ES233465A1 - PROCEDIMIENTO DE FABRICACIoN DE SILICIO COMPACTO EXTRA PURO - Google Patents
PROCEDIMIENTO DE FABRICACIoN DE SILICIO COMPACTO EXTRA PUROInfo
- Publication number
- ES233465A1 ES233465A1 ES0233465A ES233465A ES233465A1 ES 233465 A1 ES233465 A1 ES 233465A1 ES 0233465 A ES0233465 A ES 0233465A ES 233465 A ES233465 A ES 233465A ES 233465 A1 ES233465 A1 ES 233465A1
- Authority
- ES
- Spain
- Prior art keywords
- sihcl3
- silicon
- gas
- purified
- distilled water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052710 silicon Inorganic materials 0.000 title abstract 8
- 239000010703 silicon Substances 0.000 title abstract 8
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 229910003822 SiHCl3 Inorganic materials 0.000 abstract 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 3
- 239000012153 distilled water Substances 0.000 abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- 238000004821 distillation Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 2
- 235000011121 sodium hydroxide Nutrition 0.000 abstract 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229920000742 Cotton Polymers 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- MPCRDALPQLDDFX-UHFFFAOYSA-L Magnesium perchlorate Chemical compound [Mg+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O MPCRDALPQLDDFX-UHFFFAOYSA-L 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 230000001464 adherent effect Effects 0.000 abstract 1
- 239000010425 asbestos Substances 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000003054 catalyst Substances 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000007865 diluting Methods 0.000 abstract 1
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 239000005297 pyrex Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 229910052895 riebeckite Inorganic materials 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000000243 solution Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 abstract 1
- 239000005052 trichlorosilane Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
Procedimiento de fabricación de silicio compacto extra puro, utilizable para la fabricación de transistores, caracterizándose por la descomposición térmica fraccionada de un silicio cloroformo (SiHCl3) de una gran pureza.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR708286A FR1252005A (fr) | 1956-02-11 | 1956-02-11 | Procédé de fabrication de silicium compact extra pur |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES233465A1 true ES233465A1 (es) | 1957-06-01 |
Family
ID=8702482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES0233465A Expired ES233465A1 (es) | 1956-02-11 | 1957-02-07 | PROCEDIMIENTO DE FABRICACIoN DE SILICIO COMPACTO EXTRA PURO |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US2943918A (es) |
| BE (1) | BE554836A (es) |
| DE (1) | DE1054436B (es) |
| ES (1) | ES233465A1 (es) |
| FR (1) | FR1252005A (es) |
| GB (1) | GB855913A (es) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL260072A (es) * | 1960-01-15 | |||
| DE1147567B (de) * | 1960-01-15 | 1963-04-25 | Siemens Ag | Verfahren zum Gewinnen von insbesondere einkristallinem, halbleitendem Silicium |
| DE1185150B (de) * | 1960-02-23 | 1965-01-14 | Siemens Ag | Verfahren zur Gewinnung von reinstem Halbleitermaterial, insbesondere Silicium |
| NL265948A (es) * | 1960-06-14 | 1900-01-01 | ||
| GB1015604A (en) * | 1961-10-11 | 1966-01-05 | Texas Instruments Ltd | A treatment process for silicon compounds |
| DE1202616B (de) * | 1962-02-23 | 1965-10-07 | Siemens Ag | Verfahren zum Entfernen der bei der Epitaxie auf dem Heizer abgeschiedenen Halbleiterschicht |
| BE632835A (es) * | 1962-06-04 | |||
| US3297501A (en) * | 1963-12-31 | 1967-01-10 | Ibm | Process for epitaxial growth of semiconductor single crystals |
| US3933985A (en) * | 1971-09-24 | 1976-01-20 | Motorola, Inc. | Process for production of polycrystalline silicon |
