018-05-16 Treeemagineers Ltd Harnesses

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
DE69213157T2 (de) * 1991-10-24 1997-03-06 Philips Electronics Nv Elektronenstrahlvorrichtung

Also Published As

Publication number Publication date
EP0925599B1 (fr) 2001-06-13
JP2001508584A (ja) 2001-06-26
FR2753303A1 (fr) 1998-03-13
EP0925599A1 (fr) 1999-06-30
JP3981414B2 (ja) 2007-09-26
US6392228B1 (en) 2002-05-21
FR2753303B1 (fr) 1998-12-04
DE69705227T2 (de) 2002-04-25
DE69705227D1 (de) 2001-07-19
WO1998011593A1 (fr) 1998-03-19

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