ES2399593R1 - Sistema dinámico para calentamiento o enfriamiento variable de sustratos transportados linealmente - Google Patents

Sistema dinámico para calentamiento o enfriamiento variable de sustratos transportados linealmente Download PDF

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Publication number
ES2399593R1
ES2399593R1 ES201230441A ES201230441A ES2399593R1 ES 2399593 R1 ES2399593 R1 ES 2399593R1 ES 201230441 A ES201230441 A ES 201230441A ES 201230441 A ES201230441 A ES 201230441A ES 2399593 R1 ES2399593 R1 ES 2399593R1
Authority
ES
Spain
Prior art keywords
substrates
cooling
heating
transport direction
temperature control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES201230441A
Other languages
English (en)
Other versions
ES2399593A2 (es
ES2399593B1 (es
Inventor
Scott Daniel Feldman-Peabody
Frederick Harper Seymour
Edwin Jackson Little
Mark Jeffrey Pavol
Christopher Rathweg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Primestar Solar Inc
Original Assignee
Primestar Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Primestar Solar Inc filed Critical Primestar Solar Inc
Publication of ES2399593A2 publication Critical patent/ES2399593A2/es
Publication of ES2399593R1 publication Critical patent/ES2399593R1/es
Application granted granted Critical
Publication of ES2399593B1 publication Critical patent/ES2399593B1/es
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B9/3077—Arrangements for treating electronic components, e.g. semiconductors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/125—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/137—Batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/543—Solar cells from Group II-VI materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Tunnel Furnaces (AREA)

Abstract

Sistema dinámico para calentamiento o enfriamiento variables de sustratos transportados linealmente.#Se proporciona un sistema (100) para el calentamiento o el enfriamiento de sustratos (108) discretos, transportados linealmente, con un hueco (114) entre un borde posterior (112) de un primer sustrato y un borde anterior (110) de un sustrato subsiguiente en una dirección de transporte. El sistema incluye una cámara (102) y un transportador (132) configurados de forma funcional dentro de la cámara para mover los sustratos a través de ella a una velocidad de transporte. Una pluralidad de unidades de control de temperatura (116) controladas individualmente, por ejemplo, unidades calefactoras o refrigerantes, se disponen linealmente dentro de la cámara a lo largo de la dirección de transporte. Un controlador (118) está en comunicación con cada una de las unidades de control de temperatura (116) para hacer circular secuencialmente la salida de las unidades desde una salida de temperatura en estado estacionario a lo largo de la dirección de transporte como una función de la posición de los bordes anteriores y posteriores de los sustratos dentro de dicha cámara con relación a dichas unidades de control de temperatura con el fin de reducir las variaciones de temperatura inducidas por los bordes en los sustratos.
ES201230441A 2011-03-24 2012-03-23 Sistema dinámico para calentamiento o enfriamiento variable de sustratos transportados linealmente Withdrawn - After Issue ES2399593B1 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/070661 2011-03-24
US13/070,661 US20120060758A1 (en) 2011-03-24 2011-03-24 Dynamic system for variable heating or cooling of linearly conveyed substrates

Publications (3)

Publication Number Publication Date
ES2399593A2 ES2399593A2 (es) 2013-04-02
ES2399593R1 true ES2399593R1 (es) 2014-11-06
ES2399593B1 ES2399593B1 (es) 2015-08-11

Family

ID=45805407

Family Applications (1)

Application Number Title Priority Date Filing Date
ES201230441A Withdrawn - After Issue ES2399593B1 (es) 2011-03-24 2012-03-23 Sistema dinámico para calentamiento o enfriamiento variable de sustratos transportados linealmente

Country Status (3)

Country Link
US (1) US20120060758A1 (es)
CN (1) CN102691049B (es)
ES (1) ES2399593B1 (es)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1958730B1 (en) * 2005-12-06 2011-06-29 Musashi Engineering, Inc. Machining apparatus and machining method
DE102011080202A1 (de) * 2011-08-01 2013-02-07 Gebr. Schmid Gmbh Vorrichtung und Verfahren zur Herstellung von dünnen Schichten
DE102012103254A1 (de) * 2012-04-16 2013-10-17 Von Ardenne Anlagentechnik Gmbh Verfahren zum Einschleusen von Substraten in eine Vakuumbehandlungsanlage
DE102013100767B4 (de) * 2013-01-25 2021-10-21 VON ARDENNE Asset GmbH & Co. KG Übergabebereich einer Vakuumbehandlungsanlage
KR101807381B1 (ko) * 2013-06-26 2018-01-10 우니페르시테트 콘스탄츠 안정화된 효율을 가지는 광기전력 소자를 생산하기 위한 방법 및 디바이스
JP2016024511A (ja) * 2014-07-16 2016-02-08 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN104561932B (zh) * 2015-01-28 2019-08-27 京东方科技集团股份有限公司 气相沉积系统及气相沉积方法
US11538956B2 (en) 2018-04-27 2022-12-27 Illinois Tool Works Inc. Methods and apparatus to control zone temperatures of a solar cell production system
CN110825130A (zh) * 2019-10-31 2020-02-21 中冶陕压重工设备有限公司 酸洗线工艺段酸液温度控制方法
CN116871713A (zh) * 2023-07-17 2023-10-13 深圳市柠檬光子科技有限公司 加热装置及其加热箱
CN117125886A (zh) * 2023-08-21 2023-11-28 广东顺德添百利科技股份有限公司 玻璃加热温度检测方法及系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652246A (en) * 1969-10-27 1972-03-28 Ppg Industries Inc Apparatus for coating hot glass
US4338078A (en) * 1980-11-24 1982-07-06 Photon Power, Inc. Heated conveyor system
JP2002129311A (ja) * 2000-10-20 2002-05-09 Ulvac Japan Ltd プラズマディスプレイ保護膜形成装置および保護膜形成方法
JP2002129325A (ja) * 2000-10-25 2002-05-09 Matsushita Electric Ind Co Ltd 薄膜形成装置および薄膜形成方法
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
US20100189904A1 (en) * 2008-09-30 2010-07-29 Canon Anelva Corporation Film forming apparatus and film forming method using the same

