ES2180970T3 - Pastilla sustituible de carburo de silicio colada en cinta. - Google Patents

Pastilla sustituible de carburo de silicio colada en cinta.

Info

Publication number
ES2180970T3
ES2180970T3 ES97917718T ES97917718T ES2180970T3 ES 2180970 T3 ES2180970 T3 ES 2180970T3 ES 97917718 T ES97917718 T ES 97917718T ES 97917718 T ES97917718 T ES 97917718T ES 2180970 T3 ES2180970 T3 ES 2180970T3
Authority
ES
Spain
Prior art keywords
tape
colada
silk
carbide
substitute pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97917718T
Other languages
English (en)
Inventor
Thomas M Holmes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Ceramics and Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ceramics and Plastics Inc filed Critical Saint Gobain Ceramics and Plastics Inc
Application granted granted Critical
Publication of ES2180970T3 publication Critical patent/ES2180970T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

LA PRESENTE INVENCION SE REFIERE AL COLADO EN BANDA DE UNA PASTA LIQUIDA DE CARBURO DE SILICIO, PARA PRODUCIR EVENTUALMENTE UNA MICROPLAQUETA DE SILICIO CON UN GROSOR COMPRENDIDO ENTRE 0,5 Y 1 MM Y UN DIAMETRO DE AL MENOS 100 MM. DICHA MICROPLAQUETA TIENE UNA RESISTENCIA DE AL MENOS 30 MPA Y UNA POROSIDAD CARACTERIZADA PORQUE AL MENOS EL 85 % DE LOS POROS NO SON SUPERIORES A 12 MICRONES.
ES97917718T 1996-04-01 1997-03-31 Pastilla sustituible de carburo de silicio colada en cinta. Expired - Lifetime ES2180970T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/625,383 US5904892A (en) 1996-04-01 1996-04-01 Tape cast silicon carbide dummy wafer

Publications (1)

Publication Number Publication Date
ES2180970T3 true ES2180970T3 (es) 2003-02-16

Family

ID=24505827

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97917718T Expired - Lifetime ES2180970T3 (es) 1996-04-01 1997-03-31 Pastilla sustituible de carburo de silicio colada en cinta.

Country Status (10)

Country Link
US (1) US5904892A (es)
EP (1) EP0891311B1 (es)
JP (2) JPH11506570A (es)
KR (1) KR100276154B1 (es)
CN (1) CN1214666A (es)
AT (1) ATE220055T1 (es)
DE (1) DE69713758T2 (es)
DK (1) DK0891311T3 (es)
ES (1) ES2180970T3 (es)
WO (1) WO1997036843A1 (es)

