FR1297221A - Vanne à vide, notamment pour pompes à diffusion - Google Patents

Vanne à vide, notamment pour pompes à diffusion

Info

Publication number
FR1297221A
FR1297221A FR861906A FR861906A FR1297221A FR 1297221 A FR1297221 A FR 1297221A FR 861906 A FR861906 A FR 861906A FR 861906 A FR861906 A FR 861906A FR 1297221 A FR1297221 A FR 1297221A
Authority
FR
France
Prior art keywords
vacuum valve
diffusion pumps
pumps
diffusion
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR861906A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEAUDOUIN Sarl ETS
Original Assignee
BEAUDOUIN Sarl ETS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEAUDOUIN Sarl ETS filed Critical BEAUDOUIN Sarl ETS
Priority to FR861906A priority Critical patent/FR1297221A/fr
Application granted granted Critical
Publication of FR1297221A publication Critical patent/FR1297221A/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
FR861906A 1961-05-16 1961-05-16 Vanne à vide, notamment pour pompes à diffusion Expired FR1297221A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR861906A FR1297221A (fr) 1961-05-16 1961-05-16 Vanne à vide, notamment pour pompes à diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR861906A FR1297221A (fr) 1961-05-16 1961-05-16 Vanne à vide, notamment pour pompes à diffusion

Publications (1)

Publication Number Publication Date
FR1297221A true FR1297221A (fr) 1962-06-29

Family

ID=8755250

Family Applications (1)

Application Number Title Priority Date Filing Date
FR861906A Expired FR1297221A (fr) 1961-05-16 1961-05-16 Vanne à vide, notamment pour pompes à diffusion

Country Status (1)

Country Link
FR (1) FR1297221A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311785A1 (de) * 1982-04-02 1983-10-13 Ekkehard 5160 Düren Friedrich Anschlussstueck fuer rohrleitungen
EP2336611A1 (fr) * 2009-12-15 2011-06-22 Applied Materials, Inc. Soupape avec refroidissement par eau

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311785A1 (de) * 1982-04-02 1983-10-13 Ekkehard 5160 Düren Friedrich Anschlussstueck fuer rohrleitungen
EP2336611A1 (fr) * 2009-12-15 2011-06-22 Applied Materials, Inc. Soupape avec refroidissement par eau

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