ES389468A1 - Procedimiento para la preparacion de monocristales filamen-tosos de carburo de silicio. - Google Patents

Procedimiento para la preparacion de monocristales filamen-tosos de carburo de silicio.

Info

Publication number
ES389468A1
ES389468A1 ES389468A ES389468A ES389468A1 ES 389468 A1 ES389468 A1 ES 389468A1 ES 389468 A ES389468 A ES 389468A ES 389468 A ES389468 A ES 389468A ES 389468 A1 ES389468 A1 ES 389468A1
Authority
ES
Spain
Prior art keywords
monocrystals
silicon
silicon carbide
production
filamentous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES389468A
Other languages
English (en)
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lonza AG
Original Assignee
Lonza AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lonza AG filed Critical Lonza AG
Publication of ES389468A1 publication Critical patent/ES389468A1/es
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005Growth of whiskers or needles
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/12Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
ES389468A 1970-06-05 1971-03-23 Procedimiento para la preparacion de monocristales filamen-tosos de carburo de silicio. Expired ES389468A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH842470A CH526336A (de) 1970-06-05 1970-06-05 Verfahren zur Herstellung von Whiskers

Publications (1)

Publication Number Publication Date
ES389468A1 true ES389468A1 (es) 1973-06-01

Family

ID=4340121

Family Applications (1)

Application Number Title Priority Date Filing Date
ES389468A Expired ES389468A1 (es) 1970-06-05 1971-03-23 Procedimiento para la preparacion de monocristales filamen-tosos de carburo de silicio.

Country Status (11)

Country Link
AT (1) AT318542B (fr)
BE (1) BE767711A (fr)
BR (1) BR7102227D0 (fr)
CH (1) CH526336A (fr)
DE (1) DE2127473A1 (fr)
ES (1) ES389468A1 (fr)
FR (1) FR2097792A5 (fr)
GB (1) GB1284688A (fr)
NL (1) NL7107194A (fr)
SE (1) SE376896B (fr)
SU (1) SU401042A3 (fr)

Also Published As

Publication number Publication date
BE767711A (fr) 1971-11-26
AT318542B (de) 1974-10-25
NL7107194A (fr) 1971-12-07
SE376896B (fr) 1975-06-16
GB1284688A (en) 1972-08-09
BR7102227D0 (pt) 1973-04-10
CH526336A (de) 1972-08-15
DE2127473A1 (de) 1971-12-09
SU401042A3 (fr) 1973-10-01
FR2097792A5 (fr) 1972-03-03

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