ES2177311T3 - Procedimiento para el deposito bajo vacio de un sustrato curvo. - Google Patents
Procedimiento para el deposito bajo vacio de un sustrato curvo.Info
- Publication number
- ES2177311T3 ES2177311T3 ES99940277T ES99940277T ES2177311T3 ES 2177311 T3 ES2177311 T3 ES 2177311T3 ES 99940277 T ES99940277 T ES 99940277T ES 99940277 T ES99940277 T ES 99940277T ES 2177311 T3 ES2177311 T3 ES 2177311T3
- Authority
- ES
- Spain
- Prior art keywords
- curved substrate
- procedure
- deposit under
- under empty
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 3
- 239000000463 material Substances 0.000 abstract 3
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Abstract
Procedimiento para el tratamiento bajo vacío de cualquier sustrato curvo, del tipo según el cual se provoca la pulverización catódica de un material procedente de una fuente de material dada, sobre este sustrato curvo (10), para formar un depósito, sobre dicho sustrato curvo de una capa de dicho material, caracterizado porque se interpone, entre el sustrato curvo (10) y la fuente de material (13), a distancia del sustrato curvo (10), un protector (19) fijo con relación al sustrato curvo (10), y cuya proyección sobre un plano según una dirección perpendicular a este plano tiene una superficie inferior al 10 % de la superficie de la proyección del sustrato curvo (10) sobre este mismo plano.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9811100A FR2783001B1 (fr) | 1998-09-04 | 1998-09-04 | Procede pour le traitement sous vide d'un quelconque substrat courbe, notamment un verre de lunettes, et cache propre a la mise en oeuvre d'un tel procede |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2177311T3 true ES2177311T3 (es) | 2002-12-01 |
Family
ID=9530149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES99940277T Expired - Lifetime ES2177311T3 (es) | 1998-09-04 | 1999-09-02 | Procedimiento para el deposito bajo vacio de un sustrato curvo. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7122223B1 (es) |
| EP (1) | EP1114200B1 (es) |
| JP (1) | JP4574011B2 (es) |
| AT (1) | ATE217362T1 (es) |
| AU (1) | AU761513B2 (es) |
| CA (1) | CA2341608C (es) |
| DE (1) | DE69901455T2 (es) |
| ES (1) | ES2177311T3 (es) |
| FR (1) | FR2783001B1 (es) |
| WO (1) | WO2000014294A1 (es) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7014317B2 (en) | 2001-11-02 | 2006-03-21 | Essilor International (Compagnie Generale D'optique) | Method for manufacturing multifocal lenses |
| DE10234855A1 (de) * | 2002-07-31 | 2004-02-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Einrichtung zur Einstellung einer vorgegebenen Schichtdickenverteilung bei Vakuumbeschichtungsprozessen auf bewegten Substraten |
| US8347814B2 (en) * | 2008-01-22 | 2013-01-08 | Raytheon Canada Limited | Method and apparatus for coating a curved surface |
| US8293017B2 (en) * | 2008-04-10 | 2012-10-23 | Raytheon Canada Limited | Method and apparatus for coating surfaces |
| US20090258151A1 (en) * | 2008-04-10 | 2009-10-15 | Raytheon Company | Method and Apparatus for Coating Curved Surfaces |
| US8398776B2 (en) * | 2008-05-12 | 2013-03-19 | Raytheon Canada Limited | Method and apparatus for supporting workpieces in a coating apparatus |
| US8246748B2 (en) * | 2008-07-09 | 2012-08-21 | Raytheon Canada Limited | Method and apparatus for coating surfaces |
| US20100047594A1 (en) * | 2008-08-20 | 2010-02-25 | Aharon Inspektor | Equipment and method for physical vapor deposition |
| US20110020623A1 (en) * | 2009-07-22 | 2011-01-27 | Raytheon Company | Method and Apparatus for Repairing an Optical Component Substrate Through Coating |
