ES2284972T3 - Procedimiento para la produccion de delgados revestimientos dificilmente solubles. - Google Patents
Procedimiento para la produccion de delgados revestimientos dificilmente solubles. Download PDFInfo
- Publication number
- ES2284972T3 ES2284972T3 ES02798256T ES02798256T ES2284972T3 ES 2284972 T3 ES2284972 T3 ES 2284972T3 ES 02798256 T ES02798256 T ES 02798256T ES 02798256 T ES02798256 T ES 02798256T ES 2284972 T3 ES2284972 T3 ES 2284972T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- production
- activation
- solid
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims abstract description 108
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 238000006243 chemical reaction Methods 0.000 claims abstract description 74
- 239000007787 solid Substances 0.000 claims abstract description 53
- 238000000576 coating method Methods 0.000 claims abstract description 49
- 150000001768 cations Chemical class 0.000 claims abstract description 41
- 150000001450 anions Chemical class 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000012467 final product Substances 0.000 claims abstract description 19
- 231100000331 toxic Toxicity 0.000 claims abstract description 15
- 230000002588 toxic effect Effects 0.000 claims abstract description 15
- 239000000047 product Substances 0.000 claims abstract description 6
- 239000000126 substance Substances 0.000 claims description 74
- 239000007789 gas Substances 0.000 claims description 59
- 238000001994 activation Methods 0.000 claims description 49
- 230000004913 activation Effects 0.000 claims description 49
- 230000008569 process Effects 0.000 claims description 35
- 239000011248 coating agent Substances 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 21
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 239000002904 solvent Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 11
- 238000005496 tempering Methods 0.000 claims description 10
- 238000007725 thermal activation Methods 0.000 claims description 8
- 229910021529 ammonia Inorganic materials 0.000 claims description 7
- -1 urea compound Chemical class 0.000 claims description 7
- 150000001786 chalcogen compounds Chemical class 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 150000002736 metal compounds Chemical class 0.000 claims description 6
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000007654 immersion Methods 0.000 claims description 5
- IYKVLICPFCEZOF-UHFFFAOYSA-N selenourea Chemical compound NC(N)=[Se] IYKVLICPFCEZOF-UHFFFAOYSA-N 0.000 claims description 5
- 238000010408 sweeping Methods 0.000 claims description 5
- 239000003054 catalyst Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 229910001510 metal chloride Inorganic materials 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000006227 byproduct Substances 0.000 claims description 3
- 239000007795 chemical reaction product Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 3
- 150000003839 salts Chemical class 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 2
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 239000004202 carbamide Substances 0.000 claims description 2
- 238000004090 dissolution Methods 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000178 monomer Substances 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- 229910052976 metal sulfide Inorganic materials 0.000 claims 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 claims 1
- 150000003346 selenoethers Chemical class 0.000 claims 1
- 229920002994 synthetic fiber Polymers 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 abstract description 6
- 150000004770 chalcogenides Chemical class 0.000 abstract description 3
- 239000007858 starting material Substances 0.000 abstract 7
- 239000008247 solid mixture Substances 0.000 abstract 3
- 230000003213 activating effect Effects 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 abstract 1
- 231100000252 nontoxic Toxicity 0.000 abstract 1
- 230000003000 nontoxic effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 26
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- 238000005755 formation reaction Methods 0.000 description 10
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 9
- 230000006872 improvement Effects 0.000 description 8
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 7
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 239000011701 zinc Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 4
- 229910020366 ClO 4 Inorganic materials 0.000 description 4
- 239000011669 selenium Substances 0.000 description 4
- 239000002341 toxic gas Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 3
- 238000005234 chemical deposition Methods 0.000 description 3
- 238000000224 chemical solution deposition Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 230000001960 triggered effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RXBXBWBHKPGHIB-UHFFFAOYSA-L zinc;diperchlorate Chemical compound [Zn+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O RXBXBWBHKPGHIB-UHFFFAOYSA-L 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052798 chalcogen Inorganic materials 0.000 description 2
- 150000001787 chalcogens Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 150000004771 selenides Chemical class 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- GDDNTTHUKVNJRA-UHFFFAOYSA-N 3-bromo-3,3-difluoroprop-1-ene Chemical compound FC(F)(Br)C=C GDDNTTHUKVNJRA-UHFFFAOYSA-N 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 206010039509 Scab Diseases 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 239000007844 bleaching agent Substances 0.000 description 1
- 210000000481 breast Anatomy 0.000 description 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000004801 process automation Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemically Coating (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Compounds Of Unknown Constitution (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10160504A DE10160504C2 (de) | 2001-11-30 | 2001-11-30 | Verfahren zur Herstellung dünner, schwer löslicher Beschichtungen |
| DE10160504 | 2001-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2284972T3 true ES2284972T3 (es) | 2007-11-16 |
Family
ID=7708607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES02798256T Expired - Lifetime ES2284972T3 (es) | 2001-11-30 | 2002-11-29 | Procedimiento para la produccion de delgados revestimientos dificilmente solubles. |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1448808B1 (de) |
| AT (1) | ATE361380T1 (de) |
| DE (2) | DE10160504C2 (de) |
| ES (1) | ES2284972T3 (de) |
| WO (1) | WO2003048404A2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0524066D0 (en) * | 2005-11-25 | 2006-01-04 | Chiron Srl | 741 ii |
| DE102009037371B3 (de) * | 2009-08-13 | 2011-03-17 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Beschichtungsvorrichtung mit Ultraschallzerstäuber |
| DE102011050684A1 (de) | 2011-05-27 | 2012-11-29 | Karlsruher Institut für Technologie | Vorrichtung und Verfahren zur Herstellung von hoch porösen, kristallinen Oberflächenbeschichtungen |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5908608A (en) * | 1996-11-08 | 1999-06-01 | Spectra Science Corporation | Synthesis of metal chalcogenide quantum |
| JPH1167677A (ja) * | 1997-08-15 | 1999-03-09 | Star Micronics Co Ltd | オキシ硫化錫膜及びその製造方法 |
| DE19831214C2 (de) * | 1998-03-19 | 2003-07-03 | Hahn Meitner Inst Berlin Gmbh | Verfahren und Anordnung zur Herstellung dünner Metallchalkogenid-Schichten |
| DE19916403C1 (de) * | 1999-04-06 | 2000-10-12 | Hahn Meitner Inst Berlin Gmbh | Verfahren zur Herstellung dünner, schwer löslicher Beschichtungen |
-
2001
- 2001-11-30 DE DE10160504A patent/DE10160504C2/de not_active Expired - Fee Related
-
2002
- 2002-11-29 DE DE50210087T patent/DE50210087D1/de not_active Expired - Lifetime
- 2002-11-29 WO PCT/DE2002/004457 patent/WO2003048404A2/de not_active Ceased
- 2002-11-29 AT AT02798256T patent/ATE361380T1/de not_active IP Right Cessation
- 2002-11-29 EP EP02798256A patent/EP1448808B1/de not_active Expired - Lifetime
- 2002-11-29 ES ES02798256T patent/ES2284972T3/es not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE50210087D1 (de) | 2007-06-14 |
| DE10160504C2 (de) | 2003-11-13 |
| WO2003048404A2 (de) | 2003-06-12 |
| WO2003048404A3 (de) | 2003-11-27 |
| EP1448808B1 (de) | 2007-05-02 |
| EP1448808A2 (de) | 2004-08-25 |
| ATE361380T1 (de) | 2007-05-15 |
| DE10160504A1 (de) | 2003-06-12 |
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