ES2182083T3 - Elemento piezoelectrico asi como procedimiento para su fabricacion. - Google Patents

Elemento piezoelectrico asi como procedimiento para su fabricacion.

Info

Publication number
ES2182083T3
ES2182083T3 ES97924885T ES97924885T ES2182083T3 ES 2182083 T3 ES2182083 T3 ES 2182083T3 ES 97924885 T ES97924885 T ES 97924885T ES 97924885 T ES97924885 T ES 97924885T ES 2182083 T3 ES2182083 T3 ES 2182083T3
Authority
ES
Spain
Prior art keywords
procedure
well
piezoelectric element
manufacturing
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97924885T
Other languages
English (en)
Inventor
Michael Riedel
Hans-Jurgen Sestak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of ES2182083T3 publication Critical patent/ES2182083T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Vibration Prevention Devices (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

LA INVENCION SE REFIERE A UN ELEMENTO PIEZOELECTRICO CON UN CUERPO SOPORTE (10) DE UN MATERIAL ELECTRICAMENTE AISLANTE SOBRE EL CUAL ESTA APLICADO UN PIEZOELECTRETO (40, 41), ASI COMO UN PROCEDIMIENTO PARA LA FABRICACION DE ESE ELEMENTO. PARA PODER CONSEGUIR UN ELEVADO GRADO DE SEGURIDAD DE FUNCIONAMIENTO SE HA PREVISTO DE ACUERDO CON LA INVENCION, INTERCALAR ENTRE EL SUSTRATO (10) Y UN ELECTRODO INTERIOR (30, 31) DEL PIEZOELECTRETO (40, 41), UNA CAPA ELECTRICAMENTE CONDUCTORA, QUE ESTE EN CONTACTO ELECTRICO CON EL ELECTRODO INTERIOR (30, 31) EN UNA SERIE DE PUNTOS. UN ELEMENTO DE ESTE TIPO RESULTA ESPECIALMENTE ADECUADO COMO CONVERTIDOR DE FLEXION (100, 200) PARA CONTROLAR UNA MAQUINA TRICOTOSA O UN TELAR DE LA INDUSTRIA TEXTIL.
ES97924885T 1996-05-23 1997-05-14 Elemento piezoelectrico asi como procedimiento para su fabricacion. Expired - Lifetime ES2182083T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19620826A DE19620826C2 (de) 1996-05-23 1996-05-23 Piezoelektrischer Biegewandler sowie Verfahren zu dessen Herstellung

Publications (1)

Publication Number Publication Date
ES2182083T3 true ES2182083T3 (es) 2003-03-01

Family

ID=7795150

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97924885T Expired - Lifetime ES2182083T3 (es) 1996-05-23 1997-05-14 Elemento piezoelectrico asi como procedimiento para su fabricacion.

Country Status (10)

Country Link
US (2) US6570300B1 (es)
EP (1) EP0902986B1 (es)
JP (1) JP3524557B2 (es)
KR (1) KR20000015821A (es)
AT (1) ATE222405T1 (es)
DE (3) DE29623089U1 (es)
ES (1) ES2182083T3 (es)
PT (1) PT902986E (es)
TW (1) TW322640B (es)
WO (1) WO1997044834A1 (es)