| US4092446A (en) * | 1974-07-31 | 1978-05-30 | Texas Instruments Incorporated | Process of refining impure silicon to produce purified electronic grade silicon |
| US4102764A (en) * | 1976-12-29 | 1978-07-25 | Westinghouse Electric Corp. | High purity silicon production by arc heater reduction of silicon intermediates |
| US4102765A (en) * | 1977-01-06 | 1978-07-25 | Westinghouse Electric Corp. | Arc heater production of silicon involving alkali or alkaline-earth metals |
| US4102767A (en) * | 1977-04-14 | 1978-07-25 | Westinghouse Electric Corp. | Arc heater method for the production of single crystal silicon |
| US4176166A (en) * | 1977-05-25 | 1979-11-27 | John S. Pennish | Process for producing liquid silicon |
| GB2028289B (en) * | 1978-08-18 | 1982-09-02 | Schumacher Co J C | Producing silicon |
| US4390510A (en) * | 1982-02-16 | 1983-06-28 | General Electric Company | Process for treating spent silicon-containing reaction masses to produce halosilanes |
| US4481232A (en) * | 1983-05-27 | 1984-11-06 | The United States Of America As Represented By The Department Of Energy | Method and apparatus for producing high purity silicon |
| DE3828344C1 (es) * | 1988-08-20 | 1989-07-06 | Huels Ag, 4370 Marl, De | |
| DE102005005044A1 (de) * | 2005-02-03 | 2006-08-10 | Consortium für elektrochemische Industrie GmbH | Verfahren zur Herstellung von Trichlorsilan mittels thermischer Hydrierung von Siliciumtetrachlorid |
| DE102006050329B3 (de) * | 2006-10-25 | 2007-12-13 | Wacker Chemie Ag | Verfahren zur Herstellung von Trichlorsilan |
| US20100001236A1 (en) * | 2008-07-01 | 2010-01-07 | Yongchae Chee | Method of producing trichlorosilane (TCS) rich product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor |
| US20100264362A1 (en) * | 2008-07-01 | 2010-10-21 | Yongchae Chee | Method of producing trichlorosilane (TCS) rich Chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor |
| US8029756B1 (en) | 2010-03-30 | 2011-10-04 | Peak Sun Sillcon Corporation | Closed-loop silicon production |
| DE102012103755A1 (de) | 2012-04-27 | 2013-10-31 | Centrotherm Sitec Gmbh | Verfahren zur Synthese von Trichlorsilan und Vorrichtung zur Durchführung dieses Verfahrens |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2406605A (en) * | 1945-03-15 | 1946-08-27 | Gen Electric | Hydrogenation of halogenosilanes |
| US2499009A (en) * | 1947-02-15 | 1950-02-28 | Linde Air Prod Co | Chlorosilanes |
| US2458703A (en) * | 1947-06-11 | 1949-01-11 | Libbey Owens Ford Glass Co | Reduction of compounds of silicon and halogen |
| US2547874A (en) * | 1948-05-24 | 1951-04-03 | Ernest D Klema | Hydrogen purification method |
| DE900340C (de) * | 1950-08-22 | 1953-12-21 | Siemens Ag | Verfahren zur Herstellung sehr reiner Germanium- oder Siliziumhalogenide |
| US2766112A (en) * | 1952-11-17 | 1956-10-09 | Heraeus Gmbh W C | Production of metallic tantalum and metallic niobium from mixtures of compounds thereof |
| GB745698A (en) * | 1953-09-25 | 1956-02-29 | Standard Telephones Cables Ltd | Improvements in or relating to methods of producing silicon of high purity |
| FR1108543A (fr) * | 1953-09-25 | 1956-01-13 | Int Standard Electric Corp | Méthode de production du silicium à haute pureté |
| DE955415C (de) * | 1955-04-19 | 1957-01-03 | Siemens Ag | Verfahre zum Reinigen von Siliciumhalogenid |
-
0
- DE DENDAT1054436D patent/DE1054436B/de active Pending
- BE BE554836D patent/BE554836A/xx unknown
-
1956
- 1956-02-11 FR FR708286A patent/FR1252005A/fr not_active Expired
-
1957
- 1957-02-01 US US637645A patent/US2943918A/en not_active Expired - Lifetime
- 1957-02-06 GB GB4127/57A patent/GB855913A/en not_active Expired
- 1957-02-07 ES ES0233465A patent/ES233465A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB855913A (en) | 1960-12-07 |
| FR1252005A (fr) | 1961-01-27 |
| BE554836A (es) | |
| US2943918A (en) | 1960-07-05 |
| DE1054436B (de) | 1959-04-09 |
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