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870460A (en) * 1974-04-03 1975-03-11 Gca Corp Single or multi-track fluid bearing heating apparatus and method
US4154998A (en) * 1977-07-12 1979-05-15 Trw Inc. Solar array fabrication method and apparatus utilizing induction heating
US4820365A (en) * 1987-09-30 1989-04-11 Dimension Industries, Inc. Glass edge sealant curing system
JP2924361B2 (ja) * 1991-10-08 1999-07-26 松下電器産業株式会社 基板焼成方法
US5390477A (en) * 1991-11-19 1995-02-21 Mcneilab, Inc. System for applying a heat shrinkable sleeve to a container
US5758817A (en) * 1996-03-19 1998-06-02 Resource Concepts, Inc. Apparatus and process for removing surface mounted components from printed wiring assemblies
US6203639B1 (en) * 1998-02-17 2001-03-20 Donnelly Corporation Vehicle assembly line-side heat activation of a “ready-to-install” window fixing adhesive for attachment of a vehicle window to a vehicle
US6054001A (en) * 1998-02-17 2000-04-25 Donnelly Corporation Vehicle assembly line-side heat activation of a "ready-to-install" window fixing adhesive for attachment of a vehicle window to a vehicle
DE69937042T2 (de) * 1998-09-11 2008-05-29 Japan Science And Technology Agency, Kawaguchi Kombinatorische vorrichtung für epitaktische molekularschicht
JP2000306978A (ja) * 1999-02-15 2000-11-02 Kokusai Electric Co Ltd 基板処理装置、基板搬送装置、および基板処理方法
US6849831B2 (en) * 2002-03-29 2005-02-01 Mattson Technology, Inc. Pulsed processing semiconductor heating methods using combinations of heating sources
US7703197B2 (en) * 2005-07-01 2010-04-27 Moltion James R Process for depopulating a circuit board
US7677198B2 (en) * 2005-11-28 2010-03-16 Industrial Technology Research Institute Method and apparatus for growing a composite metal sulphide photocatalyst thin film
WO2007112454A2 (en) * 2006-03-28 2007-10-04 Stratusys Inc. Apparatus and method for processing substrates using one or more vacuum transfer chamber units
US8571396B2 (en) * 2006-06-26 2013-10-29 Tp Solar, Inc. Rapid thermal firing IR conveyor furnace having high intensity heating section
DE102007034135A1 (de) * 2007-05-30 2009-01-29 Robert Bürkle GmbH Verfahren und Vorrichtung zum Laminieren von im Wesentlichen plattenförmigen Werkstücken unter Druck- und Wärmeeinwirkung
US8575521B2 (en) * 2008-04-01 2013-11-05 Mattson Technology, Inc. Monitoring witness structures for temperature control in RTP systems
US20090308860A1 (en) * 2008-06-11 2009-12-17 Applied Materials, Inc. Short thermal profile oven useful for screen printing
JP2010168649A (ja) * 2008-12-26 2010-08-05 Canon Anelva Corp 基板処理装置、成膜方法、電子デバイスの生産方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652246A (en) * 1969-10-27 1972-03-28 Ppg Industries Inc Apparatus for coating hot glass
US4338078A (en) * 1980-11-24 1982-07-06 Photon Power, Inc. Heated conveyor system
JP2002129311A (ja) * 2000-10-20 2002-05-09 Ulvac Japan Ltd プラズマディスプレイ保護膜形成装置および保護膜形成方法
JP2002129325A (ja) * 2000-10-25 2002-05-09 Matsushita Electric Ind Co Ltd 薄膜形成装置および薄膜形成方法
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
US20100189904A1 (en) * 2008-09-30 2010-07-29 Canon Anelva Corporation Film forming apparatus and film forming method using the same

Also Published As

Publication number Publication date
ES2399593A2 (es) 2013-04-02
CN102691049B (zh) 2016-03-30
US20120060758A1 (en) 2012-03-15
ES2399593B1 (es) 2015-08-11
CN102691049A (zh) 2012-09-26

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