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DE29912703U1 (de) 1999-07-19 1999-11-11 Siemens AG, 80333 München Überspannungsableiter
WO2001048834A2 (de) * 1999-12-23 2001-07-05 Siemens Aktiengesellschaft Piezoelektrisches element
JP3611198B2 (ja) * 2000-02-16 2005-01-19 松下電器産業株式会社 アクチュエータとこれを用いた情報記録再生装置
WO2001075987A1 (de) * 2000-04-04 2001-10-11 Siemens Aktiengesellschaft Piezokeramischer biegewandler
DE10017975A1 (de) * 2000-04-11 2001-10-25 Bosch Gmbh Robert Piezoelektrischer Vielschichtaktor
GB2363011B (en) * 2000-05-31 2002-04-17 Acoustical Tech Sg Pte Ltd Surface acoustic wave device
US20040012308A1 (en) * 2000-06-21 2004-01-22 Michael Riedel Piezo-electric bending transducer
DE10051784C1 (de) * 2000-10-19 2002-08-14 Deutsch Zentr Luft & Raumfahrt Elektromechanisches Funktionsmodul
DE10113744A1 (de) * 2000-11-27 2002-06-20 Hans Richter Elektrische Anschlußanordnung für einen monolithischen Vielschicht-Piezoaktor
KR100382350B1 (ko) * 2001-04-04 2003-05-09 주식회사 한신 부품공급기용 압전소자 제조방법
DE20202297U1 (de) * 2001-09-07 2002-08-29 Drei-S-Werk Präzisionswerkzeuge GmbH & Co Fertigungs-KG, 91126 Schwabach Flacher Aktor oder Sensor mit interner Vorspannung
WO2003032678A2 (en) * 2001-10-09 2003-04-17 Frank Joseph Pompei Ultrasonic transducer for parametric array
SE525649C2 (sv) * 2001-11-07 2005-03-29 Micromuscle Ab Mikroaktuator innefattande ett bärsubstrat, ett volymändrande skikt och en förstärkande struktur
DE10309994B4 (de) * 2002-03-01 2005-11-03 Bühner, Kurt PKF-Elemente für Schwingfördersystem mit Piezoantrieb
DE10327902A1 (de) * 2002-07-19 2004-06-24 Ceramtec Ag Innovative Ceramic Engineering Außenelektrode an einem piezokeramischen Vielschichtaktor
DE10234987A1 (de) * 2002-07-31 2004-02-19 Siemens Ag Piezoelektrischer Biegewandler
US20040032957A1 (en) * 2002-08-14 2004-02-19 Mansy Hansen A. Sensors and sensor assemblies for monitoring biological sounds and electric potentials
DE10246307A1 (de) * 2002-10-04 2004-04-22 Siemens Ag Piezoelektrischer Biegewandler
DE102004045208A1 (de) * 2004-09-17 2006-04-06 Siemens Ag Webmaschine
DE202005002216U1 (de) 2005-02-11 2006-06-22 Argillon Gmbh Piezoelektrisches Element
US20060232171A1 (en) * 2005-04-13 2006-10-19 Par Technologies, Llc Piezoelectric diaphragm assembly with conductors on flexible film
DE102005020527A1 (de) * 2005-05-03 2006-11-09 Festo Ag & Co. Piezoelektrisches Element
JP5004797B2 (ja) * 2005-06-29 2012-08-22 日本碍子株式会社 圧電／電歪膜型素子
DE102006048307B4 (de) * 2005-10-02 2010-02-18 Bühner, Kurt Mittels des inversen Piezoeffekts betätigbares Federelement
DE102006062706B4 (de) * 2006-03-30 2012-12-06 Krohne Ag Ultraschalldurchflußmeßgerät
DE102006018034A1 (de) * 2006-04-19 2007-10-31 Robert Bosch Gmbh Piezoaktor und Verfahren zu dessen Herstellung
DE102006020721A1 (de) * 2006-05-04 2007-11-08 Robert Bosch Gmbh Vorrichtung zur kombinierten Messung der Fließgeschwindigkeit und/oder des Volumens und/oder der Gaszusammensetzung von eingeatmeter bzw. ausgeatmeter Luft, Ergospirometer und Verfahren zur kombinierten Messung der Fließgeschwindigkeit und/oder des Volumens und/oder der Gaszusammensetzung
US7288878B1 (en) 2006-05-26 2007-10-30 Murray F Feller Piezoelectric transducer assembly
DE102006035638A1 (de) * 2006-07-31 2007-12-27 Siemens Ag Piezoelektrisches Mehrschichtbauelement und Verfahren zu seiner Herstellung
US7681290B2 (en) * 2006-10-20 2010-03-23 The Boeing Company Piezoelectric bimorph beam manufacturing method
US7834490B1 (en) * 2006-12-28 2010-11-16 The United States Of America As Represented By The Secretary Of The Navy Bimetallic strips for energy harvesting, actuation and sensing
US20080211353A1 (en) * 2007-03-02 2008-09-04 Charles Erklin Seeley High temperature bimorph actuator
US20090051250A1 (en) * 2007-08-21 2009-02-26 Dushyant Shah Mesh Terminals For Piezoelectric Elements
DE102008007774A1 (de) * 2008-02-06 2009-08-13 Robert Bosch Gmbh Biegewandler zum Erzeugen von elektrischer Energie aus mechanischen Verformungen
JP5006354B2 (ja) * 2009-01-29 2012-08-22 日本碍子株式会社 圧電／電歪共振子
CN101714608B (zh) * 2009-12-01 2011-05-25 同济大学 压电聚合物薄膜传感器的封装方法
CN103321881A (zh) * 2013-06-19 2013-09-25 重庆中镭科技有限公司 一种采用多轴向纤维增强树脂垫片的压电泵振子
KR102091030B1 (ko) 2013-10-18 2020-03-19 삼성디스플레이 주식회사 표시장치
US10658565B2 (en) 2016-08-29 2020-05-19 The Boeing Company Actuator assemblies, mechanical assemblies including the actuator assemblies, and methods of fabricating the same
CN108231993B (zh) * 2017-03-22 2022-07-05 苏州贝骨新材料科技有限公司 压电驻极体材料组件的极化方法及应用
JP7261429B2 (ja) * 2019-02-28 2023-04-20 本多電子株式会社 ソナー、超音波振動子及びその製造方法
JP7293898B2 (ja) * 2019-06-18 2023-06-20 Tdk株式会社 圧電素子
US11791748B2 (en) 2019-07-24 2023-10-17 Tdk Corporation Smart wheel energy harvester
DE102021104697A1 (de) * 2021-02-26 2022-09-01 Tdk Electronics Ag Ultraschallwandler

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JPS6066882A (ja) 1983-09-22 1985-04-17 Murata Mfg Co Ltd 圧電変位素子およびその分極方法
US4701659A (en) * 1984-09-26 1987-10-20 Terumo Corp. Piezoelectric ultrasonic transducer with flexible electrodes adhered using an adhesive having anisotropic electrical conductivity
JPS61144565A (ja) * 1984-12-18 1986-07-02 Toshiba Corp 高分子圧電型超音波探触子
US4786837A (en) * 1987-05-05 1988-11-22 Hoechst Celanese Corporation Composite conformable sheet electrodes
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
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Also Published As

Publication number Publication date
PT902986E (pt) 2003-01-31
DE19620826A1 (de) 1997-11-27
EP0902986B1 (de) 2002-08-14
JPH11512887A (ja) 1999-11-02
TW322640B (es) 1997-12-11
DE59707974D1 (de) 2002-09-19
JP3524557B2 (ja) 2004-05-10
US20030020375A1 (en) 2003-01-30
DE29623089U1 (de) 1997-12-11
EP0902986A1 (de) 1999-03-24
ATE222405T1 (de) 2002-08-15
DE19620826C2 (de) 1998-07-09
KR20000015821A (ko) 2000-03-15
WO1997044834A1 (de) 1997-11-27
US6570300B1 (en) 2003-05-27

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