ES2159747T3 - Microfono micromecanico. - Google Patents

Microfono micromecanico.

Info

Publication number
ES2159747T3
ES2159747T3 ES96921908T ES96921908T ES2159747T3 ES 2159747 T3 ES2159747 T3 ES 2159747T3 ES 96921908 T ES96921908 T ES 96921908T ES 96921908 T ES96921908 T ES 96921908T ES 2159747 T3 ES2159747 T3 ES 2159747T3
Authority
ES
Spain
Prior art keywords
microphone
transducer element
transducer
manufactured
micromechanical microphone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96921908T
Other languages
English (en)
Inventor
Jesper Bay
Siebe Bouwstra
Ole Hansen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sonion ApS
Original Assignee
Microtronic AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtronic AS filed Critical Microtronic AS
Application granted granted Critical
Publication of ES2159747T3 publication Critical patent/ES2159747T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Laminated Bodies (AREA)
  • Obtaining Desirable Characteristics In Audible-Bandwidth Transducers (AREA)

Abstract

EL MICROFONO FABRICADO MICROMECANICAMENTE CONSTA DE UNA CARCASA (1) EN LA CUAL UN ELEMENTO (2) TRANSDUCTOR ESTA COLOCADO, Y QUE TIENE UNA TOMA (3) DE SONIDO EN UN LADO DEL ELEMENTO TRANSDUCTOR Y UN ORIFICIO (4) DE COMPENSACION DE PRESION EN EL OTRO LADO. CON OBJETO DE PROTEGER EL MICROFONO CONTRA LA HUMEDAD, POLVO Y SUCIEDAD, QUE PUEDA PARCIAL O TOTALMENTE AFECTAR A SUS CARACTERISTICAS, UNA MEMBRANA ACUSTICA (6, 7) SELLANTE ESTA COLOCADA EN CADA LADO DEL ELEMENTO TRANSDUCTOR. EL ELEMENTO TRANSDUCTOR PODRA, POR EJEMPLO, SER UN TRANSDUCTOR CAPACITATIVO CON POLARIZACION EXTERNA O UN TRANSDUCTOR BASADO EN UN ELECTRETO. EL MICROFONO, QUE SE PUEDE FABRICAR CON DIMENSIONES MUY PEQUEÑAS, TIENE APLICACION ENTRE OTRAS COMO APARATO PARA SORDOS.
ES96921908T 1995-06-23 1996-06-21 Microfono micromecanico. Expired - Lifetime ES2159747T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK072695A DK172085B1 (da) 1995-06-23 1995-06-23 Mikromekanisk mikrofon

Publications (1)

Publication Number Publication Date
ES2159747T3 true ES2159747T3 (es) 2001-10-16

Family

ID=8096839

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96921908T Expired - Lifetime ES2159747T3 (es) 1995-06-23 1996-06-21 Microfono micromecanico.

Country Status (8)

