ES2189879T3 - Sensor micromecanico de tasa del giro (stg). - Google Patents

Sensor micromecanico de tasa del giro (stg).

Info

Publication number
ES2189879T3
ES2189879T3 ES96927661T ES96927661T ES2189879T3 ES 2189879 T3 ES2189879 T3 ES 2189879T3 ES 96927661 T ES96927661 T ES 96927661T ES 96927661 T ES96927661 T ES 96927661T ES 2189879 T3 ES2189879 T3 ES 2189879T3
Authority
ES
Spain
Prior art keywords
diapason
silicon
turn
sensor
microechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96927661T
Other languages
English (en)
Inventor
Ralf Voss
Karin Bauer
Matthias Rose
Erwin Stenzel
Josef Schalk
Winfried Kupke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
EADS Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EADS Deutschland GmbH filed Critical EADS Deutschland GmbH
Application granted granted Critical
Publication of ES2189879T3 publication Critical patent/ES2189879T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)

Abstract

SE PROPONE UN GIROMETRO, CUYA ESTRUCTURA SE HA ELABORADO A PARTIR DE SILICIO (COMBINACIONES DE SILICIO O DE SILICIO Y VIDRIO) U OTROS MATERIALES SEMICONDUCTORES CON TECNICAS DE MICROMECANICA. EL GIROMETRO TIENE LA FORMA DE UN DIAPASON, CUYOS DIENTES ESTAN SITUADOS EN PLANOS PARALELOS A LA SUPERFICIE DEL ESTRATO SEMICONDUCTOR. ESTOS DIENTES SE EXCITAN HASTA OSCILAR EN UN PLANO VERTICAL AL PLANO DEL ESTRATO. MEDIANTE UN ELEMENTO SENSORIAL, QUE REGISTRA LA TORSION DE LA SUSPENSION DEL DIAPASON, SE MIDE LA VELOCIDAD ANGULAR DE UN GIRO DEL SENSOR ALREDEDOR DE UN EJE PARALELO A LA SUSPENSION DEL DIAPASON.
ES96927661T 1995-08-08 1996-08-02 Sensor micromecanico de tasa del giro (stg). Expired - Lifetime ES2189879T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19528961A DE19528961C2 (de) 1995-08-08 1995-08-08 Mikromechanischer Drehratensensor (DRS) und Sensoranordnung

Publications (1)

Publication Number Publication Date
ES2189879T3 true ES2189879T3 (es) 2003-07-16

Family

ID=7768880

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96927661T Expired - Lifetime ES2189879T3 (es) 1995-08-08 1996-08-02 Sensor micromecanico de tasa del giro (stg).

Country Status (6)

Country Link
US (1) US6474162B1 (es)
EP (1) EP0843809B1 (es)
JP (1) JP3950925B2 (es)
DE (2) DE19528961C2 (es)
ES (1) ES2189879T3 (es)
WO (1) WO1997006412A1 (es)

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DE19844686A1 (de) * 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
DE19845185B4 (de) * 1998-10-01 2005-05-04 Eads Deutschland Gmbh Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors
AUPQ081599A0 (en) * 1999-06-08 1999-06-24 Harris, Martin Electrically operated tuning forks with novel geometry
RU2244936C2 (ru) * 1999-11-30 2005-01-20 Некрасов Яков Анатольевич Устройство стабилизации температуры микромеханического чувствительного элемента
DE10007868B4 (de) * 2000-02-21 2010-02-18 Robert Bosch Gmbh Elektronische Steuerschaltung
DE10010975B4 (de) * 2000-03-07 2010-04-08 Robert Bosch Gmbh Mikromechanisches Bauelement
WO2001087767A2 (en) * 2000-05-18 2001-11-22 Stefaan De Schrijver Micro-electrocmechamical sensor (mems) resonator
DE10139443A1 (de) * 2001-08-10 2003-03-06 Eads Deutschland Gmbh Verfahren und Vorrichtung zum Trimmen von Sensoren mit schwingenden Strukturen
US6925413B2 (en) 2001-12-14 2005-08-02 Robert Bosch Gmbh Method and system for detecting a spatial movement state of moving objects
DE10254163A1 (de) * 2002-11-21 2004-06-03 Eads Deutschland Gmbh Mikromechanischer Drehratensensor
JP2005098841A (ja) * 2003-09-25 2005-04-14 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動子、角速度センサ素子、角速度センサ及び音叉型水晶振動子の製造方法。
DE10349014B4 (de) * 2003-10-17 2014-01-09 Austriamicrosystems Ag Mikroelektromechanischer Drehratensensor
DE102005045378A1 (de) * 2005-09-22 2007-03-29 Eads Deutschland Gmbh Drehratensensor
DE102005045379A1 (de) * 2005-09-22 2007-03-29 Eads Deutschland Gmbh Drehratensensor
JP2007248328A (ja) * 2006-03-17 2007-09-27 Matsushita Electric Ind Co Ltd 複合センサ
DE102006029443B3 (de) * 2006-06-21 2008-01-31 Siemens Ag Sensor in mikromechanischer Bauweise zum Messen des Massendurchflusses nach dem Coriolis-Prinzip
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
DE102007018834A1 (de) 2007-04-20 2008-10-23 Eads Deutschland Gmbh Drehratensensor
GB2450157B (en) * 2007-06-15 2011-12-21 Baker Hughes Inc System for determining an initial direction of rotation of an electrical submersible pump
DE102010018048A1 (de) 2010-04-23 2011-10-27 Northrop Grumman Litef Gmbh Drehratensensor-Anordnung und Verfahren zum Betrieb einer Drehratensensor-Anordnung
KR20140040073A (ko) * 2010-12-23 2014-04-02 퀄컴 테크놀로지스, 인크. Rf 장치 및 rf 장치를 조정하기 위한 방법
CN102507980B (zh) * 2011-11-02 2013-11-27 重庆理工大学 一种基于自谐振技术的硅微二维加速度传感器
US9021887B2 (en) 2011-12-19 2015-05-05 Infineon Technologies Ag Micromechanical semiconductor sensing device
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
DE102018213513B4 (de) * 2018-08-10 2024-03-21 Zf Friedrichshafen Ag Fahrwerkbauteil, Verfahren zur Herstellung eines Fahrwerkbauteils sowie Radaufhängung für ein Kraftfahrzeug
US11060868B2 (en) * 2019-04-09 2021-07-13 United States Of America, As Represented By The Secretary Of The Navy Weak value amplification Coriolis vibratory gyroscope
CN119533756B (zh) * 2024-11-18 2025-10-21 中电科芯片技术(集团)有限公司 一种低温漂mems谐振压力传感器敏感芯片及其制备方法

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Also Published As

Publication number Publication date
DE59610132D1 (de) 2003-03-20
JPH11510895A (ja) 1999-09-21
DE19528961A1 (de) 1997-02-13
WO1997006412A1 (de) 1997-02-20
US6474162B1 (en) 2002-11-05
EP0843809B1 (de) 2003-02-12
JP3950925B2 (ja) 2007-08-01
EP0843809A1 (de) 1998-05-27
DE19528961C2 (de) 1998-10-29

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