ES8600346A1 - Un metodo de aumentar el contraste de un material protector positivo de polimero - Google Patents

Un metodo de aumentar el contraste de un material protector positivo de polimero

Info

Publication number
ES8600346A1
ES8600346A1 ES532484A ES532484A ES8600346A1 ES 8600346 A1 ES8600346 A1 ES 8600346A1 ES 532484 A ES532484 A ES 532484A ES 532484 A ES532484 A ES 532484A ES 8600346 A1 ES8600346 A1 ES 8600346A1
Authority
ES
Spain
Prior art keywords
polymer
contrast
increasing
protective material
molecular weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES532484A
Other languages
English (en)
Other versions
ES532484A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ExxonMobil Technology and Engineering Co
Original Assignee
Exxon Research and Engineering Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exxon Research and Engineering Co filed Critical Exxon Research and Engineering Co
Publication of ES532484A0 publication Critical patent/ES532484A0/es
Publication of ES8600346A1 publication Critical patent/ES8600346A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PROCEDIMIENTO PARA AUMENTAR LA SENSIBILIDAD DE MATERIALES PROTECTORES POSITIVOS SENSIBLES A RADIACIONES.COMPRENDE: OBTENER UNA FRACCION ESTRECHA DE PESOS MOLECULARES DE UN MATERIAL PROTECTOR POSITIVO DE POLIMERO; RECUBRIR UN SUSTRATO CON DICHO MATERIAL DE FRACCION ESTRECHA DE PESOS MOLECULARES; Y COCER DICHO SUSTRATO RECUBIERTO CON EL MATERIAL PROTECTOR DE FRACCION ESTRECHA A UNA TEMPERATURA SUPERIOR A LA TEMPERATURA DE TRANSICION VITREA.
ES532484A 1982-09-28 1984-05-14 Un metodo de aumentar el contraste de un material protector positivo de polimero Expired ES8600346A1 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42624382A 1982-09-28 1982-09-28
US52817883A 1983-08-31 1983-08-31

Publications (2)

Publication Number Publication Date
ES532484A0 ES532484A0 (es) 1985-09-16
ES8600346A1 true ES8600346A1 (es) 1985-09-16

Family

ID=27026986

Family Applications (2)

Application Number Title Priority Date Filing Date
ES525880A Expired ES8503703A1 (es) 1982-09-28 1983-09-23 Un metodo de aumentar la sensibilidad de una capa protectora positiva de polimero
ES532484A Expired ES8600346A1 (es) 1982-09-28 1984-05-14 Un metodo de aumentar el contraste de un material protector positivo de polimero

Family Applications Before (1)

Application Number Title Priority Date Filing Date
ES525880A Expired ES8503703A1 (es) 1982-09-28 1983-09-23 Un metodo de aumentar la sensibilidad de una capa protectora positiva de polimero

Country Status (3)

Country Link
EP (1) EP0110515A1 (es)
AU (1) AU1962283A (es)
ES (2) ES8503703A1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4230297C1 (de) * 1992-09-10 1994-03-17 Kernforschungsz Karlsruhe Verwendung eines Gießharzes und Verfahren zu dessen Herstellung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535137A (en) * 1967-01-13 1970-10-20 Ibm Method of fabricating etch resistant masks
US3996393A (en) * 1974-03-25 1976-12-07 International Business Machines Corporation Positive polymeric electron beam resists of very great sensitivity
FR2394833A1 (fr) * 1977-06-17 1979-01-12 Thomson Csf Resine de masquage positive presentant une sensibilite amelioree a l'irradiation electronique, et methode de fabrication d'une telle resine

Also Published As

Publication number Publication date
ES532484A0 (es) 1985-09-16
EP0110515A1 (en) 1984-06-13
ES525880A0 (es) 1985-03-01
ES8503703A1 (es) 1985-03-01
AU1962283A (en) 1984-04-05

Similar Documents

Publication Publication Date Title
JPS57179210A (en) Room temperature curing elastic composition
ATE162806T1 (de) Hydroxylgruppen enthaltende copolymerisate, ihre herstellung und ihre verwendung in festkörperreichen beschichtungsmitteln
EP0387664A3 (de) Wässrige Kunststoffdispersion, Verfahren zu ihrer Herstellung und Anwendung
FI822686A0 (fi) Autoxiderbara polymerblandningar, produkter gjorda av dem och foerfaranden foer varderas framstaellning
BE852907A (fr) Compositions de polymelanges a base de polymeres de monomeres aromatiques monoalkenyliques et d'un caoutchouc de polybutadiene
JPS57209908A (en) Organic polymer
DE2966764D1 (en) Polymerisable compositions, derived coatings and other polymerised products
ES8400474A1 (es) Metodo para la obtencion de articulos de policarbonato con propiedades superficiales mejoradas
DE69121461D1 (de) Lichtempfindliches, wärmebeständiges Polymer mit Hydroxyphenylgruppen
DK0388327T3 (da) Blandinger af poly(arylensulfid) og copoly(arylensulfid) modificeret med diphenylether
ES8503703A1 (es) Un metodo de aumentar la sensibilidad de una capa protectora positiva de polimero
JPS52140591A (en) Novel hydrogenated hydrocarbon resisn
JPS53149247A (en) Antistatic polyester composition
FR2472768B1 (es)
FI943013A0 (fi) Olefiinipolymeeripohjainen koostumus ja tästä koostumuksesta valmistettu tuote
DE3482266D1 (en) Freie radikale additionscopolymere von meta- oder para-isopropenyl-alpha,alpha-dimethylbenzylisocyanat.
FI812333L (fi) Sulfonerade poly(arylenetersulfon)polymerer foer foerhindrande av tandplack
JPS6460633A (en) Coating material
ES544113A0 (es) Procedimiento de preparar articulos a base de polimeros y metodo de proteger la flora en un emplazamiento agricola u horticola
JPS5386788A (en) Polymer having fluorine-containing segment and its production
EP0336129A3 (en) Room temperature curing, alternating isopropenyldimethylbenzylisocyanate copolymers having high isocyanate fuctionality
JPS5298757A (en) Method of coloring high polymers
JPS55151637A (en) Radiation sensitive material and film forming method
JPS57109943A (en) Formation of submicron pattern using radiation sensitive resist
ATE12178T1 (de) Oralhygienische sulfonierte poly(arylen-aethersulfon)polymere als schutzfilm gegen zahnbelagenthaltende zusammensetzungen.