Country Link
US (1) US6075867A (es)
EP (1) EP0872153B1 (es)
JP (1) JPH11508101A (es)
AT (1) ATE205355T1 (es)
DE (1) DE69615056T2 (es)
DK (2) DK172085B1 (es)
ES (1) ES2159747T3 (es)
WO (1) WO1997001258A1 (es)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1318783A (fr) * 1962-01-12 1963-02-22 Dispositif de sécurité pour le blocage des portes
US7881486B1 (en) * 1996-12-31 2011-02-01 Etymotic Research, Inc. Directional microphone assembly
DE19715365C2 (de) * 1997-04-11 1999-03-25 Sennheiser Electronic Kondensatormikrofon
US6088463A (en) * 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
EP1142442A2 (en) 1999-01-07 2001-10-10 Sarnoff Corporation Hearing aid with large diaphragm microphone element including a printed circuit board
US7003127B1 (en) 1999-01-07 2006-02-21 Sarnoff Corporation Hearing aid with large diaphragm microphone element including a printed circuit board
AT407322B (de) * 1999-03-23 2001-02-26 Akg Acoustics Gmbh Klein-mikrophon
US6522762B1 (en) 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6505076B2 (en) * 2000-12-08 2003-01-07 Advanced Bionics Corporation Water-resistant, wideband microphone subassembly
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
GB0113255D0 (en) * 2001-05-31 2001-07-25 Scient Generics Ltd Number generator
US20070113964A1 (en) * 2001-12-10 2007-05-24 Crawford Scott A Small water-repellant microphone having improved acoustic performance and method of constructing same
US20030210799A1 (en) * 2002-05-10 2003-11-13 Gabriel Kaigham J. Multiple membrane structure and method of manufacture
JP2004056438A (ja) * 2002-07-19 2004-02-19 Matsushita Electric Ind Co Ltd マイクロフォン
US7072482B2 (en) 2002-09-06 2006-07-04 Sonion Nederland B.V. Microphone with improved sound inlet port
US7142682B2 (en) 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
WO2004103015A1 (en) * 2003-05-15 2004-11-25 Oticon A/S Microphone with adjustable properties
JP4188325B2 (ja) * 2005-02-09 2008-11-26 ホシデン株式会社 防塵板内蔵マイクロホン
DE102005008512B4 (de) * 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005008514B4 (de) * 2005-02-24 2019-05-16 Tdk Corporation Mikrofonmembran und Mikrofon mit der Mikrofonmembran
DE102005008511B4 (de) * 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
WO2006129821A1 (ja) * 2005-05-31 2006-12-07 Ngk Insulators, Ltd. 物体の通過検出装置
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
DE102005053767B4 (de) * 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
US8081783B2 (en) * 2006-06-20 2011-12-20 Industrial Technology Research Institute Miniature acoustic transducer
TWI370101B (en) * 2007-05-15 2012-08-11 Ind Tech Res Inst Package and packaging assembly of microelectromechanical sysyem microphone
TWI323242B (en) * 2007-05-15 2010-04-11 Ind Tech Res Inst Package and packageing assembly of microelectromechanical system microphone
TWI343756B (en) * 2009-08-10 2011-06-11 Ind Tech Res Inst Flat loudspeaker structure
US7832080B2 (en) * 2007-10-11 2010-11-16 Etymotic Research, Inc. Directional microphone assembly
TWI336770B (en) * 2007-11-05 2011-02-01 Ind Tech Res Inst Sensor
WO2009154981A2 (en) * 2008-05-27 2009-12-23 Tufts University Mems microphone array on a chip
US9071910B2 (en) * 2008-07-24 2015-06-30 Cochlear Limited Implantable microphone device
TWI405472B (zh) * 2008-07-31 2013-08-11 Htc Corp 電子裝置及其電聲換能器
DE102008058787B4 (de) * 2008-11-24 2017-06-08 Sennheiser Electronic Gmbh & Co. Kg Mikrofon
WO2010102342A1 (en) 2009-03-13 2010-09-16 Cochlear Limited Improved dacs actuator
CN102428711A (zh) * 2009-05-18 2012-04-25 美商楼氏电子有限公司 具有降低的振动灵敏度的麦克风
WO2011116246A1 (en) * 2010-03-19 2011-09-22 Advanced Bionics Ag Waterproof acoustic element enclosures and apparatus including the same
DE102010017959A1 (de) * 2010-04-22 2011-10-27 Epcos Ag Mikrofon mit breitem Dynamikbereich
EP2432249A1 (en) * 2010-07-02 2012-03-21 Knowles Electronics Asia PTE. Ltd. Microphone
EP2666306B1 (en) 2011-01-18 2017-03-15 Advanced Bionics AG Moisture resistant headpieces and implantable cochlear stimulation systems including the same
US9693135B2 (en) * 2012-01-05 2017-06-27 Tdk Corporation Differential microphone and method for driving a differential microphone
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device
US8983097B2 (en) 2012-02-29 2015-03-17 Infineon Technologies Ag Adjustable ventilation openings in MEMS structures
US9002037B2 (en) 2012-02-29 2015-04-07 Infineon Technologies Ag MEMS structure with adjustable ventilation openings
US10136226B2 (en) 2012-12-18 2018-11-20 Tdk Corporation Top-port MEMS microphone and method of manufacturing the same
US9173024B2 (en) * 2013-01-31 2015-10-27 Invensense, Inc. Noise mitigating microphone system
DE102013207497A1 (de) 2013-04-25 2014-11-13 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur
DE102013106353B4 (de) * 2013-06-18 2018-06-28 Tdk Corporation Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement
US9181080B2 (en) 2013-06-28 2015-11-10 Infineon Technologies Ag MEMS microphone with low pressure region between diaphragm and counter electrode
US9024396B2 (en) 2013-07-12 2015-05-05 Infineon Technologies Ag Device with MEMS structure and ventilation path in support structure
DE102013214823A1 (de) * 2013-07-30 2015-02-05 Robert Bosch Gmbh Mikrofonbauteil mit mindestens zwei MEMS-Mikrofonbauelementen
US9510107B2 (en) 2014-03-06 2016-11-29 Infineon Technologies Ag Double diaphragm MEMS microphone without a backplate element
US9438979B2 (en) * 2014-03-06 2016-09-06 Infineon Technologies Ag MEMS sensor structure for sensing pressure waves and a change in ambient pressure
US9494477B2 (en) 2014-03-31 2016-11-15 Infineon Technologies Ag Dynamic pressure sensor
US9554207B2 (en) * 2015-04-30 2017-01-24 Shure Acquisition Holdings, Inc. Offset cartridge microphones
GB2554470A (en) 2016-09-26 2018-04-04 Cirrus Logic Int Semiconductor Ltd MEMS device and process
DE102017103195B4 (de) * 2017-02-16 2021-04-08 Infineon Technologies Ag Mikroelektromechanisches Mikrofon und Herstellungsverfahren für ein Mikroelektromechanisches Mikrofon
WO2018178772A2 (en) 2017-03-28 2018-10-04 Nanofone Ltd. High performance sealed-gap capacitive microphone
DE102017213277B4 (de) * 2017-08-01 2019-08-14 Infineon Technologies Ag Mems-sensoren, verfahren zum bereitstellen derselben und verfahren zum betreiben eines mems-sensors
WO2019135204A1 (en) 2018-01-08 2019-07-11 Nanofone Limited High performance sealed-gap capacitive microphone with various gap geometries
CN112334867B (zh) 2018-05-24 2025-11-11 纽约州立大学研究基金会 电容传感器
WO2020072904A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Acoustic transducers with a low pressure zone and diaphragms having enhanced compliance
US11206494B2 (en) 2018-10-05 2021-12-21 Knowles Electronics, Llc Microphone device with ingress protection
DE112019004979B4 (de) 2018-10-05 2025-10-02 Knowles Electronics, Llc Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen
US11932533B2 (en) 2020-12-21 2024-03-19 Infineon Technologies Ag Signal processing circuit for triple-membrane MEMS device
US11889283B2 (en) * 2020-12-21 2024-01-30 Infineon Technologies Ag Triple-membrane MEMS device
US12240748B2 (en) 2021-03-21 2025-03-04 Knowles Electronics, Llc MEMS die and MEMS-based sensor
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US12552659B2 (en) 2021-10-06 2026-02-17 Knowles Electronics, Llc MEMS die and MEMS-based sensor
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
KR20230115058A (ko) * 2022-01-26 2023-08-02 주식회사 디비하이텍 맴스 마이크로폰 구조 및 제조방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3980838A (en) * 1974-02-20 1976-09-14 Tokyo Shibaura Electric Co., Ltd. Plural electret electroacoustic transducer
FR2402374A1 (fr) * 1977-08-30 1979-03-30 Thomson Brandt Dispositif de montage d'un microphone incorpore dans un appareil d'enregistrement sonore et appareil a microphone incorpore
FR2542552B1 (fr) * 1983-03-07 1986-04-11 Thomson Csf Transducteur electroacoustique a diaphragme piezo-electrique
US5085070A (en) * 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
DE59406852D1 (de) * 1993-11-23 1998-10-08 Lux Wellenhof Gabriele Hörtesteinrichtung und Verfahren zum Testen

