ES345149A1 - Multiple-layer coating - Google Patents
Multiple-layer coatingInfo
- Publication number
- ES345149A1 ES345149A1 ES345149A ES345149A ES345149A1 ES 345149 A1 ES345149 A1 ES 345149A1 ES 345149 A ES345149 A ES 345149A ES 345149 A ES345149 A ES 345149A ES 345149 A1 ES345149 A1 ES 345149A1
- Authority
- ES
- Spain
- Prior art keywords
- drum
- source
- electrodes
- vapour
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Material e.g. Au, Cu, titanium dioxide or silicon monoxide is sputtered or evaporated on to a moving strip of e.g. glass to form one or more layers from electrodes 54, 55, 56, and 57 or vapour sources Fig. 2B (not shown), mounted on a drum which is rotated by a hollow shaft 50 extending through the wall 51a of the vacuum chamber to bring each electrode or source in turn into operative position. Fixed contacts 62, 63 provide high and low voltages for sputtering or heating the source material, and the electrodes are cooled by oil circulating in a passage 66, conduits 67, and shaft 50. The drum is located in its working positions by a roller 70 engaging notches in a disc 69. Screens are provided to prevent contamination of one source by another. In modifications Figs. 3, and 4 (not shown) the drum is of hexagonal or rectangular section. In a further modification Fig. 5 (not shown), the electrical and cooling fluid connections are made outside the drum and material is fed to the vapour source through a pipe. The substrate may be cleaned by glow discharge.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| LU52106A LU52106A1 (en) | 1966-10-05 | 1966-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES345149A1 true ES345149A1 (en) | 1968-11-16 |
Family
ID=19724990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES345149A Expired ES345149A1 (en) | 1966-10-05 | 1967-09-18 | Multiple-layer coating |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3616451A (en) |
| AT (2) | AT280514B (en) |
| BE (1) | BE704031A (en) |
| CH (1) | CH501063A (en) |
| DE (1) | DE1615287A1 (en) |
| ES (1) | ES345149A1 (en) |
| FI (1) | FI46636C (en) |
| FR (1) | FR1556228A (en) |
| GB (1) | GB1194428A (en) |
| LU (1) | LU52106A1 (en) |
| NL (1) | NL6713182A (en) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3767559A (en) * | 1970-06-24 | 1973-10-23 | Eastman Kodak Co | Sputtering apparatus with accordion pleated anode means |
| FR2098563A5 (en) * | 1970-07-10 | 1972-03-10 | Progil | |
| JPH0733576B2 (en) * | 1989-11-29 | 1995-04-12 | 株式会社日立製作所 | Sputter device, target exchanging device, and exchanging method thereof |
| JPH05804A (en) * | 1990-08-01 | 1993-01-08 | Sumitomo Electric Ind Ltd | Large area complex oxide superconducting thin film deposition system |
| DE4040856A1 (en) * | 1990-12-20 | 1992-06-25 | Leybold Ag | SPRAYING SYSTEM |
| US5292419A (en) * | 1990-12-20 | 1994-03-08 | Leybold Aktiengesellschaft | Sputtering unit |
| US5322606A (en) * | 1991-12-26 | 1994-06-21 | Xerox Corporation | Use of rotary solenoid as a shutter actuator on a rotating arm |
| US5279724A (en) * | 1991-12-26 | 1994-01-18 | Xerox Corporation | Dual sputtering source |
| GB9405442D0 (en) * | 1994-03-19 | 1994-05-04 | Applied Vision Ltd | Apparatus for coating substrates |
| US6045671A (en) * | 1994-10-18 | 2000-04-04 | Symyx Technologies, Inc. | Systems and methods for the combinatorial synthesis of novel materials |
| DE19830223C1 (en) * | 1998-07-07 | 1999-11-04 | Techno Coat Oberflaechentechni | Magnetron sputtering unit for multilayer coating of substrates especially in small to medium runs or in laboratories |
| US6833031B2 (en) * | 2000-03-21 | 2004-12-21 | Wavezero, Inc. | Method and device for coating a substrate |
| JP2003141719A (en) * | 2001-10-30 | 2003-05-16 | Anelva Corp | Sputtering apparatus and thin film forming method |
| JP4066044B2 (en) * | 2002-11-08 | 2008-03-26 | 信行 高橋 | Film forming method and sputtering apparatus |
| CA2564539C (en) * | 2005-11-14 | 2014-05-06 | Sulzer Metco Coatings B.V. | A method for coating of a base body with a platinum modified aluminide ptmal by means of a physical deposition out of the gas phase |
| US8287647B2 (en) * | 2007-04-17 | 2012-10-16 | Lam Research Corporation | Apparatus and method for atomic layer deposition |
| KR100865475B1 (en) * | 2007-08-30 | 2008-10-27 | 세메스 주식회사 | Nozzle assembly, processing liquid supply apparatus having the same, and processing liquid supply method using the same |
| US10586689B2 (en) | 2009-07-31 | 2020-03-10 | Guardian Europe S.A.R.L. | Sputtering apparatus including cathode with rotatable targets, and related methods |
| KR20130079489A (en) * | 2010-07-28 | 2013-07-10 | 시너스 테크놀리지, 인코포레이티드 | Rotating reactor assembly for depositing film on substrate |
| US20130014700A1 (en) * | 2011-07-11 | 2013-01-17 | Hariharakeshava Sarpangala Hegde | Target shield designs in multi-target deposition system. |
| CN105793976A (en) * | 2013-10-24 | 2016-07-20 | 梅耶博格（德国）股份有限公司 | Multi-magnet arrangement |
| EP3957929A3 (en) * | 2017-07-07 | 2022-06-08 | NEXTracker, Inc. | Methods of positioning solar panels in an array of solar panels to efficiently capture sunlight |
-
1966
- 1966-10-05 LU LU52106A patent/LU52106A1/xx unknown
-
1967
- 1967-08-21 GB GB38382/67A patent/GB1194428A/en not_active Expired
- 1967-09-18 ES ES345149A patent/ES345149A1/en not_active Expired
- 1967-09-19 BE BE704031A patent/BE704031A/xx unknown
- 1967-09-19 CH CH1308567A patent/CH501063A/en not_active IP Right Cessation
- 1967-09-21 DE DE19671615287 patent/DE1615287A1/en active Pending
- 1967-09-21 FR FR121839A patent/FR1556228A/fr not_active Expired
- 1967-09-26 AT AT874467A patent/AT280514B/en not_active IP Right Cessation
- 1967-09-27 US US670853A patent/US3616451A/en not_active Expired - Lifetime
- 1967-09-27 AT AT877167A patent/AT284365B/en not_active IP Right Cessation
- 1967-09-27 NL NL6713182A patent/NL6713182A/xx unknown
- 1967-10-05 FI FI672690A patent/FI46636C/en active
Also Published As
| Publication number | Publication date |
|---|---|
| LU52106A1 (en) | 1968-05-07 |
| AT284365B (en) | 1970-09-10 |
| GB1194428A (en) | 1970-06-10 |
| FI46636C (en) | 1973-05-08 |
| NL6713182A (en) | 1968-04-08 |
| US3616451A (en) | 1971-10-26 |
| CH501063A (en) | 1970-12-31 |
| AT280514B (en) | 1970-04-10 |
| BE704031A (en) | 1968-03-19 |
| FI46636B (en) | 1973-01-31 |
| FR1556228A (en) | 1969-02-07 |
| DE1615287A1 (en) | 1970-06-11 |
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