FR1506933A - Dispositif de décharge à cathode froide - Google Patents

Dispositif de décharge à cathode froide

Info

Publication number
FR1506933A
FR1506933A FR89362A FR89362A FR1506933A FR 1506933 A FR1506933 A FR 1506933A FR 89362 A FR89362 A FR 89362A FR 89362 A FR89362 A FR 89362A FR 1506933 A FR1506933 A FR 1506933A
Authority
FR
France
Prior art keywords
discharge device
cold cathode
cathode discharge
cold
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR89362A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Application granted granted Critical
Publication of FR1506933A publication Critical patent/FR1506933A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR89362A 1965-12-30 1966-12-29 Dispositif de décharge à cathode froide Expired FR1506933A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB02766/66A GB1154379A (en) 1965-12-30 1965-12-30 Improvements in or relating to Cold-Cathode Discharge Devices
GB5520665 1965-12-30

Publications (1)

Publication Number Publication Date
FR1506933A true FR1506933A (fr) 1967-12-22

Family

ID=26249248

Family Applications (1)

Application Number Title Priority Date Filing Date
FR89362A Expired FR1506933A (fr) 1965-12-30 1966-12-29 Dispositif de décharge à cathode froide

Country Status (4)

Country Link
US (1) US3518484A (fr)
DE (1) DE1589012A1 (fr)
FR (1) FR1506933A (fr)
GB (1) GB1154379A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614510A (en) * 1968-06-04 1971-10-19 United Ekingdom Atomic Energy Nonthermionic cathode discharge devices

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
US4424104A (en) 1983-05-12 1984-01-03 International Business Machines Corporation Single axis combined ion and vapor source
US5190703A (en) * 1990-12-24 1993-03-02 Himont, Incorporated Plasma reactor chamber
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator
US5465030A (en) * 1995-01-20 1995-11-07 The United States Of America As Represented By The Secretary Of The Army Trigger apparatus for spark gap dischargers

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262003A (en) * 1962-05-25 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614510A (en) * 1968-06-04 1971-10-19 United Ekingdom Atomic Energy Nonthermionic cathode discharge devices

Also Published As

Publication number Publication date
US3518484A (en) 1970-06-30
DE1589012A1 (de) 1970-03-05
GB1154379A (en) 1969-06-04

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