ES2195588T3 - Procedimiento para la produccion de capas antirreflejo. - Google Patents

Procedimiento para la produccion de capas antirreflejo.

Info

Publication number
ES2195588T3
ES2195588T3 ES99932749T ES99932749T ES2195588T3 ES 2195588 T3 ES2195588 T3 ES 2195588T3 ES 99932749 T ES99932749 T ES 99932749T ES 99932749 T ES99932749 T ES 99932749T ES 2195588 T3 ES2195588 T3 ES 2195588T3
Authority
ES
Spain
Prior art keywords
substrate
production
layer
procedure
reflective layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99932749T
Other languages
English (en)
Inventor
Ullrich Steiner
Stefan Walheim
Erik Schaffer
Stefan Eggert
Jurgen Mlynek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Konstanz
Original Assignee
Universitaet Konstanz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Konstanz filed Critical Universitaet Konstanz
Application granted granted Critical
Publication of ES2195588T3 publication Critical patent/ES2195588T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3405—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of organic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Composite Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Optical Filters (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

Procedimiento para la producción de un elemento que comprende un sustrato y por lo menos una capa antirreflejante, que presenta poros cuyas dimensiones están por debajo de la longitud de onda de la luz visible o regiones espectrales contiguas, comprendiendo los pasos de: preparar un sustrato, aplicar una solución de por lo menos dos polímeros incompatibles entre sí, que se disuelven en un disolvente común, de manera que se produzca una fase mezclada común, sobre el sustrato, obteniéndose por separación de fase sobre su superficie una capa con fases polímeras que se alternan en sentido sensiblemente lateral, y exponer esta capa a otro disolvente que disuelve selectivamente uno o varios de los polímeros empleados, de forma que al menos un polímero permanezca sin disolver.
ES99932749T 1998-06-30 1999-06-29 Procedimiento para la produccion de capas antirreflejo. Expired - Lifetime ES2195588T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19829172A DE19829172A1 (de) 1998-06-30 1998-06-30 Verfahren zur Herstellung von Antireflexschichten

Publications (1)

Publication Number Publication Date
ES2195588T3 true ES2195588T3 (es) 2003-12-01

Family

ID=7872505

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99932749T Expired - Lifetime ES2195588T3 (es) 1998-06-30 1999-06-29 Procedimiento para la produccion de capas antirreflejo.

Country Status (8)

Country Link
US (1) US6605229B2 (es)
EP (1) EP1092164B1 (es)
JP (1) JP4389240B2 (es)
AT (1) ATE235066T1 (es)
AU (1) AU4902399A (es)
DE (2) DE19829172A1 (es)
ES (1) ES2195588T3 (es)
WO (1) WO2000000854A1 (es)

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JP6413888B2 (ja) 2015-03-30 2018-10-31 Jsr株式会社 パターン形成用組成物、パターン形成方法及びブロック共重合体
TW201700595A (zh) 2015-04-01 2017-01-01 Jsr股份有限公司 圖案形成用組成物及圖案形成方法
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US20170082783A1 (en) * 2015-06-25 2017-03-23 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Processing of superhydrophobic, infrared transmissive, anti-reflective nanostructured surfaces
KR20180112778A (ko) 2016-02-08 2018-10-12 제이에스알 가부시끼가이샤 콘택트 홀 패턴의 형성 방법 및 조성물
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Also Published As

Publication number Publication date
DE59904643D1 (de) 2003-04-24
ATE235066T1 (de) 2003-04-15
JP2002519728A (ja) 2002-07-02
AU4902399A (en) 2000-01-17
DE19829172A1 (de) 2000-01-05
US20010024684A1 (en) 2001-09-27
EP1092164A1 (de) 2001-04-18
US6605229B2 (en) 2003-08-12
WO2000000854A1 (de) 2000-01-06
JP4389240B2 (ja) 2009-12-24
EP1092164B1 (de) 2003-03-19

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