ES2189379T3 - Dispositivo microrrele controlado electrostaticamente. - Google Patents

Dispositivo microrrele controlado electrostaticamente.

Info

Publication number
ES2189379T3
ES2189379T3 ES99830731T ES99830731T ES2189379T3 ES 2189379 T3 ES2189379 T3 ES 2189379T3 ES 99830731 T ES99830731 T ES 99830731T ES 99830731 T ES99830731 T ES 99830731T ES 2189379 T3 ES2189379 T3 ES 2189379T3
Authority
ES
Spain
Prior art keywords
electrode
petal
support base
pair
mobile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99830731T
Other languages
English (en)
Spanish (es)
Inventor
Marco Pizzi
Valerian Koniachkine
Piero Perlo
Sabino Sinesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Application granted granted Critical
Publication of ES2189379T3 publication Critical patent/ES2189379T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Landscapes

  • Selective Calling Equipment (AREA)
  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Push-Button Switches (AREA)
  • Relay Circuits (AREA)
ES99830731T 1999-02-02 1999-11-25 Dispositivo microrrele controlado electrostaticamente. Expired - Lifetime ES2189379T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO990072 IT1307131B1 (it) 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico.

Publications (1)

Publication Number Publication Date
ES2189379T3 true ES2189379T3 (es) 2003-07-01

Family

ID=11417411

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99830731T Expired - Lifetime ES2189379T3 (es) 1999-02-02 1999-11-25 Dispositivo microrrele controlado electrostaticamente.

Country Status (4)

Country Link
EP (1) EP1026718B1 (it)
DE (1) DE69905233T2 (it)
ES (1) ES2189379T3 (it)
IT (1) IT1307131B1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (de) * 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
FR2854726B1 (fr) 2003-05-09 2005-08-26 St Microelectronics Sa Microcommutateur a plusieurs positions fermees a deplacement lateral
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
KR100693345B1 (ko) * 2005-11-30 2007-03-09 삼성전자주식회사 Ｍｅｍｓ 스위치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19730715C1 (de) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
JPH10162713A (ja) * 1996-11-29 1998-06-19 Omron Corp マイクロリレー
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
ITTO990072A1 (it) 2000-08-02
EP1026718B1 (en) 2003-02-05
EP1026718A3 (en) 2001-09-12
IT1307131B1 (it) 2001-10-29
EP1026718A2 (en) 2000-08-09
DE69905233D1 (de) 2003-03-13
DE69905233T2 (de) 2003-11-06

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