ES374897A1 - Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato. - Google Patents
Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato.Info
- Publication number
- ES374897A1 ES374897A1 ES374897A ES374897A ES374897A1 ES 374897 A1 ES374897 A1 ES 374897A1 ES 374897 A ES374897 A ES 374897A ES 374897 A ES374897 A ES 374897A ES 374897 A1 ES374897 A1 ES 374897A1
- Authority
- ES
- Spain
- Prior art keywords
- film
- translation
- measuring
- substrate
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
- G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US79681969A | 1969-02-05 | 1969-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES374897A1 true ES374897A1 (es) | 1972-02-16 |
Family
ID=25169136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES374897A Expired ES374897A1 (es) | 1969-02-05 | 1969-12-24 | Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato. |
Country Status (5)
| Country | Link |
|---|---|
| BR (1) | BR6915745D0 (es) |
| DE (1) | DE1962359A1 (es) |
| ES (1) | ES374897A1 (es) |
| FR (1) | FR2030857A5 (es) |
| NL (1) | NL6919571A (es) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2457253C2 (de) * | 1974-12-04 | 1982-09-02 | Krautkrämer, GmbH, 5000 Köln | Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings |
| DE102018202985A1 (de) | 2018-02-28 | 2018-04-12 | Carl Zeiss Smt Gmbh | Verfahren zum Bestimmen einer Ablösewahrscheinlichkeit einer Schicht |
-
1969
- 1969-12-12 DE DE19691962359 patent/DE1962359A1/de active Pending
- 1969-12-15 FR FR6943355A patent/FR2030857A5/fr not_active Expired
- 1969-12-24 ES ES374897A patent/ES374897A1/es not_active Expired
- 1969-12-30 NL NL6919571A patent/NL6919571A/xx unknown
- 1969-12-30 BR BR21574569A patent/BR6915745D0/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| BR6915745D0 (pt) | 1973-05-03 |
| DE1962359A1 (de) | 1970-09-03 |
| NL6919571A (es) | 1970-08-07 |
| FR2030857A5 (en) | 1970-11-13 |
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