ES2185454A1 - Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica. - Google Patents

Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica.

Info

Publication number
ES2185454A1
ES2185454A1 ES200002141A ES200002141A ES2185454A1 ES 2185454 A1 ES2185454 A1 ES 2185454A1 ES 200002141 A ES200002141 A ES 200002141A ES 200002141 A ES200002141 A ES 200002141A ES 2185454 A1 ES2185454 A1 ES 2185454A1
Authority
ES
Spain
Prior art keywords
substrates
sup
sputtering
bombardment
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES200002141A
Other languages
English (en)
Other versions
ES2185454B1 (es
Inventor
Calvo M Angeles Martinez
Garcia M Teresa Gutierrez
Rueda Jose Herrero
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro de Investigaciones Energeticas Medioambientales y Tecnologicas CIEMAT
Original Assignee
Centro de Investigaciones Energeticas Medioambientales y Tecnologicas CIEMAT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro de Investigaciones Energeticas Medioambientales y Tecnologicas CIEMAT filed Critical Centro de Investigaciones Energeticas Medioambientales y Tecnologicas CIEMAT
Priority to ES200002141A priority Critical patent/ES2185454B1/es
Priority to EP01500202A priority patent/EP1184481A3/en
Publication of ES2185454A1 publication Critical patent/ES2185454A1/es
Application granted granted Critical
Publication of ES2185454B1 publication Critical patent/ES2185454B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/216—ZnO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Non-Insulated Conductors (AREA)

Abstract

Método para la obtención de óxidos conductores eléctricos y transparentes mediante pulverización catódica. Consiste en depositar óxido de indio dopado con estaño y óxido de zinc dopado con aluminio, sobre substratos de vidrio sin calentar intencionadamente, mediante la técnica de pulverización catódica. Comprende las siguientes etapas: Preparación de los substratos mediante desengrasado, lavado en baño de ultrasonidos, aclarado con agua desionizada y secado mediante chorro de aire. Introducción de los substratos a recubrir en una cámara de pulverización catódica, y bombardeo de los mismos con iones Ar{sup,+}. Preparación de blancos de óxido de indio dopado con estaño o de óxido de zinc dopado con aluminio mediante bombardeo con iones Ar{sup,+}. Recubrimiento de los substratos con el material del que están constituidos los blancos manteniendo en la cámara de pulverización catódica un flujo de argón y oxígeno, este último en cantidades de entre 0,5 y 1 sccm preferiblemente y una densidad de potencia de radiofrecuencia comprendida entre 4000 y 1000 mW/cm{sup,2}. Este proceso permite obtener láminas delgadas de ambos materiales con alta conductividad eléctrica y alta transparencia a la luz visible.
ES200002141A 2000-08-28 2000-08-28 Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica. Expired - Fee Related ES2185454B1 (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES200002141A ES2185454B1 (es) 2000-08-28 2000-08-28 Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica.
EP01500202A EP1184481A3 (en) 2000-08-28 2001-07-27 Method for obtaining transparent, electrically conducting oxides by means of sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES200002141A ES2185454B1 (es) 2000-08-28 2000-08-28 Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica.

Publications (2)

Publication Number Publication Date
ES2185454A1 true ES2185454A1 (es) 2003-04-16
ES2185454B1 ES2185454B1 (es) 2004-05-01

Family

ID=8494800

Family Applications (1)

Application Number Title Priority Date Filing Date
ES200002141A Expired - Fee Related ES2185454B1 (es) 2000-08-28 2000-08-28 Metodo de obtencion de oxidos conductores electricos y transparentes mediante pulverizacion catodica.

Country Status (2)

Country Link
EP (1) EP1184481A3 (es)
ES (1) ES2185454B1 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7980000B2 (en) * 2006-12-29 2011-07-19 Applied Materials, Inc. Vapor dryer having hydrophilic end effector
RU2443646C1 (ru) * 2010-09-21 2012-02-27 Федеральное государственное унитарное предприятие "Обнинское научно-производственное предприятие "Технология" Способ получения на стеклянном изделии токопроводящего покрытия из двуокиси олова
EP2447999A1 (en) 2010-10-29 2012-05-02 Applied Materials, Inc. Method for depositing a thin film electrode and thin film stack
CN103204637B (zh) * 2012-01-12 2015-08-12 上海北玻玻璃技术工业有限公司 一种透明导电氧化物镀膜玻璃镀膜线真空系统
US20130202817A1 (en) 2012-02-02 2013-08-08 James DeCoux Antistatic coating

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957604A (en) * 1988-02-02 1990-09-18 Basf Aktiengesellschaft Production of a thin x-ray amorphous aluminum nitride or aluminum silicon nitride film on a surface
US5342676A (en) * 1991-11-26 1994-08-30 Saint-Gobain Vitrage International Glass substrate provided with a low emissivity film

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980000713A1 (en) * 1978-09-27 1980-04-17 Massachusetts Inst Technology Transparent heat mirrors formed on polymeric substrates
US4650557A (en) * 1982-11-03 1987-03-17 Donnelly Corporation Process for making a conductively coated glass member and the product thereof
JPS6241740A (ja) * 1985-08-19 1987-02-23 Nippon Sheet Glass Co Ltd 熱線反射ガラスの製造方法
JPH0726195B2 (ja) * 1988-08-19 1995-03-22 日本真空技術株式会社 透明導電膜の製造方法
EP0405304A3 (en) * 1989-06-29 1992-06-03 Siemens Aktiengesellschaft Thin film resistors whose surface resistance values are comprised between 1m-ohms and several g-ohms and process of making it
JPH04293769A (ja) * 1991-03-20 1992-10-19 Tosoh Corp 低温成膜用ｉｔｏスパッタリングタ−ゲット
JP3197623B2 (ja) * 1992-09-29 2001-08-13 日本電信電話株式会社 透明導電性薄膜の形成方法
US6033620A (en) * 1995-04-18 2000-03-07 Tosoh Corporation Process of preparing high-density sintered ITO compact and sputtering target
DE19752889C1 (de) * 1997-11-28 1999-06-24 Fraunhofer Ges Forschung Verfahren zur Beschichtung von Oberflächen
JP2000238178A (ja) * 1999-02-24 2000-09-05 Teijin Ltd 透明導電積層体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957604A (en) * 1988-02-02 1990-09-18 Basf Aktiengesellschaft Production of a thin x-ray amorphous aluminum nitride or aluminum silicon nitride film on a surface
US5342676A (en) * 1991-11-26 1994-08-30 Saint-Gobain Vitrage International Glass substrate provided with a low emissivity film

Also Published As

Publication number Publication date
EP1184481A2 (en) 2002-03-06
EP1184481A3 (en) 2003-12-03
ES2185454B1 (es) 2004-05-01

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