Also Published As

Publication number Publication date
JPH11508101A (ja) 1999-07-13
EP0872153B1 (en) 2001-09-05
DK0872153T3 (da) 2001-11-19
EP0872153A1 (en) 1998-10-21
US6075867A (en) 2000-06-13
DE69615056D1 (de) 2001-10-11
DE69615056T2 (de) 2002-04-25
DK72695A (da) 1996-12-24
ATE205355T1 (de) 2001-09-15
DK172085B1 (da) 1997-10-13
WO1997001258A1 (en) 1997-01-09

Similar Documents

Publication Publication Date Title
ATE205355T1 (de) Mikromechanisches mikrofon
DK1432281T3 (da) Elektroakustisk miniaturetransducer til en høreapparat-indretning
DK1353531T3 (da) Akustisk transducer med reduceret tykkelse
ATE429787T1 (de) Hörgerät
EP0319010A3 (en) Microphone with frequency pre-emphasis
BR0017272A (pt) Protetor auricular de espuma
WO2007053653A3 (en) Improved output transducers for hearing systems
SE8402914D0 (sv) Horlur
ATE240512T1 (de) Druckwandler mit einer gespannten membran
ATE484232T1 (de) Implantierbares medizinprodukt mit integriertem akustischem wandler
ATE483329T1 (de) Akustisches sensorelement
ES2048834T3 (es) Metodo para conducir instalaciones de separacion con membranas.
ES2078067T3 (es) Altavoz.
DK1377119T3 (da) Akustikmodul til et höreapparat
ES2134528T3 (es) Elemento de enclavamiento con conmutador incorporado.
FI20050594A7 (fi) Vesitiivis mikrofonikalvo
ATE246434T1 (de) Schallkörper für feueralarmsysteme
ATE330414T1 (de) Kontaktierung für elektrostatische mikrofonwandler
ES2185633T3 (es) Elementos de sujecion para asegurar uniones de elctrodo.
ATE463729T1 (de) Hydraulischer druckmittler und druckaufnehmer bzw. differenzdruckaufnehmer mit hydraulischem druckmittler
ES2101278T3 (es) Dispositivo corta-circuito para conducto de gas a baja o media presion.
US935274A (en) Antiseptic protector for telephone transmitters or receivers.
SE9103303D0 (sv) Air pressure generator
BR0101118A (pt) Dispositivo alto-falante
ATE457116T1 (de) Hörgerät mit druckausgleich für wandler

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 872153

Country of ref document: ES