FR1476011A - Dispositif à décharge luminescente, à cathode froide - Google Patents

Dispositif à décharge luminescente, à cathode froide

Info

Publication number
FR1476011A
FR1476011A FR54159A FR54159A FR1476011A FR 1476011 A FR1476011 A FR 1476011A FR 54159 A FR54159 A FR 54159A FR 54159 A FR54159 A FR 54159A FR 1476011 A FR1476011 A FR 1476011A
Authority
FR
France
Prior art keywords
discharge device
cold cathode
glow discharge
glow
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR54159A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to FR54159A priority Critical patent/FR1476011A/fr
Application granted granted Critical
Publication of FR1476011A publication Critical patent/FR1476011A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR54159A 1966-03-18 1966-03-18 Dispositif à décharge luminescente, à cathode froide Expired FR1476011A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR54159A FR1476011A (fr) 1966-03-18 1966-03-18 Dispositif à décharge luminescente, à cathode froide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR54159A FR1476011A (fr) 1966-03-18 1966-03-18 Dispositif à décharge luminescente, à cathode froide

Publications (1)

Publication Number Publication Date
FR1476011A true FR1476011A (fr) 1967-04-07

Family

ID=8604200

Family Applications (1)

Application Number Title Priority Date Filing Date
FR54159A Expired FR1476011A (fr) 1966-03-18 1966-03-18 Dispositif à décharge luminescente, à cathode froide

Country Status (1)

Country Link
FR (1) FR1476011A (fr)

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