FR1268758A - Pompe électronique modulaire à vide ultra-poussé - Google Patents

Pompe électronique modulaire à vide ultra-poussé

Info

Publication number
FR1268758A
FR1268758A FR838701A FR838701A FR1268758A FR 1268758 A FR1268758 A FR 1268758A FR 838701 A FR838701 A FR 838701A FR 838701 A FR838701 A FR 838701A FR 1268758 A FR1268758 A FR 1268758A
Authority
FR
France
Prior art keywords
vacuum pump
high vacuum
modular electronic
electronic ultra
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR838701A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultek Corp
Original Assignee
Ultek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US842294A external-priority patent/US3112864A/en
Application filed by Ultek Corp filed Critical Ultek Corp
Priority to FR838701A priority Critical patent/FR1268758A/fr
Application granted granted Critical
Publication of FR1268758A publication Critical patent/FR1268758A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR838701A 1959-09-25 1960-09-15 Pompe électronique modulaire à vide ultra-poussé Expired FR1268758A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR838701A FR1268758A (fr) 1959-09-25 1960-09-15 Pompe électronique modulaire à vide ultra-poussé

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US842294A US3112864A (en) 1959-09-25 1959-09-25 Modular electronic ultrahigh vacuum pump
FR838701A FR1268758A (fr) 1959-09-25 1960-09-15 Pompe électronique modulaire à vide ultra-poussé

Publications (1)

Publication Number Publication Date
FR1268758A true FR1268758A (fr) 1961-08-04

Family

ID=26187507

Family Applications (1)

Application Number Title Priority Date Filing Date
FR838701A Expired FR1268758A (fr) 1959-09-25 1960-09-15 Pompe électronique modulaire à vide ultra-poussé

Country Status (1)

Country Link
FR (1) FR1268758A (fr)

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