ES2178303T3 - Procedimiento para la fabricacion de un dispositivo micromecanico. - Google Patents

Procedimiento para la fabricacion de un dispositivo micromecanico.

Info

Publication number
ES2178303T3
ES2178303T3 ES98965594T ES98965594T ES2178303T3 ES 2178303 T3 ES2178303 T3 ES 2178303T3 ES 98965594 T ES98965594 T ES 98965594T ES 98965594 T ES98965594 T ES 98965594T ES 2178303 T3 ES2178303 T3 ES 2178303T3
Authority
ES
Spain
Prior art keywords
procedure
manufacture
micromechanical device
layer
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98965594T
Other languages
English (en)
Inventor
Josef Hirtreiter
Bernhard Elsner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2178303T3 publication Critical patent/ES2178303T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Chemically Coating (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

Procedimiento para la fabricación de un dispositivo micromecánico (100; 200; 300; 400; 600; 700) con las etapas: preparación de un substrato (10; 710) con una región de anclaje (20; 120; 220; 320; 325; 420; 425; 620; 755), formación de una capa de sacrificio (25) sobre el substrato (10; 710) dejando libre la región de anclaje (20; 120; 220; 320; 325; 420, 425; 620; 755); deposición de una capa adhesiva (30) sobre la capa de sacrificio (25) y la región de anclaje (20; 120; 220; 320, 325; 420, 425; 755); formación de una máscara (40, 50) sobre la capa adhesiva (30); deposición de una capa galvánica (35) sobre la región no enmascarada de la capa adhesiva (30); y retirada de la máscara (40, 50) y de la capa de sacrificio (25).
ES98965594T 1998-01-12 1998-12-01 Procedimiento para la fabricacion de un dispositivo micromecanico. Expired - Lifetime ES2178303T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19800745A DE19800745A1 (de) 1998-01-12 1998-01-12 Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung

Publications (1)

Publication Number Publication Date
ES2178303T3 true ES2178303T3 (es) 2002-12-16

Family

ID=7854340

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98965594T Expired - Lifetime ES2178303T3 (es) 1998-01-12 1998-12-01 Procedimiento para la fabricacion de un dispositivo micromecanico.

Country Status (6)

Country Link
US (1) US6514670B1 (es)
EP (1) EP1055015B1 (es)
JP (1) JP4204193B2 (es)
DE (2) DE19800745A1 (es)
ES (1) ES2178303T3 (es)
WO (1) WO1999035305A1 (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19847305B4 (de) * 1998-10-14 2011-02-03 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Vorrichtung
DE19941363B4 (de) * 1999-08-31 2006-06-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines Mikroaktorbauteils
US20020071169A1 (en) 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6621611B2 (en) * 2000-05-31 2003-09-16 Siwave, Inc. Snap-down pivoting optical element
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
FR2820833B1 (fr) * 2001-02-15 2004-05-28 Teem Photonics Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
WO2002084732A2 (en) * 2001-04-13 2002-10-24 Koninklijke Philips Electronics N.V. Method of manufacturing an electronic device
DE10196538B3 (de) * 2001-06-21 2015-08-13 Mitsubishi Denki K.K. Herstellungsverfahren für einen Dünnschicht-Konstruktionskörper
US6544863B1 (en) 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers
FR2853645B1 (fr) * 2003-04-14 2005-07-08 Memscap Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique
DE102007048882A1 (de) * 2007-10-11 2009-04-23 Robert Bosch Gmbh Beschleunigungssensor
ITGE20120071A1 (it) 2012-07-19 2014-01-20 Darts Engineering Srl Sistema e metodo di monitoraggio di un territorio

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0543901B1 (en) 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithic accelerometer
ATE140658T1 (de) * 1991-04-10 1996-08-15 Dyconex Ag Metallfolie mit einer strukturierten oberfläche
US5511428A (en) * 1994-06-10 1996-04-30 Massachusetts Institute Of Technology Backside contact of sensor microstructures
US5526951A (en) * 1994-09-30 1996-06-18 Texas Instruments Incorporated Fabrication method for digital micro-mirror devices using low temperature CVD
DE19732250A1 (de) * 1997-07-26 1999-01-28 Bosch Gmbh Robert Verfahren zur Herstellung metallischer Mikrostrukturen

Also Published As

Publication number Publication date
EP1055015B1 (de) 2002-05-22
DE59804215D1 (de) 2002-06-27
JP4204193B2 (ja) 2009-01-07
WO1999035305A1 (de) 1999-07-15
JP2002500390A (ja) 2002-01-08
US6514670B1 (en) 2003-02-04
EP1055015A1 (de) 2000-11-29
DE19800745A1 (de) 1999-07-15

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