ES8605589A1 - Procedimiento para fabricar material en capas o piezas en capas - Google Patents

Procedimiento para fabricar material en capas o piezas en capas

Info

Publication number
ES8605589A1
ES8605589A1 ES540255A ES540255A ES8605589A1 ES 8605589 A1 ES8605589 A1 ES 8605589A1 ES 540255 A ES540255 A ES 540255A ES 540255 A ES540255 A ES 540255A ES 8605589 A1 ES8605589 A1 ES 8605589A1
Authority
ES
Spain
Prior art keywords
sputtering
layers
layer
coated
bond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES540255A
Other languages
English (en)
Spanish (es)
Other versions
ES540255A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GLYCO METALL WERKE
Glyco Metall Werke Daelen und Loos GmbH
Original Assignee
GLYCO METALL WERKE
Glyco Metall Werke Daelen und Loos GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GLYCO METALL WERKE, Glyco Metall Werke Daelen und Loos GmbH filed Critical GLYCO METALL WERKE
Publication of ES540255A0 publication Critical patent/ES540255A0/es
Publication of ES8605589A1 publication Critical patent/ES8605589A1/es
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
ES540255A 1984-02-11 1985-02-08 Procedimiento para fabricar material en capas o piezas en capas Expired ES8605589A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843404880 DE3404880A1 (de) 1984-02-11 1984-02-11 Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken

Publications (2)

Publication Number Publication Date
ES540255A0 ES540255A0 (es) 1986-03-16
ES8605589A1 true ES8605589A1 (es) 1986-03-16

Family

ID=6227432

Family Applications (1)

Application Number Title Priority Date Filing Date
ES540255A Expired ES8605589A1 (es) 1984-02-11 1985-02-08 Procedimiento para fabricar material en capas o piezas en capas

Country Status (9)

Country Link
JP (1) JPS60184676A (de)
AT (1) AT383145B (de)
BR (1) BR8500587A (de)
CH (1) CH663220A5 (de)
DE (1) DE3404880A1 (de)
ES (1) ES8605589A1 (de)
FR (1) FR2559507A1 (de)
GB (1) GB2154249B (de)
IT (1) IT1184136B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4661233A (en) * 1985-07-05 1987-04-28 Westinghouse Electric Corp. Cathode/ground shield arrangement in a sputter coating apparatus
CH671239A5 (de) * 1986-07-15 1989-08-15 Balzers Hochvakuum
DE3640767A1 (de) * 1986-10-30 1988-05-05 Kolbenschmidt Ag Lagerung
ATE80671T1 (de) * 1986-12-23 1992-10-15 Balzers Hochvakuum Verbundwerkstoff mit einer durch kathodenzerstaeubung aufgebrachten gleitschicht.
EP0288677B1 (de) * 1987-04-30 1992-08-19 Balzers Aktiengesellschaft Bauteil, insbesondere Maschinenelement
RU2180365C2 (ru) * 1998-09-01 2002-03-10 Сенокосов Евгений Степанович Способ получения многослойной ленты и устройство для его осуществления
JP5550565B2 (ja) * 2008-12-15 2014-07-16 株式会社アルバック スパッタリング装置及びスパッタリング方法
AT519107B1 (de) 2017-01-23 2018-04-15 Miba Gleitlager Austria Gmbh Verfahren zur Herstellung eines Mehrschichtgleitlagerelementes

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6615807A (de) * 1965-11-12 1967-05-16
US3723276A (en) * 1969-06-03 1973-03-27 Warner Lambert Co Article coating method
DE2039416A1 (de) * 1969-08-11 1971-02-25 Varian Associates Vakuumgalvanisiervorrichtung
GB1391842A (en) * 1971-08-04 1975-04-23 Elektromat Veb Apparatus for coating substrates by cathode sputtering and for cleaning by ion bombardment in the same vacuum vessel
BE792605A (fr) * 1972-01-13 1973-03-30 Siempelkamp Gmbh & Co Procede et installation de fabrication de panneaux plaques
US3784458A (en) * 1973-04-03 1974-01-08 Warner Lambert Co Method of coating a continuous strip of ribbon razor blade material
US3864239A (en) * 1974-04-22 1975-02-04 Nasa Multitarget sequential sputtering apparatus
US3981791A (en) * 1975-03-10 1976-09-21 Signetics Corporation Vacuum sputtering apparatus
DE2636293A1 (de) * 1976-08-12 1978-02-16 Leybold Heraeus Gmbh & Co Kg Katodenzerstaeubungsvorrichtung
GB1570380A (en) * 1978-05-30 1980-07-02 Standard Telephones Cables Ltd Electroless plating
US4410407A (en) * 1981-12-22 1983-10-18 Raytheon Company Sputtering apparatus and methods

Also Published As

Publication number Publication date
FR2559507A1 (fr) 1985-08-16
DE3404880A1 (de) 1985-08-14
ES540255A0 (es) 1986-03-16
AT383145B (de) 1987-05-25
IT1184136B (it) 1987-10-22
CH663220A5 (de) 1987-11-30
ATA6285A (de) 1986-10-15
BR8500587A (pt) 1985-09-24
JPS60184676A (ja) 1985-09-20
GB2154249A (en) 1985-09-04
GB8502734D0 (en) 1985-03-06
IT8519200A0 (it) 1985-01-23
GB2154249B (en) 1988-05-05

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