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US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US20040173948A1 (en) * 2002-09-19 2004-09-09 Pandelisev Kiril A. Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
JP4198349B2 (ja) * 2001-11-08 2008-12-17 株式会社ブリヂストン 炭化ケイ素焼結体の洗浄方法
US20030233977A1 (en) * 2002-06-20 2003-12-25 Yeshwanth Narendar Method for forming semiconductor processing components
US6825123B2 (en) * 2003-04-15 2004-11-30 Saint-Goban Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
DE10328842B4 (de) 2003-06-26 2007-03-01 Siltronic Ag Suszeptor für eine chemische Gasphasenabscheidung, Verfahren zur Bearbeitung einer Halbleiterscheibe durch chemische Gasphasenabscheidung und nach dem Verfahren bearbeitete Halbleiterscheibe
US7132066B2 (en) 2003-09-30 2006-11-07 Ngk Insulators, Ltd. Method for producing honeycomb structure and honeycomb structure
US7501370B2 (en) * 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
CN100388412C (zh) * 2004-04-23 2008-05-14 上海华虹Nec电子有限公司 改善炉体两端膜厚面内均一性的方法
EP2011018B1 (en) 2006-04-12 2016-07-13 Soft Machines, Inc. Apparatus and method for processing an instruction matrix specifying parallel and dependent operations
CN107368285B (zh) 2006-11-14 2020-10-09 英特尔公司 多线程架构
SG183687A1 (en) 2007-08-03 2012-09-27 Errcive Inc Porous bodies and methods
US7727919B2 (en) 2007-10-29 2010-06-01 Saint-Gobain Ceramics & Plastics, Inc. High resistivity silicon carbide
TWI421965B (zh) * 2007-12-20 2014-01-01 聖高拜陶器塑膠公司 處理半導體製程元件之方法及其形成之元件
KR100990513B1 (ko) * 2008-07-10 2010-10-29 주식회사 도시환경이엔지 태양전지 셀의 웨이퍼 제조장치 및 이를 이용한 웨이퍼제조방법
WO2010051345A2 (en) * 2008-10-31 2010-05-06 Corning Incorporated Methods and apparatus for casting ceramic sheets
US8277743B1 (en) 2009-04-08 2012-10-02 Errcive, Inc. Substrate fabrication
US8359829B1 (en) 2009-06-25 2013-01-29 Ramberg Charles E Powertrain controls
JP5628530B2 (ja) * 2010-02-10 2014-11-19 株式会社ブリヂストン 貼り合わせ基板用支持基板およびその製造方法
US9833932B1 (en) 2010-06-30 2017-12-05 Charles E. Ramberg Layered structures
EP3156896B1 (en) 2010-09-17 2020-04-08 Soft Machines, Inc. Single cycle multi-branch prediction including shadow cache for early far branch prediction
US8865607B2 (en) 2010-11-22 2014-10-21 Saint-Gobain Ceramics & Plastics, Inc. Infiltrated silicon carbide bodies and methods of making
JP2012201543A (ja) * 2011-03-25 2012-10-22 Sumitomo Electric Ind Ltd 炭化珪素基板
CN103547993B (zh) 2011-03-25 2018-06-26 英特尔公司 通过使用由可分割引擎实例化的虚拟核来执行指令序列代码块
CN108108188B (zh) 2011-03-25 2022-06-28 英特尔公司 用于通过使用由可分区引擎实例化的虚拟核来支持代码块执行的存储器片段
KR101620676B1 (ko) 2011-03-25 2016-05-23 소프트 머신즈, 인크. 분할가능한 엔진에 의해 인스턴스화된 가상 코어를 이용한 코드 블록의 실행을 지원하는 레지스터 파일 세그먼트
US9442772B2 (en) 2011-05-20 2016-09-13 Soft Machines Inc. Global and local interconnect structure comprising routing matrix to support the execution of instruction sequences by a plurality of engines
CN107729267B (zh) 2011-05-20 2022-01-25 英特尔公司 资源的分散分配以及用于支持由多个引擎执行指令序列的互连结构
KR101703401B1 (ko) 2011-11-22 2017-02-06 소프트 머신즈, 인크. 다중 엔진 마이크로프로세서용 가속 코드 최적화기
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JP6088255B2 (ja) * 2013-01-17 2017-03-01 株式会社ブリヂストン 炭化ケイ素焼結体及びその製造方法
US9891924B2 (en) 2013-03-15 2018-02-13 Intel Corporation Method for implementing a reduced size register view data structure in a microprocessor
US9811342B2 (en) 2013-03-15 2017-11-07 Intel Corporation Method for performing dual dispatch of blocks and half blocks
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US9886279B2 (en) 2013-03-15 2018-02-06 Intel Corporation Method for populating and instruction view data structure by using register template snapshots
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WO2014150806A1 (en) 2013-03-15 2014-09-25 Soft Machines, Inc. A method for populating register view data structure by using register template snapshots
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US10275255B2 (en) 2013-03-15 2019-04-30 Intel Corporation Method for dependency broadcasting through a source organized source view data structure
WO2014151043A1 (en) 2013-03-15 2014-09-25 Soft Machines, Inc. A method for emulating a guest centralized flag architecture by using a native distributed flag architecture
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US9904625B2 (en) 2013-03-15 2018-02-27 Intel Corporation Methods, systems and apparatus for predicting the way of a set associative cache
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CN107602129B (zh) * 2017-10-12 2020-09-01 华中科技大学 一种SiC的水基流延制备方法

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US3726737A (en) * 1970-10-22 1973-04-10 Nippon Oil Seal Ind Co Ltd Method of producing silicon carbide articles having thin layer construction
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Also Published As

Publication number Publication date
JP2001039774A (ja) 2001-02-13
JPH11506570A (ja) 1999-06-08
CN1214666A (zh) 1999-04-21
DE69713758T2 (de) 2003-07-17
EP0891311A1 (en) 1999-01-20
DE69713758D1 (de) 2002-08-08
KR100276154B1 (ko) 2000-12-15
DK0891311T3 (da) 2002-10-28
EP0891311B1 (en) 2002-07-03
WO1997036843A1 (en) 1997-10-09
ATE220055T1 (de) 2002-07-15
KR20000005172A (ko) 2000-01-25
US5904892A (en) 1999-05-18

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