| CN104988464B (zh) * | 2015-06-30 | 2017-10-27 | 中国工程物理研究院材料研究所 | 一种轴对称曲面件内表面均匀磁控溅射沉积方法及其装置 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1380432A (fr) * | 1961-12-14 | 1964-12-04 | Siemens Ag | Procédé pour déposer au moyen d'une vapeur une couche sur un support, en particulier un corps semi-conducteur en forme de disque |
| US3627569A (en) * | 1968-12-27 | 1971-12-14 | Bell Telephone Labor Inc | Deposition of thin films with controlled thickness and planar area profile |
| FR2406217A1 (fr) * | 1977-10-14 | 1979-05-11 | Essilor Int | Procede pour le marquage d'une lentille ophtalmique en matiere organique, et une telle lentille ainsi marquee |
| US4222345A (en) * | 1978-11-30 | 1980-09-16 | Optical Coating Laboratory, Inc. | Vacuum coating apparatus with rotary motion assembly |
| JPH0239588B2 (ja) * | 1984-04-16 | 1990-09-06 | Ulvac Corp | Puranetariishikiseimakusochiniokerumakuatsushuseisochi |
| JPS62239103A (ja) * | 1986-04-11 | 1987-10-20 | Alps Electric Co Ltd | プラスチツクレンズ |
| US5225057A (en) | 1988-02-08 | 1993-07-06 | Optical Coating Laboratory, Inc. | Process for depositing optical films on both planar and non-planar substrates |
| DE3816578C1 (en) * | 1988-05-14 | 1989-03-16 | Agfa-Gevaert Ag, 5090 Leverkusen, De | Process and device for the vapour deposition of graded-light filter layers on transparent plates |
| JPH0331473A (ja) * | 1989-06-27 | 1991-02-12 | Mitsubishi Electric Corp | プラネタリー式成膜装置 |
| US5389397A (en) | 1989-08-29 | 1995-02-14 | North American Philips Corporation | Method for controlling the thickness distribution of a deposited layer |
| JP2825918B2 (ja) * | 1990-03-13 | 1998-11-18 | キヤノン株式会社 | 真空蒸着装置 |
| US5254236A (en) * | 1991-01-25 | 1993-10-19 | Shibaura Engineering Works Co., Ltd. | Sputtering apparatus |
| JPH04371578A (ja) * | 1991-06-19 | 1992-12-24 | Sony Corp | マグネトロンスパッタリング装置 |
| JPH0643304A (ja) * | 1992-07-24 | 1994-02-18 | Nikon Corp | 反射防止膜及び反射防止膜付き光学部品 |
| JP3412849B2 (ja) * | 1992-12-25 | 2003-06-03 | キヤノン株式会社 | 薄膜蒸着装置 |
| US5724189A (en) * | 1995-12-15 | 1998-03-03 | Mcdonnell Douglas Corporation | Methods and apparatus for creating an aspheric optical element and the aspheric optical elements formed thereby |
| JPH10176267A (ja) * | 1996-12-13 | 1998-06-30 | Applied Materials Inc | スパッタ装置 |
| GB9701114D0 (en) * | 1997-01-20 | 1997-03-12 | Coherent Optics Europ Ltd | Three-dimensional masking method for control of optical coating thickness |
-
1998
- 1998-09-04 FR FR9811100A patent/FR2783001B1/fr not_active Expired - Fee Related
-
1999
- 1999-09-02 US US09/786,412 patent/US7122223B1/en not_active Expired - Lifetime
- 1999-09-02 AT AT99940277T patent/ATE217362T1/de not_active IP Right Cessation
- 1999-09-02 ES ES99940277T patent/ES2177311T3/es not_active Expired - Lifetime
- 1999-09-02 EP EP99940277A patent/EP1114200B1/fr not_active Expired - Lifetime
- 1999-09-02 DE DE69901455T patent/DE69901455T2/de not_active Expired - Lifetime
- 1999-09-02 WO PCT/FR1999/002092 patent/WO2000014294A1/fr not_active Ceased
- 1999-09-02 JP JP2000569032A patent/JP4574011B2/ja not_active Expired - Lifetime
- 1999-09-02 CA CA002341608A patent/CA2341608C/fr not_active Expired - Fee Related
- 1999-09-02 AU AU54280/99A patent/AU761513B2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1114200B1 (fr) | 2002-05-08 |
| FR2783001B1 (fr) | 2000-11-24 |
| AU761513B2 (en) | 2003-06-05 |
| WO2000014294A1 (fr) | 2000-03-16 |
| DE69901455T2 (de) | 2002-12-12 |
| FR2783001A1 (fr) | 2000-03-10 |
| EP1114200A1 (fr) | 2001-07-11 |
| JP4574011B2 (ja) | 2010-11-04 |
| DE69901455D1 (de) | 2002-06-13 |
| JP2002524659A (ja) | 2002-08-06 |
| CA2341608C (fr) | 2005-07-12 |
| US7122223B1 (en) | 2006-10-17 |
| AU5428099A (en) | 2000-03-27 |
| CA2341608A1 (fr) | 2000-03-16 |
| ATE217362T1 (de) | 2002-05-15 |
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